Vapor deposition mask, vapor deposition mask preparation body, method for producing vapor deposition mask, and method for producing organic semiconductor element

Patent metadata

Field	Value
Publication number	US-11041237-B2
Application number	US-201815898682-A
Country	US
Kind code	B2
Filing date	Feb 19, 2018
Priority date	Apr 12, 2013
Publication date	Jun 22, 2021
Grant date	Jun 22, 2021

Abstract

There are provided a vapor deposition mask capable of satisfying both high definition and lightweight in upsizing and forming a vapor deposition pattern with high definition while securing strength, a method for producing a vapor deposition mask and a vapor deposition mask preparation body capable of simply producing the vapor deposition mask, and furthermore, a method for producing an organic semiconductor element capable of producing an organic semiconductor element with high definition.A metal mask 10 in which a plurality of slits 15 are provided and a resin mask 20 are stacked. Openings 25 required for composing a plurality of screens are provided in the resin mask 20. The openings 25 correspond to a pattern to be produced by vapor deposition. Each of the slits 15 is provided at a position of overlapping with an entirety of at least one screen.

First claim

The invention claimed is:

1. A vapor deposition mask comprising:
a resin mask and a metal mask stacked on one another;
the resin mask having a plurality of groups of openings, with each group of the plurality of groups of openings being configured to form at least a vapor deposition pattern;
the metal mask having a plurality of through holes corresponding in number to the plurality of groups of openings;
each through hole of the plurality of through holes entirely overlapping each respective group of openings of the plurality of groups of openings.

2. The vapor deposition mask according to claim 1 , wherein the plurality of groups of openings are openings configured to form vapor deposition patterns corresponding to two or more screens.

3. The vapor deposition mask according to claim 2 , wherein a pitch between the screens is the minimum value among distances, each distance being between an opening of the plurality of groups of openings belonging to a vapor deposition pattern corresponding to one screen and an opening of the plurality of groups of openings belonging to another vapor deposition pattern corresponding to another screen, and the pitch between the screens is longer than a spacing between adjacent openings of the plurality of groups of openings belonging to a same vapor deposition pattern.

4. The vapor deposition mask according to claim 3 , wherein the pitch between the screens is not less than 1 mm and not more than 100 mm.

5. The vapor deposition mask according to claim 2 , wherein a groove is further provided on the resin mask between a set of openings of the plurality of groups of openings corresponding to one screen and another set of openings of the plurality of groups of openings corresponding to another screen.

6. The vapor deposition mask according to claim 1 , wherein a thickness of the resin mask is not less than 4 μm and not more than 8 μm.

7. The vapor deposition mask according to claim 1 , wherein a dimension of each opening is not less than 500 μm 2 and not more than 1000 μm 2 .

8. The vapor deposition mask according to claim 1 , wherein the plurality of groups of openings overlapped with the plurality of through holes are arranged to be in alignment in both of a crosswise direction and a lengthwise direction.

9. The vapor deposition mask according to claim 1 , wherein the plurality of openings overlapped with the through hole are arranged to be in alignment in either of a crosswise direction or a lengthwise direction.

10. The vapor deposition mask according to claim 1 , wherein the plurality of groups of openings overlapped with the plurality of through holes are arranged to form a plurality of rows in the lengthwise direction, and openings of the plurality of groups of openings adjacent in the crosswise direction are arranged to be displaced in the lengthwise direction; or
the plurality of groups of openings overlapped with the plurality of through holes are arranged to form a plurality of rows in the crosswise direction, and openings of the plurality of groups of openings adjacent in the lengthwise direction are arranged to be displaced in the crosswise direction.

11. A vapor deposition mask comprising:
a resin mask and a metal mask stacked on one another;
the resin mask having a plurality of groups of second openings, with each group of the plurality of groups of second openings configured to form at least a vapor deposition pattern;
the metal mask having a plurality of first openings corresponding in number to the plurality of groups of second openings, wherein each first opening of the plurality of first openings entirely overlaps each respective group of second openings of the plurality of groups of second openings.

12. The vapor deposition mask according to claim 11 , wherein the plurality of groups of second openings are openings configured to form vapor deposition patterns corresponding to two or more screens.

13. The vapor deposition mask according to claim 12 , wherein a pitch between the screens is the minimum value among distances, each distance being between a second opening of the plurality of groups of second openings belonging to a vapor deposition pattern corresponding to one screen and a second opening of the plurality of groups of second openings belonging to another vapor deposition pattern corresponding to another screen, and the pitch between the screens is longer than a spacing between adjacent second openings of the plurality of groups of second openings belonging to a same vapor deposition pattern.

14. The vapor deposition mask according to claim 13 , wherein the pitch between the screens is not less than 1 mm and not more than 100 mm.

15. The vapor deposition mask according to claim 12 , wherein a groove is further provided on the resin mask between a set of second openings of the plurality of groups of second openings corresponding to one screen and another set of second openings of the plurality of groups of second openings corresponding to another screen.

16. The vapor deposition mask according to claim 11 , wherein a thickness of the resin mask is not less than 4 μm and not more than 8 μm.

17. The vapor deposition mask according to claim 11 , wherein a dimension of each second opening is not less than 500 μm 2 and not more than 1000 μm 2 .

18. The vapor deposition mask according to claim 11 , wherein the plurality of groups of second openings overlapped with the plurality of first openings are arranged to be in alignment in both of a crosswise direction and a lengthwise direction.

19. The vapor deposition mask according to claim 11 , wherein the plurality of second openings overlapped with the first opening are arranged to be in alignment in either of a crosswise direction or a lengthwise direction.

20. The vapor deposition mask according to claim 11 , wherein the plurality of groups of second openings overlapped with the plurality of first openings are arranged to form a plurality of rows in the lengthwise direction, and second openings of the plurality of groups of second openings adjacent in the crosswise direction are arranged to be displaced in the lengthwise direction; or
the plurality of groups of second openings overlapped with the plurality of first openings are arranged to form a plurality of rows in the crosswise direction, and second openings of the plurality of groups of second openings adjacent in the lengthwise direction are arranged to be displaced in the crosswise direction.

21. A method of producing a vapor deposition pattern using the vapor deposition mask of claim 1 .

22. A method of producing a vapor deposition pattern using the vapor deposition mask of claim 11 .

23. A method of producing an organic semiconductor element using the vapor deposition mask of claim 1 .

24. A method of producing an organic semiconductor element using the vapor deposition mask of claim 11 .

Assignees

• Dainippon Printing Co Ltd

Inventors

• Takeda Toshihiko
• Obata Katsunari
• Ochiai Hiromitsu

Classifications

• H10P14/27

  using selective deposition, e.g. simultaneous growth of monocrystalline and non-monocrystalline semiconductor materials · CPC title

• B23K26/382

  by boring · CPC title

• C23C14/042

  using masks · CPC title

• B05C21/005

  Masking devices (stencils B05C17/06; masking devices for which the means for applying liquids or other fluent material is spraying or is not important B05B12/20) · CPC title

• B23K26/0661

  disposed on the workpiece · CPC title