Coating liquid for forming oxide, method for producing oxide film, and method for producing field-effect transistor

US11069780B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-11069780-B2
Application numberUS-201916353872-A
CountryUS
Kind codeB2
Filing dateMar 14, 2019
Priority dateMar 19, 2018
Publication dateJul 20, 2021
Grant dateJul 20, 2021

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Abstract

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A coating liquid for forming an oxide, the coating liquid including: A element, which is at least one alkaline earth metal; and B element, which is at least one selected from the group consisting of gallium (Ga), scandium (Sc), yttrium (Y), and lanthanoid, wherein when a total of concentrations of the A element is denoted by CA mg/L and a total of concentrations of the B element is denoted by CB mg/L, a total of concentrations of sodium (Na) and potassium (K) in the coating liquid is (CA+CB)/103 mg/L or less and a total of concentrations of chromium (Cr), manganese (Mn), iron (Fe), cobalt (Co), nickel (Ni), and copper (Cu) in the coating liquid is (CA+CB)/103 mg/L or less.

First claim

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What is claimed is: 1. A coating liquid for forming an oxide, the coating liquid comprising: A element, which is at least one alkaline earth metal; and B element, which is at least one selected from the group consisting of gallium (Ga), scandium (Sc), yttrium (Y), and lanthanoid, wherein when a total concentration of the A element is denoted by C A mg/L and a total concentration of the B element is denoted by C B mg/L, a total of concentrations of sodium (Na) and potassium (…

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What does patent US11069780B2 cover?
A coating liquid for forming an oxide, the coating liquid including: A element, which is at least one alkaline earth metal; and B element, which is at least one selected from the group consisting of gallium (Ga), scandium (Sc), yttrium (Y), and lanthanoid, wherein when a total of concentrations of the A element is denoted by CA mg/L and a total of concentrations of the B element is denoted by C…
Who is the assignee on this patent?
Saotome Ryoichi, Ueda Naoyuki, Ando Yuichi, and 7 more
What technology area does this patent fall under?
Primary CPC classification H10P14/46. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Jul 20 2021 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 12 related publications on this page (citations in our corpus or others sharing the same primary CPC).