Random copolymer, laminate, and method for forming pattern

Patent metadata

Field	Value
Publication number	US-11054747-B2
Application number	US-201816106512-A
Country	US
Kind code	B2
Filing date	Aug 21, 2018
Priority date	Aug 22, 2017
Publication date	Jul 6, 2021
Grant date	Jul 6, 2021

Abstract

Provided are a random copolymer for forming a neutral layer promoting directed self-assembly pattern formation, a laminate for forming a pattern including the same, and a method for forming a high-quality pattern using the same.

First claim

What is claimed is:

1. A laminate for forming a pattern, comprising:
a substrate, and
a neutral layer formed on the substrate and including a random copolymer comprising structural units represented by the following Chemical Formulae 1 to 3:

wherein:
R 1 to R 8 are independently of one another hydrogen, halogen or a C 1 to C 10 hydrocarbyl group,
L 1 and L 2 are a linking group, and independently of each other a direct bond, —C(═O)—O— or a C 1 to C 20 hydrocarbylene group,
R 9 and R 10 are independently of each other hydrogen, halogen, a C 1 to C 10 hydrocarbyl group,

and at least one of R 9 and R 10 is

L 3 is a C 1 to C 10 hydrocarbylene group,
R 11 and R 12 are independently of each other a C 1 to C 10 hydrocarbyl group, a C 1 to C 10 halocarbyl group or a halo-substituted C 1 to C 10 hydrocarbyl group, and
when mole fractions of Chemical Formulae 1 to 3 which are each randomly arranged structural units are defined as m, n and l, respectively in this order, m, n and l satisfy 0.2<m<0.9, 0.2<n<0.9, and 0<l<0.4, respectively, based on total mole fractions of the structural units.

2. The laminate of claim 1 , wherein the neutral layer has a thickness variation value due to washing, satisfying the following Equation 1:

|

T
0

-

T
1

T
0

|

<
0.30

[

Equation
⁢

⁢
1

]

wherein T 0 is a thickness of the neutral layer before washing, and T 1 is a thickness of the neutral layer after washing.

3. The laminate of claim 1 , wherein in Chemical Formulae 1 to 3,
R 1 to R 8 are independently of one another hydrogen, halogen or a C 1 to C 10 alkyl group,
L 1 and L 2 are a linking group, and independently of each other a direct bond, —C(═O)—O—, a C 1 to C 10 alkylene group or a C 6 to C 20 arylene group,
R 9 and R 10 are independently of each other hydrogen, halogen, a C 1 to C 10 alkyl group,

and at least one of R 9 and R 10 is

L 3 is a C 1 to C 10 alkylene group, and
R 11 and R 12 are independently of each other a C 1 to C 10 alkyl group, a halo-substituted C 1 to C 10 alkyl group, or a C 1 to C 10 haloalkyl group.

4. The laminate of claim 1 , wherein in Chemical Formula 3,
L 1 is a direct bond as the linking group, and L 2 is —C(═O)—O— as the linking group,
R 9 is hydrogen or a C 1 to C 10 alkyl group,
R 10 is

and L 3 is a C 1 to C 10 alkylene group, and
R 12 is a C 1 to C 10 alkyl group, a halo-substituted C 1 to C 10 alkyl group or C 1 to C 10 haloalkyl group.

5. The laminate of claim 1 , wherein in Chemical Formula 3,
L 1 is a direct bond as the linking group, and L 2 is a C 6 to C 20 arylene group as the linking group,
R 9 is hydrogen or a C 1 to C 10 alkyl group,
R 10 is

and L 3 is a C 1 to C 10 alkylene group, and
R 12 is a C 1 to C 10 alkyl group, a halo-substituted C 1 to C 10 alkyl group or a C 1 to C 10 haloalkyl group.

6. The laminate of claim 1 , wherein in Chemical Formulae 1 and 2,
R 1 and R 3 are independently of one another hydrogen or a C 1 to C 10 alkyl group,
R 2 is a C 1 to C 10 alkyl group, and
R 4 to R 8 are independently of one another hydrogen or halogen.

7. The laminate of claim 1 , wherein in Chemical Formula 3,
L 1 is a direct bond as the linking group, and L 2 is —C(═O)—O— as the linking group, and
R 9 is hydrogen or a C 1 to C 10 alkyl group,
R 10 is

and L 3 is a C 1 to C 5 alkylene group, and
R 12 is a C 1 to C 5 alkyl group, a halo-substituted C 1 to C 5 alkyl group or a C 1 to C 5 haloalkyl group.

8. The laminate of claim 1 , wherein in Chemical Formula 3,
L 1 is a direct bond as the linking group, and L 2 is a C 6 to C 15 arylene group as the linking group,
R 9 is hydrogen or a C 1 to C 5 alkyl group,
R 10 is

and L 3 is a C 1 to C 5 alkylene group,
R 12 is a C 1 to C 5 alkyl group, a halo-substituted C 1 to C 5 alkyl group or a C 1 to C 5 haloalkyl group.

9. The laminate of claim 1 , wherein in Chemical Formulae 1 and 2,
R 1 and R 3 are independently of one another hydrogen or a C 1 to C 5 alkyl group,
R 2 is a C 1 to C 5 alkyl group, and
R 4 to R 8 are independently of one another hydrogen or halogen.

10. The laminate of claim 1 , wherein the random copolymer includes 0.1 to 20 mol % of a monomer of the structural unit represented by Chemical Formula 3, based on total 100 mol % of the monomers forming the random copolymer.

11. The laminate of claim 1 , wherein
the random copolymer has a number average molecular weight of 1,000 to 500,000 g/mol, and
a polydispersity index of 1.0 to 2.0.

12. The laminate of claim 1 , further comprising a vertical oriented lamellar phase pattern of a block copolymer formed on the neutral layer.

Assignees

• Sk Innovation Co Ltd

Inventors

• Lee Nam Kyu
• Kim Sun Young
• Lee Kwang Kuk
• Ham Jin Su

Classifications

• C08F220/14 Primary

  Methyl esters {, e.g. methyl (meth)acrylate} · CPC title

• C08F8/14 Primary

  Esterification · CPC title

• C08F212/14

  substituted by heteroatoms or groups containing heteroatoms · CPC title

• G03F7/2037 Primary

  Exposure with X-ray radiation or corpuscular radiation, through a mask with a pattern opaque to that radiation · CPC title

• C08F212/20

  Fluorine · CPC title