Fine metal mask, display substrate, and alignment method therefor

Patent metadata

Field	Value
Publication number	US-11053579-B2
Application number	US-201716306904-A
Country	US
Kind code	B2
Filing date	Sep 20, 2017
Priority date	Sep 23, 2016
Publication date	Jul 6, 2021
Grant date	Jul 6, 2021

Abstract

A fine metal mask (100) comprising a pattern region (110) comprising a plurality of openings; and a plurality of alignment holes (120) located outside the pattern region (110). Also disclosed are a display substrate (200) and an alignment method for the fine metal mask (100) for evaporation.

First claim

The invention claimed is:

1. A fine metal mask comprising:
a pattern region including a plurality of openings; and
a plurality of alignment holes located outside the pattern region,
wherein the plurality of alignment holes comprises:
a R alignment hole for evaporating red pixel,
a G alignment hole for evaporating green pixel, and
a B alignment hole for evaporating blue pixel,
wherein the R alignment hole and the G alignment hole are disposed side by side in a first direction, and the B alignment hole is disposed at a same side of the R alignment hole and the G alignment hole in the first direction.

2. The fine metal mask of claim 1 , wherein the pattern region has a circular shape, and the plurality of alignment holes are evenly distributed along the circumferential direction of the pattern region.

3. The fine metal mask of claim 1 , wherein the number of the plurality of alignment holes is at least three.

4. The fine metal mask of claim 1 , wherein the plurality of alignment holes have the same shape and size as that of the plurality of openings in the pattern region.

5. The fine metal mask of claim 1 , wherein the plurality of alignment holes have the same arrangement as that of the plurality of openings in the pattern region.

6. A display substrate adapted to cooperate with the fine metal mask of claim 1 during evaporation, comprising:
a pixel region corresponding to the pattern region in the fine metal mask; and
a plurality of alignment marks located outside the pixel region, and the position of each of the alignment marks in the display substrate corresponds to the position of a corresponding one of the plurality of alignment holes in the fine metal mask.

7. The display substrate of claim 6 , wherein the alignment marks are alignment fitting holes.

8. The display substrate of claim 7 , wherein the opening size of the alignment fitting holes is smaller than the opening size of the alignment holes.

9. The display substrate of claim 6 , wherein the plurality of alignment marks comprises a blue alignment mark aligned with the third alignment hole, wherein the blue alignment mark comprises:
a first alignment fitting hole and a second alignment fitting hole arranged along a length direction of the blue alignment mark.

10. The fine metal mask of claim 1 , wherein the R alignment hole comprises a shape of a rounded square or an ellipse.

11. The fine metal mask of claim 1 , wherein the G alignment hole comprises a shape of a rounded square or an ellipse.

12. The fine metal mask of claim 1 , wherein the B alignment hole comprises a shape with an arc shape at both ends thereof and a rectangular closed pattern in the middle thereof.

13. The fine metal mask of claim 1 , wherein the plurality of alignment holes are adjacent to the pattern region.

14. An alignment method of a fine metal mask for evaporation comprising the following steps:
providing a fine metal mask which includes a pattern region including a plurality of openings and a plurality of alignment holes located outside the pattern region;
identifying the plurality of alignment holes in the fine metal mask, and tensioning the fine metal mask on the mesh frame using a tension device according to the identified alignment holes, and a mask plate is formed by the fine metal mask and the mesh frame;
providing a display substrate including a pixel region and a plurality of alignment marks, wherein the pixel region corresponds to the pattern region in the fine metal mask, and the position of each of the plurality of alignment marks in the display substrate corresponds to the position of the corresponding one of the plurality of alignment holes in the fine metal mask;
placing the mask plate on the display substrate, and adjusting the position of the fine metal mask so that the plurality of alignment holes in the fine metal mask are aligned with the position of the corresponding one of the plurality of alignment marks in the display substrate, respectively; and
performing evaporation for an assembly consisting of the mask plate and the display substrate using an evaporation source,
wherein the plurality of alignment holes comprises:
a R alignment hole for evaporating red pixel,
a G alignment hole for evaporating green pixel, and
a B alignment hole for evaporating blue pixel,

wherein the R alignment hole and the G alignment hole are disposed side by side in a first direction, and the B alignment hole is disposed at a same side of the R alignment hole and the G alignment hole in the first direction.

15. The alignment method of a fine metal mask for evaporation of claim 14 , wherein the method comprises providing a plurality of fine metal masks, wherein the pattern region in each fine metal mask has different pixel pattern, and each fine metal mask is used to form pixels of single color on the display substrate during evaporation.

16. The alignment method of a fine metal mask for evaporation of claim 14 , wherein the size of the alignment marks is smaller than the opening size of the alignment holes.

17. The alignment method of a fine metal mask for evaporation of claim 16 , wherein the step of adjusting the position of the fine metal mask so that the plurality of alignment holes in the fine metal mask are aligned with the position of the corresponding one of the plurality of alignment marks in the display substrate respectively comprises: adjusting the position of the fine metal mask so that each of the plurality of alignment marks in the display substrate is located at the central position of the opening of the corresponding one of the plurality of alignment holes in the fine metal mask.

Assignees

• Kunshan Govisionox Optoelectronics Co Ltd

Inventors

• Li Weili
• Wang Xuliang
• Gan Shuaiyan

Classifications

• H10W46/301

  for alignment · CPC title

• H10W46/00 Primary

  Marks applied to devices, e.g. for alignment or identification · CPC title

• H10P72/50

  for positioning, orientation or alignment · CPC title

• C23C14/042 Primary

  using masks · CPC title

• Y02E10/549

  Organic PV cells · CPC title