Chemistries for etching multi-stacked layers

Patent metadata

Field	Value
Publication number	US-11075084-B2
Application number	US-201715692247-A
Country	US
Kind code	B2
Filing date	Aug 31, 2017
Priority date	Aug 31, 2017
Publication date	Jul 27, 2021
Grant date	Jul 27, 2021

Abstract

Methods for fabricating a 3D NAND flash memory are disclosed. The method includes the steps of forming a hardmask pattern on the hardmask layer, and using the hardmask pattern to form apertures in the alternating layers by selectively plasma etching the alternating layers versus the hardmask layer using a hydrofluorocarbon etching gas selected from the group consisting of 1,1,1,3,3,3-hexafluoropropane (C3H2F6), 1,1,2,2,3,3-hexafluoropropane (iso-C3H2F6), 1,1,1,2,3,3,3-heptafluoropropane (C3HF7), and 1,1,1,2,2,3,3-heptafluoropropane (iso-C3HF7), wherein the first etching layer comprises a material different from that of the second etching layer.

First claim

What is claimed is:

1. A method for fabricating a 3D NAND flash memory having alternating layers of a first etching layer and a second etching layer on a substrate and a hardmask layer on the alternating layers, the method comprising the steps of:
forming a hardmask pattern on the hardmask layer; and
using the hardmask pattern to form apertures having a sidewall bowing less than approximately 5% in the alternating layers by selectively plasma etching the alternating layers of the first etching layer and the second etching layer versus the hardmask layer using an etching gas consisting of a hydrofluorocarbon etching gas selected from the group consisting of 1,1,1,3,3,3-hexafluoropropane (C 3 H 2 F 6 ), 1,1,2,2,3,3-hexafluoropropane (iso-C 3 H 2 F 6 ), 1,1,1,2,3,3,3-heptafluoropropane (C 3 HF 7 ), 1,1,1,2,2,3,3-heptafluoropropane (iso-C 3 HF 7 ), and combinations thereof, a fluorocarbon etching gas containing hydrogen or iodine selected from the group consisting of cC 4 F 8 , C 4 F 8 , C 4 F 6 , C 5 F 8 , CF 4 , CH 3 F, CF 3 H, CH 2 F 2 , CF 3 I, C 2 F 3 I, C 2 F 5 I and combinations thereof, an oxygen-containing gas and an inert gas,
wherein the first etching layer comprises a material different from that of the second etching layer,
wherein the hydrofluorocarbon etching gases plasma etch the first etching layer versus the second etching layer with a selectivity between approximately 1:2 to approximately 2:1, and
wherein the apertures have an aspect ratio within a range from larger than 20:1 to approximately 200:1.

2. The method of claim 1 , wherein the alternating layers comprises a layer of silicon oxide, silicon nitride, SiOCN, SiON, Si a O b H c C d N e , where a>0; b, c, d and e≥0, or combinations thereof.

3. The method of claim 1 , wherein the first etching layer comprises a silicon oxide layer and the second etching layer comprises a silicon nitride layer, and vice versa.

4. The method of claim 1 , wherein the hardmask layer is selected from the group consisting of CVD or spin on deposited layer of amorphous carbon or doped carbon, silicon-containing spin on mask, and carbon-containing spin on mask.

5. The method of claim 1 , wherein the oxygen-containing gas is selected from the group consisting of O 2 , O 3 , CO, CO 2 , NO, NO 2 , N 2 O, SO 2 , COS, H 2 O and combination thereof.

6. The method of claim 5 , wherein the hydrofluorocarbon etching gas is 1,1,2,2,3,3-hexafluoropropane (iso-C 3 H 2 F 6 ).

7. The method of claim 5 , wherein the hydrofluorocarbon etching gas is 1,1,1,2,3,3,3-Heptafluoropropane (C 3 HF 7 ).

8. The method of claim 5 , wherein the hydrofluorocarbon etching gas is 1,1,1,2,2,3,3-heptafluoropropane (iso-C 3 HF 7 ).

9. The method of claim 1 , wherein the hydrofluorocarbon etching gases plasma etch the alternating layers of the first etching layer and the second etching layer versus the hardmask layer with an infinite selectivity.

10. The method of claim 1 , wherein the hydrofluorocarbon etching gases plasma etch the first etching layer versus the second etching layer with a selectivity of approximately 1:1.

11. The method of claim 1 , further comprising the step of heating the hydrofluorocarbon etching gas to maintain a predetermined flow rate of the hydrofluorocarbon etching gas for plasma etching and to avoid condensation.

12. The method of claim 5 , wherein the hydrofluorocarbon etching gas is 1,1,1,3,3,3-hexafluoropropane (C 3 H 2 F 6 ).

13. A method for fabricating a 3D NAND flash memory having alternating layers of a first etching layer and a second etching layer on a substrate and a hardmask layer on the alternating layers, the method comprising the steps of:
forming a hardmask pattern on the hardmask layer; and
using the hardmask pattern to form apertures having a sidewall bowing less than approximately 5% in the alternating layers by selectively plasma etching the alternating layers of the first etching layer and the second etching layer versus the hardmask layer using an etching gas consisting of a first hydrofluorocarbon etching gas selected from the group consisting of 1,1,1,3,3,3-hexafluoropropane (C 3 H 2 F 6 ), 1,1,2,2,3,3-hexafluoropropane (iso-C 3 H 2 F 6 ), 1,1,1,2,3,3,3-heptafluoropropane (C 3 HF 7 ), 1,1,1,2,2,3,3-heptafluoropropane (iso-C 3 HF 7 ), and combinations thereof, a second fluorocarbon or hydrofluorocarbon etching gas selected from the group consisting of cC 4 F 8 , C 4 F 8 , C 4 F 6 , C 5 F 8 , CF 4 , CH 3 F, CF 3 H, CH 2 F 2 and combinations thereof, an oxygen-containing gas and an inert gas,
wherein the first etching layer comprises a material different from that of the second etching layer,
wherein the hydrofluorocarbon etching gases plasma etch the first etching layer versus the second etching layer with a selectivity between approximately 1:2 to approximately 2:1, and
wherein the apertures have an aspect ratio within a range from larger than 20:1 to approximately 200:1.

14. The method of claim 13 , wherein the alternating layers comprises a layer of silicon oxide, silicon nitride, SiOCN, SiON, Si a O b H c C d N e , where a>0; b, c, d and e≥0, or combinations thereof.

15. The method of claim 13 , wherein the first etching layer comprises a silicon oxide layer and the second etching layer comprises a silicon nitride layer, and vice versa.

16. The method of claim 13 , wherein the hardmask layer is selected from the group consisting of CVD or spin on deposited layer of amorphous carbon or doped carbon, silicon-containing spin on mask, and carbon-containing spin on mask.

17. The method of claim 13 , wherein the hydrofluorocarbon etching gas is 1,1,1,3,3,3-hexafluoropropane (C 3 H 2 F 6 ).

18. The method of claim 13 , wherein the hydrofluorocarbon etching gases plasma etch the first etching layer versus the second etching layer with a selectivity of approximately 1:1.

19. The method of claim 13 , further comprising the step of heating the hydrofluorocarbon etching gas to maintain a predetermined flow rate of the hydrofluorocarbon etching gas for plasma etching and to avoid condensation.

20. The method of claim 13 , wherein the oxygen-containing gas is selected from the group consisting of O 2 , O 3 , CO, CO 2 , NO, NO 2 , N 2 O, SO 2 , COS, H 2 O and combination thereof.

Assignees

• Air Liquide

Inventors

• Shen Peng
• Urabe Keiichiro
• Yokota Jiro
• Gosset Nicolas

Classifications

• H10P90/126

  by chemical etching · CPC title

• H10P14/6903

  containing silicon · CPC title

• H10P14/6902

  composed of carbon, e.g. alpha-C, diamond or hydrogen doped carbon · CPC title

• H10P50/283 Primary

  by chemical means · CPC title

• H10P50/73

  using masks for insulating materials · CPC title