Correction of fabricated shapes in additive manufacturing using initial layer

Patent metadata

Field	Value
Publication number	US-11059149-B2
Application number	US-201815873799-A
Country	US
Kind code	B2
Filing date	Jan 17, 2018
Priority date	May 25, 2017
Publication date	Jul 13, 2021
Grant date	Jul 13, 2021

Abstract

Data indicative of a desired shape of the polishing pad to be fabricated by droplet ejection by the additive manufacturing system is received. The data includes a desired shape defining a desired profile including a polishing surface having one or more partitions separated by one or more grooves on the polishing pad. Data indicative of distortions from the desired profile caused by dispensing of layers by droplet ejection by the additive manufacturing system is generated. Data indicative of an initial layer to dispense by droplet ejection is generated to at least partially compensate for the distortions from the desired profile. The initial layer is dispensed on a support by droplet ejection. Overlying layers are dispensed on the initial layer by droplet ejection by the additive manufacturing system to form the polishing pad.

First claim

What is claimed is:

1. A method of fabricating a polishing pad using an additive manufacturing system, the method comprising:
receiving data indicative of a desired shape of the polishing pad to be fabricated by droplet ejection by the additive manufacturing system, the desired shape defining a desired profile including a polishing surface having a plurality of partitions having substantially flat top surfaces and separated by one or more grooves on the polishing pad;
generating data indicative of distortions from the desired profile caused by dispensing of a plurality of layers by droplet ejection by the additive manufacturing system, the distortions including variance from the substantially flat top surfaces of the plurality of partitions;
generating data indicative of an initial layer to dispense by droplet ejection to at least partially compensate for the distortions of the substantially flat top surfaces of the partitions from the desired profile, the initial layer extending across less than all of a width of at least one partition of the plurality of partitions;
dispensing the initial layer on a support by droplet ejection, the initial layer providing a portion of the polishing pad; and
dispensing a plurality of overlying layers on the initial layer by droplet ejection by the additive manufacturing system to form the partitions of the polishing pad, the plurality of overlying layers each extending across an entire width of each particular partition of the plurality of partitions.

2. The method of claim 1 , wherein the polishing pad comprises the support.

3. The method of claim 1 , comprising removing the polishing pad from the support.

4. The method of claim 1 , wherein the distortions comprise regions expected to be thin relative to the desired profile.

5. The method of claim 4 , wherein the initial layer consists of voxels corresponding to the regions.

6. The method of claim 5 , wherein the regions correspond to edges of the plurality of partitions.

7. The method of claim 1 , wherein the initial layer corresponds to edges of the partitions and dispensing the plurality of overlying layers covers at least a portion of the initial layer and fills a region between the edges.

8. The method of claim 1 , wherein dispensing the initial layer comprises dispensing a first material of a first composition and dispensing the plurality of overlying layers comprises dispensing a second material of a different second composition.

9. The method of claim 1 , wherein the initial layer comprises a bottom layer of the plurality of partitions.

10. A method of fabricating an object using an additive manufacturing system, the method comprising:
receiving data indicative of a desired shape of the object to be fabricated by droplet ejection by the additive manufacturing system, the desired shape defining a desired profile including a surface having a plurality of projections having substantially flat top surfaces and separated by one or more recesses;
generating data indicative of distortions from the desired profile caused by dispensing of a plurality of layers by droplet ejection by the additive manufacturing system, the distortions including variance from the substantially flat top surfaces;
generating data indicative of an initial layer to dispense by droplet ejection to at least partially compensate for the distortions of the substantially flat top surfaces of the projections from the desired profile, the initial layer extending across less than all of a width of at least one projection of the plurality of projections;
dispensing the initial layer on a support by droplet ejection, the initial layer providing a portion of the object; and
dispensing a plurality of overlying layers on the initial layer by droplet ejection by the additive manufacturing system to form the projections of the object, the plurality of overlying layers each extending across an entire width of each particular partition of the plurality of partitions.

Assignees

• Applied Materials Inc

Inventors

• Redfield Daniel
• Fung Jason Garcheung
• Yamamura Mayu Felicia

Classifications

• B33Y50/00

  Data acquisition or data processing for additive manufacturing · CPC title

• B29C64/386

  Data acquisition or data processing for additive manufacturing · CPC title

• B29C64/40

  Structures for supporting 3D objects during manufacture and intended to be sacrificed after completion thereof · CPC title

• B33Y80/00

  Products made by additive manufacturing · CPC title

• B33Y50/02

  for controlling or regulating additive manufacturing processes · CPC title