Gas injector with baffle

Patent metadata

Field	Value
Publication number	US-11077410-B2
Application number	US-201816116531-A
Country	US
Kind code	B2
Filing date	Aug 29, 2018
Priority date	Oct 9, 2017
Publication date	Aug 3, 2021
Grant date	Aug 3, 2021

Abstract

Gas injectors for providing uniform flow of fluid are provided herein. The gas injector includes a plenum body. The plenum body includes a recess, a protrusion adjacent to the recess and extending laterally away from the plenum body, and a plurality of nozzles extending laterally from an exterior surface of the plenum body. The plenum body has a plurality of holes in an exterior wall of the plenum body. Each nozzle is in fluid communication with an interior volume of the plenum body. By directing the flow of fluid, the gas injector provides for a uniform deposition.

First claim

What is claimed is:

1. A gas injector comprising:
a plenum body, wherein the body comprises:
a top surface and a bottom surface opposite the top surface;
a recess formed into the top surface; and
a protrusion adjacent to the recess and extending laterally away from the bottom surface of the plenum body, wherein the protrusion comprises:
a divider disposed across an interior volume of the plenum body separating the interior volume into a first volume adjacent to the recess and a second volume extending into the protrusion, wherein the divider has a plurality of holes that provide fluid communication between the first volume and the second volume;
a side wall and a bottom wall orthogonal to the side wall; and
an opening formed through the side wall and in fluid communication with the second volume.

2. The gas injector of claim 1 , further comprising a textured surface or coating on an interior surface of the protrusion, the interior surface surrounding the second volume, wherein the textured surface or coating has projections extending away from the interior surface.

3. The gas injector of claim 2 , wherein the projections extend from the interior surface a distance between about 25 microns and about 100 microns.

4. A gas injector comprising:
a plenum body, wherein the plenum body comprises:
a top surface and a bottom surface opposite the top surface;
a recess formed into the top surface; and
a protrusion adjacent to the recess and extending laterally away from the bottom surface of the plenum body, wherein the protrusion comprises:
a plurality of holes formed within a divider; and
a baffle adjacent the plurality of holes, wherein the plurality of holes provides fluid communication between an interior volume of the plenum body and the baffle, and wherein the interior volume extends from the recess, through the plenum body and the lower surface, and into the protrusion; and
an opening formed through a side wall of the protrusion and in fluid communication with the interior volume.

5. The gas injector of claim 4 , wherein the baffle comprises a first extension and a second extension orthogonal the first extension.

6. The gas injector of claim 5 , wherein the first extension connects to a bottom surface of the protrusion.

7. The gas injector of claim 6 , wherein the second extension is spaced from the protrusion by a distance of about 0.04 inches to about 0.05 inches.

8. The gas injector of claim 4 , wherein the plurality of holes is disposed on a bottom surface of the protrusion.

9. The gas injector of claim 8 , wherein the plurality of holes is centrally located within the bottom surface of the protrusion.

10. The gas injector of claim 4 , wherein the plenum body further comprises another plurality of holes which disposed in a top surface of the plenum body.

11. The gas injector of claim 4 , further comprising a textured surface or coating on an interior surface of the protrusion, the interior surface surrounding the interior volume, wherein the textured surface or coating has projections extending away from the interior surface.

12. The gas injector of claim 11 , wherein the projections extend from the interior surface a distance between about 25 microns and about 100 microns.

13. A gas injector comprising:
a plenum body, wherein the plenum body comprises:
a recess;
a protrusion adjacent to the recess and extending laterally away from the plenum body, wherein the protrusion comprises:
a divider disposed across an interior volume of the plenum body separating the interior volume into a first volume adjacent to the recess and a second volume extending into the protrusion, wherein the divider has a plurality of holes that provide fluid communication between the first volume and the second volume;
a side wall and a bottom wall orthogonal to the side wall; and
an opening formed through the side wall and in fluid communication with the second volume.

14. The gas injector of claim 13 , wherein the second volume is within the protrusion.

15. The gas injector of claim 13 , wherein the opening is disposed in a side wall of the protrusion.

16. The gas injector of claim 13 , wherein the divider is spaced from a bottom surface of the protrusion by a distance of about 0.04 inches to about 0.60 inches.

17. The gas injector of claim 13 , further comprising a textured surface or coating on an interior surface of the protrusion, the interior surface surrounding the second volume, wherein the textured surface or coating has projections extending away from the interior surface.

18. The gas injector of claim 17 , wherein the projections extend from the interior surface a distance between about 25 microns and about 100 microns.

19. The gas injector of claim 18 , wherein the plenum body further comprises a plurality of holes disposed in a top surface of the plenum body.

Assignees

• Applied Materials Inc

Inventors

• Pandey Vishwas Kumar
• Hawrylchak Lara
• Shono Eric Kihara
• Shah Kartik
• Olsen Christopher S
• Tallavarjula Sairaju
• Pradhan Kailash
• George Rene
• Swenberg Johanes F
• Moffatt Stephen

Classifications

• H10P72/0402 Primary

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• B01F23/191 Primary

  characterised by the construction of the controlling means · CPC title

• B01J2208/00929

  Provided with baffles · CPC title

• B01J4/007

  provided with moving parts · CPC title

• B01J4/005

  provided with baffles · CPC title