Light emitting device, method of manufacturing light emitting device, and projector

Patent metadata

Field	Value
Publication number	US-11063171-B2
Application number	US-202016835407-A
Country	US
Kind code	B2
Filing date	Mar 31, 2020
Priority date	Apr 1, 2019
Publication date	Jul 13, 2021
Grant date	Jul 13, 2021

Abstract

A light emitting device includes a substrate, and a laminated structure provided on the substrate, wherein the laminated structure has a plurality of columnar portions, the columnar portion contains a material having a wurtzite-type crystal structure, in a plan view as seen from a layered direction of the laminated structure, the plurality of columnar portions are arranged in a square lattice form or rectangular lattice form, a line passing through centers of the adjacent columnar portions is inclined relative to m-planes of the columnar portions located between the centers of the adjacent columnar portions, and vertices of the adjacent columnar portions are not placed on the line.

First claim

What is claimed is:

1. A light emitting device comprising:
a substrate; and
a laminated structure provided on the substrate, wherein
the laminated structure has a plurality of columnar portions,
each columnar portion contains a material having a wurtzite-type crystal structure,
in a plan view as seen from a layered direction of the laminated structure:
the plurality of columnar portions are arranged in a square lattice form or rectangular lattice form,
a line passing through centers of the adjacent columnar portions is inclined relative to m-planes of the columnar portions located between the centers of the adjacent columnar portions,
vertices of the adjacent columnar portions are not placed on the line, and
the line is inclined at from 8 degrees to 22 degrees relative to perpendiculars of the m-planes.

2. A projector comprising the light emitting device according to claim 1 .

3. A light emitting device comprising:
a substrate; and
a laminated structure provided on the substrate, wherein
the laminated structure has a plurality of columnar portions,
each columnar portion contains a material having a wurtzite-type crystal structure,
in a plan view as seen from a layered direction of the laminated structure:
the plurality of columnar portions are arranged in a regular triangular lattice form,
a line passing through centers of the adjacent columnar portions is inclined relative to m-planes of the columnar portions located between the centers of the adjacent columnar portions,
vertices of the adjacent columnar portions are not placed on the line, and
the line is inclined at from 8 degrees to 22 degrees relative to perpendiculars of the m-planes.

4. A method of manufacturing a light emitting device comprising forming a laminated structure having a plurality of columnar portions on a substrate, wherein
each columnar portion contains a material having a wurtzite-type crystal structure,
at the forming of the laminated structure and in a plan view as seen from a layered direction of the laminated structure:
the plurality of columnar portions are arranged in a square lattice form or rectangular lattice form,
a line passing through centers of the adjacent columnar portions is inclined relative to m-planes of the columnar portions located between the centers of the adjacent columnar portions,
vertices of the adjacent columnar portions are not placed on the line, and
the line is inclined at from 8 degrees to 22 degrees relative to perpendiculars of the m-planes.

5. A method of manufacturing a light emitting device comprising forming a laminated structure having a plurality of columnar portions on a substrate, wherein
each columnar portion contains a material having a wurtzite-type crystal structure,
at the forming of the laminated structure and in a plan view as seen from a layered direction of the laminated structure:
the plurality of columnar portions are arranged in a regular triangular lattice form,
a line passing through centers of the adjacent columnar portions is inclined relative to m-planes of the columnar portions located between the centers of the adjacent columnar portions,
vertices of the adjacent columnar portions are not placed on the line, and
the line is inclined at from 8 degrees to 22 degrees relative to perpendiculars of the m-planes.

6. A light emitting device comprising:
a substrate; and
a laminated structure provided on the substrate, wherein
the laminated structure has a plurality of columnar portions,
each columnar portion contains a material having a wurtzite-type crystal structure,
in a plan view as seen from a layered direction of the laminated structure:
the plurality of columnar portions are arranged in a regular triangular lattice form,
a line passing through centers of the adjacent columnar portions is inclined relative to m-planes of the columnar portions located between the centers of the adjacent columnar portions,
vertices of the adjacent columnar portions are not placed on the line, and
in the plan view as seen from the layered direction, the line is inclined at from 38 degrees to 52 degrees relative to a perpendicular of an m-plane connected to the m-plane in a clockwise direction.

7. A method of manufacturing a light emitting device comprising forming a laminated structure having a plurality of columnar portions on a substrate, wherein
each columnar portion contains a material having a wurtzite-type crystal structure,
at the forming of the laminated structure and in a plan view as seen from a layered direction of the laminated structure:
the plurality of columnar portions are arranged in a regular triangular lattice form,
a line passing through centers of the adjacent columnar portions is inclined relative to m-planes of the columnar portions located between the centers of the adjacent columnar portions, and
vertices of the adjacent columnar portions are not placed on the line,

wherein, at the forming of the laminated structure,
in the plan view as seen from the layered direction, the line is inclined at from 38 degrees to 52 degrees relative to a perpendicular of an m-plane connected to the m-plane in a clockwise direction.

Assignees

• Seiko Epson Corp

Inventors

• Imai Yasutaka
• Fujita Tetsuji
• Akasaka Koichiro
• Hahiro Hideki

Classifications

• H10H20/01335

  the light-emitting regions comprising nitride materials · CPC title

• H10H20/825

  containing nitrogen, e.g. GaN · CPC title

• H10H20/817

  characterised by the crystal structures or orientations, e.g. polycrystalline, amorphous or porous · CPC title

• H10H20/00 Primary

  Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED] · CPC title

• H10H20/815

  having stress relaxation structures, e.g. buffer layers · CPC title