Heterogeneously integrated chip-scale lidar system

Patent metadata

Field	Value
Publication number	US-11067670-B2
Application number	US-201816020202-A
Country	US
Kind code	B2
Filing date	Jun 27, 2018
Priority date	Jul 12, 2017
Publication date	Jul 20, 2021
Grant date	Jul 20, 2021

Abstract

A lidar system includes a photonic chip including a light source and a transmit beam coupler to provide an output signal for transmission. The output signal is a frequency modulated continuous wave (FMCW) signal. A transmit beam steering device transmits the output signal from the transmit beam coupler of the photonic chip. A receive beam steering device obtains a reflection of the output signal by a target and provides the reflection as a received signal to a receive beam coupler of the photonic chip. The photonic chip, the transmit beam steering device, and the receive beam steering device are heterogeneously integrated into an optical engine.

First claim

What is claimed is:

1. A lidar system, comprising:
a photonic chip including a light source and a transmit beam coupler configured to provide an output signal for transmission, wherein the output signal is a frequency modulated continuous wave (FMCW) signal;
a transmit beam steering device configured to transmit the output signal from the transmit beam coupler of the photonic chip; and
a receive beam steering device configured to obtain a reflection of the output signal by a target and to provide the reflection as a received signal to a receive beam coupler of the photonic chip, wherein the photonic chip, the transmit beam steering device, and the receive beam steering device are heterogeneously integrated into an optical engine after the photonic chip, the transmit beam steering device, and the receive beam steering device are separately manufactured.

2. The lidar system according to claim 1 , wherein the transmit beam steering device and the receive beam steering device are two-dimensional microelectromechanical system (2D MEMS) mirrors fabricated as dies.

3. The lidar system according to claim 2 , wherein the optical engine is heterogeneously integrated on a semiconductor board with pockets etched for placement of the 2D MEMS mirrors.

4. The lidar system according to claim 1 , wherein the transmit beam steering device is placed to have optical alignment with the transmit beam coupler of the photonic chip, and the receive beam steering device is placed to have optical alignment with the receive beam coupler of the photonic chip.

5. The lidar system according to claim 4 , wherein the photonic chip, the transmit beam steering device, and the receive beam steering device are bonded to a common semiconductor board to passively maintain the optical alignment.

6. The lidar system according to claim 1 , further comprising drive electronics coupled with the optical engine, wherein the drive electronics include a modulating laser driver to modulate the light source and produce the FMCW signal and control drivers for the transmit beam steering device and the receive beam steering device.

7. The lidar system according to claim 6 , further comprising post-detection electronics configured to process electrical signals provided by photodetectors of the photonic chip.

8. The lidar system according to claim 7 , wherein the optical engine, the drive electronics, and the post-detection electronics are formed on a first printed circuit board, and the control drivers are formed on a second printed circuit board.

9. The lidar system according to claim 7 , wherein the control drivers are fabricated as a first application specific integrated circuit (ASIC), and the drive electronics and the post-detection electronics are fabricated as a second ASIC.

10. The lidar system according to claim 1 , wherein the lidar system is in a vehicle.

11. A method of packaging a lidar system, the method comprising:
fabricating a photonic chip, wherein the photonic chip includes a light source and a transmit beam coupler to provide an output signal for transmission and the output signal is a frequency modulated continuous wave (FMCW) signal;
coupling a transmit beam steering device to the photonic chip to transmit the output signal from the transmit beam coupler of the photonic chip;
coupling a receive beam steering device to the photonic chip to obtain a reflection of the output signal by a target and to provide the reflection as a received signal to a receive beam coupler of the photonic chip; and
heterogeneously integrating the photonic chip, the transmit beam steering device, and the receive beam steering device into an optical engine following separate fabrication of the photonic chip, the transmit beam steering device, and the receive beam steering device.

12. The method according to claim 11 , further comprising fabricating the transmit beam steering device and the receive beam steering device as two-dimensional microelectromechanical system (2D MEMS) mirror dies, wherein the heterogeneously integrating the optical engine includes placing the 2D MEMS mirror dies in pockets etched in a silicon board.

13. The method according to claim 11 , further comprising placing the transmit beam steering device to have optical alignment with the transmit beam coupler of the photonic chip, placing the receive beam steering device to have optical alignment with the receive beam coupler of the photonic chip, and passively bonding the photonic chip, the transmit beam steering device, and the receive beam steering device to a semiconductor board to maintain the optical alignment.

14. The method according to claim 11 , further comprising coupling drive electronics with the optical engine, wherein the drive electronics include a modulating laser driver to modulate the light source and produce the FMCW signal and control drivers for the transmit beam steering device and the receive beam steering device, and coupling post-detection electronics to the optical engine to process electrical signals provided by photodetectors of the photonic chip.

15. The lidar system according to claim 14 , further comprising forming the optical engine, the drive electronics, and the post-detection electronics on a first printed circuit board and forming the control drivers on a second printed circuit board, or fabricating the control drivers as a first application specific integrated circuit (ASIC), and fabricating the drive electronics and the post-detection electronics as a second ASIC.

16. A vehicle, comprising:
a lidar system comprising:
a photonic chip including a light source and a transmit beam coupler configured to provide an output signal for transmission, wherein the output signal is a frequency modulated continuous wave (FMCW) signal;
a transmit beam steering device configured to transmit the output signal from the transmit beam coupler of the photonic chip; and
a receive beam steering device configured to obtain a reflection of the output signal by a target and to provide the reflection as a received signal to a receive beam coupler of the photonic chip, wherein the photonic chip, the transmit beam steering device, and the receive beam steering device are heterogeneously integrated into an optical engine after the photonic chip, the transmit beam steering device, and the receive beam steering device are separately manufactured; and

a vehicle controller configured to augment or automate operation of the vehicle based on information from the lidar system.

17. The vehicle according to claim 16 , wherein the transmit beam steering device and the receive beam steering device are two-dimensional microelectromechanical system (2D MEMS) mirrors fabricated as dies, and the optical engine is heterogeneously integrated on a semiconductor board with pockets etched for placement of the 2D MEMS mirrors.

18. The vehicle according to claim 16 , wherein the transmit beam steering device is placed to have optical alignment with the transmit beam coupler of the photonic chip, the receive beam steering device is placed to have optical alignment with the receive beam coupler of the photonic chip, and the photonic chip, the transmit beam steering device, and the receive beam steering device are passively bonded to a semiconductor board to maintain the optical alignment.

19. The vehicle according to claim 16 , further comprising drive electronics coupled with the optical engine, wherein the drive electronics include a modulating laser driver to modulate the light source and produce the FMCW signal and control drivers for th

Assignees

• Gm Global Tech Operations Llc

Inventors

• Patterson Pamela R
• Huang Biqin
• Schaffner James H
• Sayyah Keyvan
• Efimov Oleg
• Sarkissian Raymond

Classifications

• H10W46/607

  Located on parts of packages, e.g. on encapsulations or on package substrates · CPC title

• H10W46/301

  for alignment · CPC title

• H10W46/00

  Marks applied to devices, e.g. for alignment or identification · CPC title

• G02B6/1228

  Tapered waveguides, e.g. integrated spot-size transformers (for coupling with fibres G02B6/305) · CPC title

• H10F77/413

  directly associated or integrated with the devices, e.g. back reflectors (directly associated or integrated with photovoltaic cells H10F77/42) · CPC title