Germanium- and zirconium-containing compositions for vapor deposition of zirconium-containing films
US-9499571-B2 · Nov 22, 2016 · US
US11053263B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11053263-B2 |
| Application number | US-202016774682-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 28, 2020 |
| Priority date | Jun 1, 2017 |
| Publication date | Jul 6, 2021 |
| Grant date | Jul 6, 2021 |
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A trichlorogermanide of formula (I): [R 4 N]/[R 4 P]Cl[GeCl 3 ] (I), where R is Me, Et, iPr, nBu, or Ph, tris(trichlorosilyl)germanide of formula (II): [R 4 N]/[R r P][Ge(SiCl 3 ) 3 ] (II), where R is Me, Et, iPr, nBu, or Ph, a tris(trichlorosilyl)germanide adduct of GaCl 3 of formula (III): [Ph 4 P][Ge(SiCl 3 ) 3 *GaCl 3 ], and a tris(trichlorosilyl)germanide adduct of BBr 3 of formula (IV): [Ph 4 P][Ge(SiCl 3 ) 3 *BBr 3 ]. Also, methods for preparing the trichlorogermanides of formula (I), the tris(trichlorosilyl)germanide of formula (II), the tris(trichlorosilyl)germanide adduct of BBr 3 of formula (IV).
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The invention claimed is: 1. A method for preparing a trichlorogermanide, the method comprising: dissolving GeCl 4 with hexachlorodisilane in a solvent; and reacting in the presence of a stoichiometric amount of [R 4 N]/[R 4 P]Cl at a temperature of 5 to 40° C., wherein the trichlorogermanide is a compound of formula (I): [R 4 N]/[R 4 P][GeCl 3 ] (I), wherein R=Me, Et, iPr, nBu, or Ph.
Germanium compounds · CPC title
without C-silicon linkages · CPC title
without metal-C linkages · CPC title
Aromatic phosphonium compounds (P-C aromatic linkage) · CPC title
having quaternised nitrogen atoms bound to acyclic carbon atoms · CPC title
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