PCM RF switch with PCM contacts having slot lower portions

Patent metadata

Field	Value
Publication number	US-11031552-B2
Application number	US-201916677450-A
Country	US
Kind code	B2
Filing date	Nov 7, 2019
Priority date	Aug 14, 2018
Publication date	Jun 8, 2021
Grant date	Jun 8, 2021

Abstract

In fabricating a radio frequency (RF) switch, a phase-change material (PCM) and a heating element underlying an active segment of the PCM are provided. A contact uniformity support layer is formed over the PCM. The PCM and the contact uniformity support layer are patterned. A contact dielectric is formed over the contact uniformity support layer. Slot lower portions of PCM contacts are formed extending through the contact dielectric and through the contact uniformity support layer, and connected to passive segments of the PCM. Wide upper portions of the PCM contacts are formed over the contact dielectric and over the slot lower portions of the PCM contacts. The contact dielectric separates the wide upper portions of the PCM contacts from the heating element so as to reduce parasitic capacitance of the RF switch. The contact uniformity support layer maintains a substantially constant thickness of the passive segments of the PCM.

First claim

The invention claimed is:

1. A method for fabricating contacts in an RF switch comprising a phase-change material (PCM) and a heating element approximately underlying an active segment of said PCM, the method comprising:
forming a contact uniformity support layer over said PCM;
patterning said PCM and said contact uniformity support layer;
forming a contact dielectric over said contact uniformity support layer;
forming slot lower portions of PCM contacts extending through said contact dielectric and through said contact uniformity support layer, and connected to passive segments of said PCM;
forming wide upper portions of said PCM contacts over said contact dielectric and over said slot lower portions of said PCM contacts;
wherein said contact dielectric separates said wide upper portion of said PCM contacts from said heating element so as to reduce a parasitic capacitance of said RF switch.

2. The method of claim 1 , wherein said contact uniformity support layer maintains a substantially constant thickness of said passive segments of said PCM.

3. The method of claim 1 , wherein said forming said slot lower portions of said PCM contacts comprises a punch-through etch of said contact uniformity support layer.

4. The method of claim 1 , wherein said contact uniformity support layer is formed immediately after said PCM is formed so as to protect said PCM from atmospheric effects.

5. The method of claim 1 , wherein said contact uniformity support layer comprises nitride.

6. The method of claim 1 , wherein said contact uniformity support layer is a bi-layer that comprises oxide and nitride.

7. The method of claim 1 , wherein said contact dielectric is further situated on sidewalls of said PCM.

8. The method of claim 1 , wherein a thermally conductive and electrically insulating layer is situated under said PCM, and a thickness of said contact dielectric is significantly greater than a thickness of said thermally conductive and electrically insulating layer.

9. The method of claim 1 , wherein said PCM comprises a material selected from the group consisting of germanium telluride (Ge X Te Y ), germanium antimony telluride (Ge X Sb Y Te Z ), germanium selenide (Ge X Se Y ), and any other chalcogenide.

10. The method of claim 1 , wherein said contact dielectric comprises a material selected from the group consisting of SiO 2 , boron-doped SiO 2 , phosphorous-doped SiO 2 and Si X N Y .

11. The method of claim 8 , wherein said thermally conductive and electrically insulating layer comprises a material selected from the group consisting of aluminum nitride (AlN), aluminum oxide (Al X O Y ), beryllium oxide (Be X O Y ), silicon carbide (SiC), diamond, and diamond-like carbon.

12. A method for fabricating contacts in an RF switch comprising a phase-change material (PCM) and a heating element approximately underlying an active segment of said PCM, the method comprising:
forming a contact dielectric over said PCM
forming slot lower portions of PCM contacts extending through said contact dielectric and connecting to passive segments of said PCM;
forming wide upper portions of said PCM contacts over said contact dielectric and over said slot lower portions of said PCM contacts.

13. The method of claim 12 , wherein said contact dielectric is further situated on sidewalls of said PCM.

14. The method of claim 12 , wherein said contact dielectric comprises a material selected from the group consisting of SiO 2 , boron-doped SiO 2 , phosphorous-doped SiO 2 and Si X N Y .

15. The method of claim 12 , wherein a thermally conductive and electrically insulating layer is situated under said PCM.

16. The method of claim 15 , wherein said thermally conductive and electrically insulating layer comprises a material selected from the group consisting of aluminum nitride (AlN), aluminum oxide (Al X O Y ), beryllium oxide (Be X O Y ), silicon carbide (SiC), diamond, and diamond-like carbon.

17. The method of claim 12 , wherein said PCM comprises a material selected from the group consisting of germanium telluride (Ge X Te Y ), germanium antimony telluride (Ge X Sb Y Te Z ), germanium selenide (Ge X Se Y ), and any other chalcogenide.

18. A method for fabricating contacts in an RF switch comprising a phase-change material (PCM) and a heating element approximately underlying an active segment of said PCM, the method comprising:
forming a contact uniformity support layer over said PCM;
forming a contact dielectric over said contact uniformity support layer;
forming slot lower portions of PCM contacts extending through said contact dielectric and through said contact uniformity support layer, and connected to passive segments of said PCM.

19. The method of claim 18 , wherein said contact uniformity support layer comprises nitride.

20. The method of claim 18 , wherein said contact uniformity support layer is a bi-layer that comprises oxide and nitride.

Assignees

• Newport Fab Llc

Inventors

• Rose Jefferson E
• Slovin Gregory P
• El-Hinnawy Nabil
• Debar Michael J
• Howard David J

Classifications

• H01L45/06

  Electricity · mapped topic

• H01L45/1246 Primary

  Electricity · mapped topic

• H01L45/143

  Electricity · mapped topic

• H01L45/1675

  Electricity · mapped topic

• H01L45/144

  Electricity · mapped topic