Waste fluid treatment apparatus

Patent metadata

Field	Value
Publication number	US-11040889-B2
Application number	US-202016740695-A
Country	US
Kind code	B2
Filing date	Jan 13, 2020
Priority date	Jan 15, 2019
Publication date	Jun 22, 2021
Grant date	Jun 22, 2021

Abstract

A waste fluid treatment apparatus removing processing debris from a processing waste fluid discharged from a processing apparatus. The waste fluid treatment apparatus includes a fluid bath storing the processing waste fluid, an inflow port through which the processing waste fluid is introduced to the fluid bath, a collecting area having an inclined surface for depositing the processing debris at a predetermined portion of a bottom of the fluid bath in a concentrated manner, a vacuum pump discharging the processing debris deposited in the collecting area to an outside of the fluid bath, and an outflow port through which a processing waste fluid obtained by removing the processing debris is discharged.

First claim

What is claimed is:

1. A waste fluid treatment apparatus configured to be connected, by an inflow pipe and a supply pipe, with a processing apparatus processing a workpiece held on a holding table with a processing tool while supplying a processing fluid, the waste fluid treatment apparatus being configured to remove processing debris from a processing waste fluid discharged from the processing apparatus through the inflow pipe and supply clear fluid through the supply pipe to the processing apparatus and comprising:
a fluid bath storing the processing waste fluid and having an inflow port through which the processing waste fluid discharged from the processing apparatus through the inflow pipe is introduced and an outflow port through which clear fluid obtained by removing the processing debris is discharged to the supply pipe;
a filter disposed in the fluid bath and having a lower end extending close to a bottom of the fluid bath to filter the processing waste fluid;
a first partition wall provided between the inflow port and the filter, and having a lower end extending at least as close to the bottom of the fluid bath as the lower end of the filter to define a first passageway between the lower end of the first partition wall and the bottom of the fluid bath, so that the processing waste fluid passes through the first passageway at the bottom of the fluid bath and flows upwards through the filter;
a collecting area formed in the fluid bath to have an inclined surface for depositing the processing debris at a predetermined portion of the bottom of the fluid bath in a concentrated manner;
a guide plate provided between the lower end of the first partition wall and the bottom of the fluid bath, and configured to guide the processing waste fluid through the first passageway and to prevent the processing debris in the collecting area from being stirred by a flow of the processing waste fluid;
first discharging means discharging the processing debris deposited in the collecting area to an outside of the fluid bath; and
a second partition wall provided between the filter and the outflow port, the second partition wall having an upper end extending lower than an upper end of side walls of the fluid bath to define a second passageway between the upper end of the second partition wall and a top of the fluid bath, so that the processing waste fluid passed through the filter flows into a waste fluid outflow section provided between the second partition wall and the outflow port and into an inlet of the outflow port located near the upper end of the side walls of the fluid bath,
wherein continuous waste fluid treatment is enabled by the first discharging means discharging the processing debris deposited in the collecting area.

2. The waste fluid treatment apparatus as defined in claim 1 wherein the guide plate is located over the collecting area to prevent the processing debris in the collecting area from being stirred up by the processing waste fluid entering through the inflow port.

3. The waste fluid treatment apparatus as defined in claim 1 further comprising, second discharging means discharging the processing debris deposited in the waste fluid outflow section to an outside of the fluid bath.

Assignees

• Disco Corp

Inventors

• Namioka Shinichi

Classifications

• C02F1/52

  by flocculation or precipitation of suspended impurities {(C02F1/463 takes precedence)} · CPC title

• B23Q11/1069 Primary

  Filtration systems specially adapted for cutting liquids (filtration in general B01D24/00 - B01D41/00) · CPC title

• B01D21/245

  Discharge mechanisms for the sediments · CPC title

• B01D21/0033

  Vertical, perforated partition walls (B01D21/2422 takes precedence) · CPC title

• B01D21/0012

  Settling tanks making use of filters, e.g. by floating layers of particulate material · CPC title