Direct additive synthesis of diamond semiconductor

Patent metadata

Field	Value
Publication number	US-11052647-B2
Application number	US-201815976753-A
Country	US
Kind code	B2
Filing date	May 10, 2018
Priority date	May 10, 2018
Publication date	Jul 6, 2021
Grant date	Jul 6, 2021

Abstract

In an embodiment, a system includes a three-dimensional (3D) printer, a neutral feedstock, a p-doped feedstock, an n-doped feedstock, and a laser. The 3D printer includes a platen and an enclosure. The platen includes an inert metal. The enclosure includes an inert atmosphere. The neutral feedstock is configured to be deposited onto the platen. The neutral feedstock includes a halogenated solution and a nanoparticle having a negative electron affinity. The p-doped feedstock is configured to be deposited onto the platen. The p-doped feedstock includes a boronated compound introduced to the neutral feedstock. The n-doped feedstock is configured to be deposited onto the platen. The n-doped feedstock includes a phosphorous compound introduced to the neutral feedstock. The laser is configured to induce the nanoparticle to emit solvated electrons into the halogenated solution to form, by reduction, layers of a ceramic comprising a neutral layer, a p-doped layer, and an n-doped layer.

First claim

What is claimed is:

1. A method for additive manufacture, comprising:
introducing a boronated compound to a second neutral feedstock to form a p-doped feedstock, wherein the neutral feedstock comprises a halogenated solution and a nanoparticle having a negative electron affinity;
introducing a phosphorous compound to a third neutral feedstock to form an n-doped feedstock;
depositing a first layer of a first neutral feedstock onto a platen of a three-dimensional (3D) printer;
inducing the nanoparticle of the first neutral feedstock to emit solvated electrons into the halogenated solution using a laser to form, by reduction, a first layer of a neutral ceramic;
depositing a second layer of the p-doped feedstock onto the platen of the three-dimensional (3D) printer;
inducing the nanoparticle of the p-doped feedstock to emit solvated electrons into the halogenated solution using a laser to form, by reduction, a second layer of a p-doped ceramic;
depositing a third layer of the n-doped feedstock onto the platen of the three-dimensional (3D) printer;
inducing the nanoparticle of the n-doped feedstock to emit solvated electrons into the halogenated solution using a laser to form, by reduction, a third layer of n-doped ceramic.

2. The method of claim 1 , wherein:
the halogenated solution comprises carbon tetrachloride;
the nanoparticle comprises nanodiamond.

3. The method of claim 2 , wherein the first layer of the neutral ceramic, the second layer of the p-doped ceramic, and the third layer of the n-doped ceramic form a polycrystalline diamond semiconductor.

4. The method of claim 1 , wherein:
the halogenated solution comprises trichloromethyltrichlorosilane;
the nanoparticle comprises hydrogen-terminated silicon carbide nanoparticle.

5. The method of claim 4 , wherein the first layer of the neutral ceramic, the second layer of the p-doped ceramic, and the third layer of the n-doped ceramic form a silicon carbide semiconductor.

6. The method of claim 2 , wherein:
the boronated compound comprises boron trichloride; and
the phosphorous compound comprises phosphorous trichloride.

7. The method of claim 1 , wherein the first layer of the neutral ceramic, the second layer of the p-doped ceramic, and the third layer of the n-doped ceramic form a ceramic semiconductor without a kiln.

Assignees

• Lockheed Corp

Inventors

• Findley David Glen

Classifications

• H10P14/00

  Formation of materials, e.g. in the shape of layers or pillars · CPC title

• H10W70/692

  Ceramics or glasses · CPC title

• H10P14/265 Primary

  using solutions · CPC title

• Y02P10/25

  Process efficiency · CPC title

• B33Y10/00 Primary

  Processes of additive manufacturing · CPC title