Piezoelectric thin film resonator and method of fabricating the same
US-2016353221-A1 · Dec 1, 2016 · US
US11051114B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11051114-B2 |
| Application number | US-201716467848-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 27, 2017 |
| Priority date | Dec 8, 2016 |
| Publication date | Jun 29, 2021 |
| Grant date | Jun 29, 2021 |
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An electroacoustic transducer, comprising a piezoelectric part comprising a piezoelectric material having a first acoustical impedance and an acoustical thickness, a substrate part comprising a material having a second acoustical impedance, and an intermediate part comprising a material having a third acoustical impedance and at least partially sandwiched between the piezoelectric part and the substrate part for acoustical communication therewith. The first acoustical impedance and the second acoustical impedance each has a respective value within a range of values for which the value of third acoustical impedance: is an upper limit if said acoustical thickness is less than 0.4Λ, or is a lower limit if said acoustical thickness is greater than 0.4Λ where Λ is an acoustical wavelength in the material of the piezoelectric part.
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The invention claimed is: 1. An electroacoustic transducer, comprising: a piezoelectric part comprising a piezoelectric material having a first acoustical impedance and an acoustical thickness; a substrate part comprising a material having a second acoustical impedance; and an intermediate part comprising a material having a third acoustical impedance and at least partially between the piezoelectric part and the substrate part for acoustical communication therewith, wherein the first acoustical impedance and the second acoustical impedance each has a respective value within a range of values for which the value of the third acoustical impedance is an upper limit if said acoustical thickness of the piezoelectric part is less than 0.4Λ, or a lower limit if said acoustical thickness of the piezoelectric part is greater than 0.4Λ, wherein Λ is an acoustical wavelength in the material of the piezoelectric part, and wherein a maximum relative change in electrical resistive impedance of the transducer when the transducer is driven to generate an acoustic signal of any acoustic frequency within a frequency range, relative to the electrical resistive impedance of the transducer when driven to generate an acoustic signal of any other acoustic frequency within the frequency range, is less than about 25%. 2. The electroacoustic transducer according to claim 1 , wherein: the acoustical thickness of the piezoelectric part is within the range 0.2Λ to 0.4Λ, and the value of the third acoustical impedance is an upper limit to the range of values at that acoustical wavelength (Λ). 3. The electroacoustic transducer according to claim 1 , wherein: the acoustical thickness of the piezoelectric part is within the range 0.4Λ to 0.6Λ, and the value of the third acoustical impedance is a lower limit to the range of values at that acoustical wavelength (Λ). 4. The electroacoustic transducer according to claim 1 , in which the value of the first acoustical impedance is less than the value of the second acoustical impedance. 5. The electroacoustic transducer according to claim 1 , in which the acoustical thickness of the intermediate part between the piezoelectric part and the substrate part is less than 0.2Λ′, wherein Λ′ is an acoustical wavelength in the material of the intermediate part. 6. The electroacoustic transducer according to claim 1 , wherein the transducer is arranged to be driven to generate an acoustic signal of acoustic frequency within the frequency range of about 90 MHz to about 110 MHz, whereby the maximum relative change in electrical resistive impedance of the transducer when the transducer is driven to generate an acoustic signal of any acoustic frequency within said frequency range relative to the electrical resistive impedance of the transducer when driven to generate an acoustic signal of any other acoustic frequency within said frequency range, is less than about 25%. 7. The electroacoustic transducer according to claim 6 , wherein the maximum relative change (P) in electrical resistive impedance of the transducer is: P =( R MAX −R MIN )/( R MAX +R MIN )×100% where R MAX and R MIN are, respectively, the maximum and minimum values of the electrical resistive impedance to occur within the frequency range. 8. A data transceiver system, comprising the electroacoustic transducer of claim 1 , wherein the electroacoustic transducer is utilized as a data transmitter, or a data receiver. 9. The data transceiver system of claim 8 , wherein the electroacoustic transducer is bonded to a solid transmission medium, via which medium data can be transmitted and/or received by the electroacoustic transducer. 10. The data transceiver system of claim 9 , wherein the electroacoustic transducer is a first electroacoustic transducer, the system further comprising a second electroacoustic transducer according to claim 1 , the first and second electroacoustic transducers being bonded to substantially opposite ends or sides of the solid transmission medium, to allow for acoustic data transmission between the first and second electroacoustic transducers via the solid transmission medium. 11. The data transceiver system of claim 10 , further comprising an electroacoustic controller associated with the first electroacoustic transducer, the electroacoustic controller for: controlling the first transducer to generate an outgoing acoustic signal, for transmitting data to the second electroacoustic transducer, via the solid transmission medium, using that outgoing acoustic signal; and/or receiving data from the first electroacoustic transducer as a result of the first electroacoustic transducer receiving an incoming acoustic signal. 12. The data transceiver system of claim 10 , wherein the electroacoustic controller is a first electroacoustic controller, the system further comprising a second electroacoustic controller associated with the second electroacoustic transducer, the second electroacoustic controller for: controlling the second transducer to generate an outgoing acoustic signal, for transmitting data to the first electroacoustic transducer, via the solid transmission medium, using that outgoing acoustic signal; and/or receiving data from the second electroacoustic transducer as a result of the second electroacoustic transducer receiving an incoming acoustic signal. 13. An electroacoustic transducer, comprising: a piezoelectric part comprising a piezoelectric material having a first acoustical impedance; a substrate part comprising a material having a second acoustical impedance; and an intermediate part comprising a material having a third acoustical impedance and at least partially between the piezoelectric part and the substrate part for acoustical communication therewith, wherein an acoustical thickness of the intermediate part between the piezoelectric part and the substrate part is less than 0.2Λ′, wherein Λ′ is an acoustical wavelength in the material of the intermediate part, and wherein the first acoustical impedance and the second acoustical impedance each has a respective value within a range of values for which the value of the third acoustical impedance is an upper limit if an acoustical thickness of the piezoelectric part is less than 0.4Λ, or a lower limit if said acoustical thickness of the piezoelectric part is greater than 0.4Λ, wherein Λ is an acoustical wavelength in the material of the piezoelectric part, and wherein a maximum relative change in electrical resistive impedance of the transducer when the transducer is driven to generate an acoustic signal of any acoustic frequency within a frequency range, relative to the electrical resistive impedance of the transducer when driven to generate an acoustic signal of any other acoustic frequency within the frequency range, is less than about 25%. 14. The electroacoustic transducer according to claim 13 , wherein: the acoustical thickness of the piezoelectric part is within the range 0.2Λ to 0.4Λ, and the value of third acoustical impedance is an upper limit to the range of values at that acoustical wavelength (Λ). 15. The electroacoustic transducer according to claim 13 , wherein: the acoustical thickness of the piezoelectric part is within the range 0.4Λ to 0.6Λ, and the value of third acoustical impedance is a lower limit to the range of values at that acoustical wavelength (Λ). 16. The electroacoustic transducer according to claim 13 , in which the value of the first acoustical impedance is less than the value of the second acoustical impedance. 17. The electroacoustic t
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