Apparatus for manufacturing pellicle

Patent metadata

Field	Value
Publication number	US-11067887-B2
Application number	US-202016918106-A
Country	US
Kind code	B2
Filing date	Jul 1, 2020
Priority date	Mar 27, 2017
Publication date	Jul 20, 2021
Grant date	Jul 20, 2021

Abstract

A method of manufacturing a pellicle includes preparing a pellicle frame having an adhesive layer coated thereon, treating a pellicle membrane with vapor under vapor atmosphere, attaching the pellicle membrane onto the pellicle frame, and drying the pellicle membrane.

First claim

What is claimed is:

1. An apparatus for manufacturing a pellicle, the apparatus comprising:
a chamber having a space for assembling the pellicle for covering a photomask;
a vaporizer comprising a container to generate a vapor atmosphere in the chamber; and
a pellicle support frame inside the chamber to support the pellicle to be assembled in the chamber, the pellicle frame including:
a plate inside the chamber, the plate including a cavity, and
a protrusion on a top surface of the plate, the protrusion surrounding the cavity of the plate.

2. The apparatus as claimed in claim 1 , wherein the chamber having the space includes a lower chamber and an upper cover, the lower chamber having a bottom wall and a sidewall defining the space in the chamber, and the upper cover covering the lower chamber to form an airtight space.

3. The apparatus as claimed in claim 2 , wherein the entirety of the pellicle frame is between the bottom wall and the upper cover of the chamber.

4. The apparatus as claimed in claim 2 , wherein:
the vaporizer is on the bottom wall of the chamber, the plate being between the vaporizer and the upper cover, and the cavity of the plate overlapping a top of the vaporizer, and
vertical extensions extend along sides of the vaporizer to support the plate, the vertical extensions and the protrusion contacting opposite surfaces of the plate.

5. The apparatus as claimed in claim 4 , wherein the vaporizer includes a bath on a heater, and the cavity of the plate is aligned with the bath.

6. The apparatus as claimed in claim 1 , wherein the vaporizer is in a lower portion of the chamber to maintain the chamber at the vapor atmosphere.

7. The apparatus as claimed in claim 6 , wherein the vaporizer includes a heater on a bottom wall of the lower chamber and a bath on the heater to receive a liquid.

8. The apparatus as claimed in claim 7 , wherein the heater includes a hot plate to generate vapor.

9. The apparatus as claimed in claim 1 , wherein the protrusion is frame-shaped in a top view, an opening through the frame-shaped protrusion overlapping the cavity of the plate.

10. The apparatus as claimed in claim 9 , wherein the opening through the frame-shaped protrusion is aligned with the cavity of the plate.

11. The apparatus as claimed in claim 9 , wherein an inner sidewall of the plate defines a perimeter of the cavity of the plate, the inner sidewall of the plate being coplanar with an inner sidewall of the protrusion defining a perimeter of the opening through the protrusion.

12. The apparatus as claimed in claim 1 , further comprising a frame holder comprising holding arms on the top surface of the plate, the protrusion fitting into an opening through the frame holder.

13. The apparatus as claimed in claim 12 , wherein bottom surfaces of the frame holder and the protrusion are in direct contact with the top surface of the plate.

14. The apparatus as claimed in claim 12 , wherein the frame holder is moveable.

Assignees

• Samsung Electronics Co Ltd
• Research & Business Found Sungkyunkwan Univ

Inventors

• Kim Mun-Ja
• Yoo Ji-Beom
• Kim Soo-Young
• Kim Hee-Bom
• Jeon Hwan-Chul
• Kim Seul-Gi
• Kim Tae-Sung
• Shin Dong-Wook

Classifications

• G03F1/62

  Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof · CPC title

• G03F1/64 Primary

  characterised by the frames, e.g. structure or material, including bonding means therefor · CPC title

• G03F1/66

  Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof · CPC title