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US-2024190813-A1 · Jun 13, 2024 · US
Antimony and germanium complexes useful for CVD/ALD of metal thin films
US9219232B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9219232-B2 |
| Application number | US-201414251475-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 11, 2014 |
| Priority date | Nov 2, 2006 |
| Publication date | Dec 22, 2015 |
| Grant date | Dec 22, 2015 |
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Abstract
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Antimony, germanium and tellurium precursors useful for CVD/ALD of corresponding metal-containing thin films are described, along with compositions including such precursors, methods of making such precursors, and films and microelectronic device products manufactured using such precursors, as well as corresponding manufacturing methods. The precursors of the invention are useful for forming germanium-antimony-tellurium (GST) films and microelectronic device products, such as phase change memory devices, including such films.
First claim
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What is claimed is: 1. A method of depositing germanium on a substrate, comprising contacting the substrate under vapor deposition conditions with vapor of a germanium amidinate precursor. 2. The method of claim 1 , further comprising depositing at least one of antimony and tellurium on the substrate. 3. The method of claim 1 , carried out in fabrication of a phase change memory device. 4. The method of claim 1 , compri…
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- What does patent US9219232B2 cover?
- Antimony, germanium and tellurium precursors useful for CVD/ALD of corresponding metal-containing thin films are described, along with compositions including such precursors, methods of making such precursors, and films and microelectronic device products manufactured using such precursors, as well as corresponding manufacturing methods. The precursors of the invention are useful for forming ge…
- Who is the assignee on this patent?
- Entegris Inc
- What technology area does this patent fall under?
- Primary CPC classification C07C251/08. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Dec 22 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).