Turbo molecular pump for mass spectrometer

Patent metadata

Field	Value
Publication number	US-11037773-B2
Application number	US-201916525165-A
Country	US
Kind code	B2
Filing date	Jul 29, 2019
Priority date	Aug 14, 2018
Publication date	Jun 15, 2021
Grant date	Jun 15, 2021

Abstract

The invention relates to turbo molecular pumps enabling high pumping speed. The disclosure suggests using one or more cage-like rotor stages to optimize pumping speed on vacuum systems with low gas flows and low ultimate pressures. This allows for a smaller motor as well as smaller overall form factor and makes it well suited, in particular, for compact mass spectrometers and desk-top mass spectrometers.

First claim

The invention claimed is:

1. A turbo molecular pump comprising a stationary frame structure and at least one rotor stage located at a low pressure input region, wherein the at least one rotor stage is substantially accommodated within or substantially resides inside the stationary frame structure, wherein the rotor in the at least one rotor stage rotates about an axis with respect to the stationary frame structure during operation and has an axially aligned central shaft receiving member from which a first rotor blade portion extends substantially radially outward and is connected to a second rotor blade portion which extends substantially paraxially to, and along the central shaft receiving member towards a high pressure output region, wherein, during operation, the first and second rotor blade portions deflect gaseous matter substantially paraxially and radially inwards, wherein the central shaft receiving member, the first rotor blade portion and the second rotor blade portion are designed and configured such that there is a substantially free path between the second rotor blade portion and the central shaft receiving member for gaseous matter deflected substantially radially inwards.

2. The turbo molecular pump of claim 1 , wherein the rotor blades in the first rotor blade portion are inclined in relation to a first plane perpendicular to the central shaft receiving member, and wherein the rotor blades in the second rotor blade portion are inclined in relation to a substantially hollow-cylindrical envelope contour defined by the second rotor blade portion.

3. The turbo molecular pump of claim 1 , wherein adjacent rotor blades in at least one of the first rotor blade portion and second rotor blade portion substantially overlap each other such that there is no direct line of sight from inside to outside so as to prevent gaseous matter having entered the inside from escaping or otherwise leaving, except in a direction towards the high pressure output region.

4. The turbo molecular pump of claim 1 , further comprising a ring-like support structure that connects the distal ends of the rotor blades in the second rotor blade portion in order to enhance mechanical stability.

5. The turbo molecular pump of claim 1 , wherein the rotor blades in the second rotor blade portion comprise rounded edges at a point of connection to the rotor blades in the first rotor blade portion.

6. The turbo molecular pump of claim 1 , wherein the first rotor blade portion transitions into the second rotor blade portion.

7. The turbo molecular pump of claim 1 , wherein a paraxial extension of the second rotor blade portion is equal to or greater than a radial extension of the first rotor blade portion.

8. The turbo molecular pump of claim 1 , wherein the central shaft receiving member comprises a hollow receptacle for accommodating a drive shaft which enables setting the central shaft receiving member in rotation.

9. The turbo molecular pump of claim 1 , wherein the central shaft receiving member flares from the high pressure output region to the low pressure input region, at least section-wise, in order to impart the gaseous matter deflected substantially radially inwards from the second rotor blade portion an additional momentum in a direction toward the high pressure output region.

10. The turbo molecular pump of claim 1 , wherein the rotor blades in the second rotor blade portion are helically distorted along a substantially hollow-cylindrical envelope contour defined by the second rotor blade portion in order to deflect the gaseous matter from the second rotor blade portion both substantially paraxially and radially inwards.

11. The turbo molecular pump of claim 1 , wherein the rotor in the at least one rotor stage is produced from stable metals or alloys thereof.

12. The turbo molecular pump of claim 11 , wherein the rotor in the at least one rotor stage is produced from aluminum, magnesium, titanium or alloys thereof.

13. The turbo molecular pump of claim 1 , further comprising, in a multi-port configuration, a second rotor stage at a position spaced apart from the low pressure input region, which second rotor stage is of similar configuration as the at least one rotor stage located at the low pressure input region.

14. The turbo molecular pump of claim 1 , wherein a number of rotor blades in at least one of the first rotor blade portion and second rotor blade portion is odd in order to reduce resonant vibrations.

15. A turbo molecular pump comprising a stationary frame structure and at least one rotor stage located at a low pressure input region, wherein the rotor in the at least one rotor stage rotates about an axis with respect to the stationary frame structure during operation and has an axially aligned central shaft receiving member from which a first rotor blade portion extends substantially radially outward and is connected to a second rotor blade portion which extends substantially paraxially to, and along the central shaft receiving member towards a high pressure output region, wherein, during operation, the first and second rotor blade portions deflect gaseous matter substantially paraxially and radially inwards, further comprising a third rotor blade portion which extends substantially radially outward from the central shaft receiving member and connects to the second rotor blade portion at a position between the low pressure input region and high pressure output region axially offset from the first rotor blade portion, in order to enhance mechanical stability, wherein, during operation, the third rotor blade portion deflects gaseous matter substantially paraxially.

16. The turbo molecular pump of claim 15 , wherein the rotor blades in the third rotor blade portion are inclined in relation to a second plane perpendicular to the central shaft receiving member.

17. The turbo molecular pump of claim 15 , wherein a number of rotor blades in at least one of the first rotor blade portion, second rotor blade portion and third rotor blade portion is odd in order to reduce resonant vibrations.

18. The turbo molecular pump of claim 15 , wherein adjacent rotor blades in at least one of the first rotor blade portion, second rotor blade portion and third rotor blade portion substantially overlap each other such that there is no direct line of sight from inside to outside so as to prevent gaseous matter having entered the inside from escaping or otherwise leaving, except in a direction towards the high pressure output region.

19. A mass spectrometer, comprising:
a recipient which has at least one compartment that, during operation, is to be maintained at a pressure substantially lower than ambient atmospheric pressure, and
a turbo molecular pump comprising a stationary frame structure and at least one rotor stage located at a low pressure input region, wherein the at least one rotor stage is substantially accommodated within or substantially resides inside the stationary frame structure, wherein the rotor in the at least one rotor stage rotates about an axis with respect to the stationary frame structure during operation and has an axially aligned central shaft receiving member from which a first rotor blade portion extends substantially radially outward and is connected to a second rotor blade portion which extends substantially paraxially to, and along the central shaft receiving member towards a high pressure output region, wherein, during operation, the first and second rotor blade portions deflect gaseous matter substantially paraxially and radially inwards, wherein the central sh

Assignees

• Bruker Daltonik Gmbh

Inventors

• Steiner Urs
• Franzen Jochen

Classifications

• F04D19/042 Primary

  Turbomolecular vacuum pumps · CPC title

• H01J49/0422 Primary

  for gaseous samples (interfaces to gas chromatographs G01N30/7206) · CPC title

• F04D29/26

  Rotors specially for elastic fluids · CPC title

• F04D29/32

  for axial flow pumps · CPC title

• B33Y80/00

  Products made by additive manufacturing · CPC title