Debris removal in high aspect structures

Patent metadata

Field	Value
Publication number	US-11040379-B2
Application number	US-201916516842-A
Country	US
Kind code	B2
Filing date	Jul 19, 2019
Priority date	Sep 17, 2007
Publication date	Jun 22, 2021
Grant date	Jun 22, 2021

Abstract

A debris collection and metrology system for collecting and analyzing debris from a tip used in nanomachining processes, the system including an irradiation source, an irradiation detector, an actuator, and a controller. The irradiation source is operable to direct incident irradiation onto the tip, and the irradiation detector is operable to receive a sample irradiation from the tip, the sample irradiation being generated as a result of the direct incident irradiation being applied onto the tip. The controller is operatively coupled to an actuator system and the irradiation detector, and the controller is operable to receive a first signal based on a first response of the irradiation detector to the sample irradiation, and the controller is operable to effect relative motion between the tip and at least one of the irradiation source and the irradiation detector based on the first signal.

First claim

What is claimed is:

1. A method for removing debris from a surface of a substrate, comprising:
positioning a tip adjacent to the debris on the substrate;
using an external energy source to catalyze a phase change from a fluid to a solid to surround and entrap the debris at a surface of the tip; and
removing the debris from the surface of the substrate by moving the tip away from the substrate, wherein the substrate is an extreme ultraviolet lithography photomask.

2. The method of claim 1 , wherein the debris is entrapped at a surface of the tip.

3. The method of claim 1 , wherein the tip comprises a nanofibril.

4. The method of claim 1 , wherein the external energy source is a charged particle beam.

5. The method of claim 4 , wherein the charged particle beam catalyzes a phase change from a fluid to a solid to surround and entrap the debris at a surface of the tip.

6. The method of claim 2 , further comprising the step of removing the debris from the tip.

7. A device for removing debris from a surface of a substrate, comprising:
a tip;
a tip support assembly that supports the tip;
a substrate stage assembly that supports the substrate;
an actuator that provides relative movement of the tip and the substrate; and
an external energy source configured to catalyze a phase change from a fluid to a solid to surround and entrap the debris at a surface of the tip,
wherein the actuator positions the tip adjacent to the debris and the debris is entrapped by catalyzation of a phase change of a fluid to a solid, and wherein the debris is removed from the surface of the substrate by movement of the tip away from the substrate.

8. The debris removing device of claim 7 , wherein the debris is entrapped at a surface of the tip.

9. The debris removing device of claim 7 , wherein the tip comprises a nanofibril.

10. The debris removing device of claim 7 , wherein the external energy source is a charged particle beam.

11. The debris removing device of claim 10 , wherein the substrate is an extreme ultraviolet photolithography mask.

12. The method of claim 1 , wherein the method further comprises identifying the debris on the substrate and/or cleaning the substrate after removing the debris.

13. The method of claim 2 , wherein the method further comprises depositing the debris on a patch material having a lower surface energy than a surface energy of the tip.

Assignees

• Bruker Nano Inc

Inventors

• Robinson Tod Evan
• Arruza Bernabe
• Roessler Kenneth Gilbert
• Brinkley David
• Leclaire Jeffrey E

Classifications

• B08B1/10

  characterised by the type of cleaning tool · CPC title

• G03F1/82

  Auxiliary processes, e.g. cleaning or inspecting · CPC title

• G01Q80/00

  Applications, other than SPM, of scanning-probe techniques (manufacture or treatment of nanostructures B82B3/00; recording or reproducing information using near-field interaction G11B9/12, G11B11/24, G11B13/08) · CPC title

• G03F7/70925

  Cleaning, i.e. actively freeing apparatus from pollutants, e.g. using plasma cleaning · CPC title

• G01Q60/42

  Functionalisation · CPC title