Edge-on photon-counting detector

Patent metadata

Field	Value
Publication number	US-11041968-B2
Application number	US-201916653388-A
Country	US
Kind code	B2
Filing date	Oct 15, 2019
Priority date	Nov 19, 2018
Publication date	Jun 22, 2021
Grant date	Jun 22, 2021

Abstract

An edge-on photon-counting detector includes at least one detector module having a respective edge facing incident X-rays. The at least one detector module includes a semiconductor substrate. The edge-on photon-counting detector also includes a plurality of active integrated pixels arranged in the semiconductor substrate.

First claim

The invention claimed is:

1. An edge-on photon-counting detector comprising:
at least one detector module having a respective edge facing incident X-rays, the at least one detector module comprising a semiconductor substrate; and
a plurality of active integrated pixels arranged in the semiconductor substrate, the plurality of active integrated pixels being one of: (i) arranged in at least two directions, one of the at least two directions having a component in a direction of the incident X-rays, and (ii) arranged as an array in a direction substantially orthogonal to the direction of the incident x-rays, with each of the active integrated pixels being oriented edge-on to the incident x-rays,
wherein the active integrated pixels are configured to operate as detector elements configured to detect electrical current induced from one or more of drifting electrons and holes in the semiconductor substrate, the active integrated pixels being configured to perform analog processing of electrical signals of the detector elements, and
wherein at least one of the active integrated pixels comprises
an amplifier configured to generate an output signal based on a current pulse generated by the active integrated pixel, and
an analog storage downstream of the amplifier to enable controlled read-out of data from the active integrated pixel and the analog storage.

2. The edge-on photon-counting detector according to claim 1 , further comprising an analog processing circuitry, at least part of the analog processing circuitry being implemented in the plurality of active integrated pixels, any remaining part of the analog processing circuitry being implemented in at least one application-specific integrated circuit (ASIC disposed in the at least one detector module.

3. The edge-on photon-counting detector according to claim 1 , wherein the plurality of active integrated pixels is disposed on a main side of the semiconductor substrate in a grid or matrix.

4. The edge-on photon-counting detector according to claim 3 , wherein the plurality of active integrated pixels has a same width and a depth that is dependent on a distance between an active integrated pixel in the grid or matrix and the respective edge facing incident X-rays.

5. The edge-on photon-counting detector according to claim 3 , wherein an area of the semiconductor substrate comprising the plurality of active integrated pixels is selected within an interval of 5×5 mm to 50×50 mm.

6. The edge-on photon-counting detector according to claim 1 , wherein the at least one detector module comprises an analog processing circuitry, at least part of the analog processing circuitry being implemented in the plurality of active integrated pixels, any remaining part of the analog processing circuitry being implemented at a portion of the main side of the semiconductor substrate at or in connection with a respective edge of the at least one detector module opposite to the respective edge facing incident X-rays.

7. The edge-on photon-counting detector according to claim 1 , wherein at least a portion of the plurality of active integrated pixels comprises an amplifier configured to generate an output signal based on a current pulse generated by the respective active integrated pixel.

8. The edge-on photon-counting detector according to claim 7 , wherein the at least a portion of the plurality of active integrated pixels comprises a pulse shaper configured to filter the output signal from the amplifier, and/or
wherein the at least a portion of the plurality of active integrated pixels comprises a cancellation circuit (CC) connected to the amplifier and the pulse shaper.

9. The edge-on photon-counting detector according to claim 8 , wherein the at least a portion of the plurality of active integrated pixels comprises an analog storage connected to and disposed downstream of the pulse shaper and configured to at least temporarily store and retain an output signal from the pulse shaper.

10. The edge-on photon-counting detector according to claim 9 , wherein the at least a portion of the plurality of active integrated pixels comprises an event detector configured to:
detect a photon event by comparing a pulse amplitude of an output signal from the pulse shaper with a threshold value, and
generate a trigger signal when the pulse amplitude is equal to or exceeds the threshold value.

11. The edge-on photon-counting detector according to claim 10 , wherein read-out of data in the analog storage is controlled by the trigger signal output by the event detector, and/or
wherein read-out of data in the analog storage is performed based on the trigger signal from the event detector in the active integrated pixel and based on a respective trigger from at least one neighboring active integrated pixel in the at least one detector module.

12. The edge-on photon-counting detector according to claim 10 , wherein the edge-on photon counting detector further comprises digital processing circuitry comprising read-out circuitry configured to read out data from the analog storage based on the trigger signal from the event detector, and/or
wherein the amplifier is configured to enter a low-power sleep mode based on the trigger signal from the event detector.

13. The edge-on photon-counting detector according to claim 1 , wherein the semiconductor substrate is made of silicon selected from the group consisting of float zone (FZ) silicon, high resistivity silicon and high resistivity FZ silicon, the high resistivity silicon and the high resistivity FZ silicon having a bulk resistivity larger than 1 kΩcm.

14. The edge-on photon-counting detector according to claim 1 , wherein the at least one detector module comprises a plurality of detector modules having a respective edge facing incident X-rays and arranged side-by-side and/or stacked.

15. The edge-on photon-counting detector according to claim 14 , wherein the plurality of detector modules are attached to the semiconductor substrate to form a wafer, the wafer having a width selected within an interval of 25 mm to 50 mm, a depth selected within an interval of 25 mm to 50 mm, and a thickness selected within an interval of 300 μm to 900 μm.

16. The edge-on photon-counting detector according to claim 1 , wherein the plurality of active integrated pixels is implemented as active integrated Complementary Metal Oxide Semiconductor (CMOS) pixels in the semiconductor substrate.

17. The edge-on photon-counting detector according to claim 1 , wherein a least part of the active integrated pixels have a longer extension in a direction of the incident X-rays than in a direction orthogonal to the direction of the incident X-rays, with a relation of at least 2:1.

18. An X-ray imaging system comprising:
the edge-on photon-counting detector according to claim 1 .

19. The X-ray imaging system according to claim 18 , wherein the X-ray imaging system is a computed tomography (CT) system.

20. The X-ray imaging system according to claim 18 , wherein the X-ray imaging system is configured to estimate a charge diffusion originating from a Compton interaction or an interaction through photo effect related to an X-ray photon in a detector module, and the X-ray imaging system is configured to estimate an initial point of interaction between the X-ray photon and the at least one detector module along a thickness of the at least one detector module based on the estimated charge diffusion.

21. The X-ray imaging system according to claim 20 , wherein the X-ray imaging system i

Assignees

• Prismatic Sensors Ab

Inventors

• Danielsson Mats
• Wikner Jacob J
• Svensson Christer

Classifications

• H10F39/189 Primary

  X-ray, gamma-ray or corpuscular radiation imagers · CPC title

• H10F39/022

  of image sensors having active layers comprising only Group II-VI materials, e.g. CdS, ZnS or CdTe · CPC title

• A61B6/4266

  characterised by using a plurality of detector units (A61B6/4014 takes precedence) · CPC title

• G01T1/243

  Modular detectors, e.g. arrays formed from self contained units (constructional or manufacturing details H10W90/00) · CPC title

• A61B6/03

  Computed tomography [CT] · CPC title