Micromechanical component having an oscillator, a method for the manufacture thereof, and a method for exciting a motion of an adjustable element about a rotational axis

Patent metadata

Field	Value
Publication number	US-11066295-B2
Application number	US-201716476609-A
Country	US
Kind code	B2
Filing date	Nov 16, 2017
Priority date	Jan 11, 2017
Publication date	Jul 20, 2021
Grant date	Jul 20, 2021

Abstract

A micromechanical component having a mount, an adjustable element, which is connected via at least one spring to the mount, and an actuator device, a first oscillatory motion of the adjustable element about a first axis of rotation and simultaneously a second oscillatory motion of the adjustable element, which is set into the first oscillatory motion, being excitable about a second axis of rotation in response to the actuator device; and the adjustable element being configured by the at least one spring to be adjustable on the mount in such a way that the adjustable element is adjustable by a resulting angular momentum about a rotational axis, which is oriented orthogonally to the first axis of rotation and orthogonally to second axis of rotation. Also, a method for manufacturing a micromechanical component. Moreover, a method for exciting a motion of an adjustable element about a rotational axis.

First claim

What is claimed is:

1. A micromechanical component, comprising:
a mount;
an adjustable element connected via at least one spring to the mount; and
an actuator device configured to excite a first oscillatory motion of the adjustable element about a first axis of rotation relative to the mount, and to simultaneously excite a second oscillatory motion of the adjustable element, which is excited into the first oscillatory motion, about a second axis of rotation relative to the mount, the second axis of rotation being oriented obliquely to the first axis of rotation;
wherein the adjustable element is configured by the at least one spring to be adjustable on the mount in such a way that the adjustable element is able to be adjusted relative to the mount, in response to an angular momentum caused by the adjustable element, which is set into the first oscillatory motion, being set into the second oscillatory motion, about a rotational axis, which is oriented orthogonally to the first axis of rotation and orthogonally to the second axis of rotation.

2. The micromechanical component as recited in claim 1 , wherein the actuator device is configured to set the adjustable element into a first resonant oscillatory motion, as the first oscillatory motion, and simultaneously into a second resonant oscillatory motion, as the second oscillatory motion, in such a way that the adjustable element is set in response to a resulting angular momentum into a static oscillatory motion about the rotational axis.

3. The micromechanical component as recited in claim 1 , wherein the adjustable element includes a mirror plate having a reflective surface, and wherein the adjustable element is able to be set into the first oscillatory motion about the first axis of rotation oriented orthogonally to the reflective surface, and simultaneously into the second oscillatory motion or into the first oscillatory motion and simultaneously into the second oscillatory motion about the second axis of rotation, which is oriented orthogonally to the reflective surface.

4. The micromechanical component as recited in claim 1 , wherein the at least one spring includes at least one inner spring, at least one intermediate spring, and at least one outer spring, and wherein the adjustable element is connected via the at least one inner spring to an inner intermediate frame, the inner intermediate frame is connected at least via the at least one intermediate spring to an outer intermediate frame, and the outer intermediate frame is at least connected via the at least one outer spring to the mount.

5. The micromechanical component as recited in claim 4 , wherein the adjustable element, which is set into the first oscillatory motion, is adjustable relative to the inner intermediate frame, the outer intermediate frame, and the mount about the first axis of rotation in response to the actuator device, and the outer intermediate frame and the inner intermediate frame, together with the adjustable element, which is set into the second oscillatory motion, is adjustable relative to the mount about the second axis of rotation in response to the actuator device, and the inner intermediate frame, together with the adjustable element, are adjustable about the rotational axis relative to the outer intermediate frame and the mount in response to the resulting angular momentum.

6. The micromechanical component as recited in claim 4 , wherein the inner intermediate frame, together with the adjustable element, which is set into the first oscillatory motion, is adjustable relative to the outer intermediate frame and the mount about the first axis of rotation in response to the actuator device, and the outer intermediate frame and the inner intermediate frame, together with the adjustable element, which is set into the second oscillatory motion, being adjustable relative to the mount about the second axis of rotation in response to the actuator device, and the adjustable element is adjustable about the rotational axis relative to the inner intermediate frame, the outer intermediate frame, and the mount in response to the resulting angular momentum.

7. The micromechanical component as recited in claim 5 , where the actuator device includes at least one piezoelectric flexural actuator, the at least one piezoelectric flexural actuator of the actuator device being connected to the adjustable element and/or to the inner intermediate frame in such a way that, in response to a deformation of the at least one piezoelectric flexural actuator, the adjustable element is adjustable about the first axis of rotation relative to the inner intermediate frame, the outer intermediate frame and the mount, or the inner intermediate frame, together with the adjustable element is adjustable relative to the outer intermediate frame and the mount.

8. The micromechanical component as recited in claim 5 , where the actuator device includes at least one coil winding, the at least one coil winding of the actuator device being configured on and/or in the outer intermediate frame.

9. The micromechanical component as recited in claim 5 , wherein the actuator device includes stator electrodes secured to the mount and actuator electrodes secured to the outer intermediate frame.

10. A method for manufacturing a micromechanical component, comprising:
connecting an adjustable element at least via at least one spring to a mount; and
configuring an actuator device, the actuator device being configured to excite a first oscillatory motion of the adjustable element relative to the mount about a first axis of rotation and for simultaneously exciting a second oscillatory motion of the adjustable element, which is set into the first oscillatory motion, relative to the mount about a second axis of rotation, which is oriented obliquely to the first axis of rotation;
wherein the adjustable element is configured by the at least one spring to be adjustable on the mount in such a way that the adjustable element is displaced relative to the mount in response to an angular momentum caused by the adjustable element, which is set into the first oscillatory motion, being set into the second oscillatory motion, about a rotational axis, which is oriented orthogonally to the first axis of rotation and orthogonally to the second axis of rotation.

11. A method for exciting a motion of an adjustable element about a rotational axis, comprising:
exciting a first oscillatory motion of the adjustable element connected at least via at least one spring to a mount about a first axis of rotation oriented orthogonally to the rotational axis, relative to the mount; and
simultaneously exciting a second oscillatory motion of the adjustable element, which is set into the first oscillatory motion, about a second axis of rotation, which is oriented obliquely to the first axis of rotation and orthogonally to the rotational axis, relative to the mount, in such a way that the adjustable element is adjusted in response to an angular momentum caused by the adjustable element, which is set into the first oscillatory motion, being set into the second oscillatory motion about the rotational axis.

12. The method as recited in claim 11 , wherein a first resonant oscillatory motion of the adjustable element is excited as the first oscillatory motion and simultaneously a second resonant oscillatory motion of the adjustable element, as the second oscillatory motion, in such a way that the adjustable element is set by the resulting angular momentum into a static oscillatory motion about the rotational axis.

13. The method as recited in claim 11 , wherein the first oscillatory motion of the adjustable element and simultaneously an

Assignees

• Bosch Gmbh Robert

Inventors

• Kaupmann Philip
• Pinter Stefan
• Grutzeck Helmut
• Franz Jochen
• Muchow Joerg

Classifications

• G02B26/0841

  the reflecting element being moved or deformed by electrostatic means · CPC title

• B81B2203/056

  Rotation in a plane parallel to the substrate · CPC title

• G02B26/0858

  the reflecting means being moved or deformed by piezoelectric means · CPC title

• B81B2201/042

  Micromirrors, not used as optical switches · CPC title

• B81B3/0048 Primary

  Constitution or structural means for controlling angular deflection not provided for in groups B81B3/0043 - B81B3/0045 · CPC title