Handling device for handling a measuring probe

Patent metadata

Field	Value
Publication number	US-11022786-B2
Application number	US-201816646844-A
Country	US
Kind code	B2
Filing date	Sep 13, 2018
Priority date	Sep 13, 2017
Publication date	Jun 1, 2021
Grant date	Jun 1, 2021

Abstract

A handling apparatus for handling a measuring probe of a scanning probe microscope is disclosed. The measuring probe has a probe body and a probe tip which is coupled with the probe body by a cantilever. The handling apparatus includes a receiving device for receiving the measuring probe at a receiving area, a guide structure, in which the measuring probe is guidable while at the same time the probe body is at least partially limited and the cantilever and the probe tip are supported without contact, and a transport device for transporting the measuring probe from the receiving area along the guide structure to a target area.

First claim

The invention claimed is:

1. A handling apparatus for handling a measuring probe of a scanning probe microscope, the measuring probe comprising:
a probe body and a probe tip which is coupled with the probe body by a cantilever, wherein the handling apparatus comprises:
a receiving device for receiving the measuring probe at a receiving area;
a guide structure, in which the measuring probe is guidable while at the same time the probe body is at least partially limited and the cantilever and the probe tip are supported without contact; and
a transport device for transporting the measuring probe from the receiving area along the guide structure to a target area;
wherein the transport device further comprises at least one of the following features:
a feeding pusher for pushing the measuring probe at least in sections from the receiving area to the target area;
a discharge pusher for pushing the measuring probe at least in sections from the target area back to the receiving area.

2. The handling apparatus according to claim 1 ,
wherein the handling apparatus comprises at least one of the following features:
(A) the handling apparatus comprising a cover device for placing on the receiving device to cover the measuring probe,
(B) the guide structure comprises a channel at least in sections between the receiving area and the target area, along which channel the measuring probe is guidable,
wherein in particular
(B I) the channel is delimited by top and/or bottom and/or lateral walls,
wherein further in particular
(B II) a wall facing the probe tip comprises an exemption for releasing the cantilever and the probe tip in a contactless manner.

3. The handling apparatus according to claim 1 , wherein the transport device for transporting the measuring probe is formed from the target area along the guide structure and hack to the receiving area.

4. The handling apparatus according to claim 1 , wherein the feeding pusher comprises an exemption for releasing the cantilever and the probe tip in a contactless manner, when the measuring probe is pushed by the feeding pusher at least in sections from the receiving area to the target area.

5. The handling apparatus according to claim 1 , wherein the discharge pusher comprises at least one of the following features:
(A) the discharge pusher is formed merely to act on the probe body of the measuring probe, when the measuring probe is pushed back by means of the discharge pusher at least in sections from the target area to the receiving area;
(B) the discharge pusher comprises a spring tongue;
(C) the discharge pusher comprises a hook which acts on the measuring probe during the pushing, and a release nose, which is coupled with the hook and which sinks into a recess upon pushing, which release nose is guided out of the recess as a result of the pushing when the receiving area is reached by the measuring probe, whereby the hook releases the measuring probe;
(D) wherein, perpendicular to a pushing direction, the discharge pusher is formed narrower than the feeding pusher.

6. The handling apparatus according to claim 1 , further comprising:
an actuating device for actuating the transport device by a user or by a drive device, in particular a motor,
wherein, in particular, the handling apparatus comprises at least one of the following features:
(A) the actuating device comprises a force limitation mechanism for limiting a force being exertable by a user to the actuating device in such a way that a force being exerted on the transport device does not exceed a pre-definable threshold value;
(B) the actuating device is formed in such a way that a shifting of the transport device by actuating the actuating device can selectively be enabled or disabled.

7. The handling apparatus according to claim 1 , further comprising:
a transport module comprising the target area, which transport module, in particular together with a measuring probe at the target area, is separable from the rest of the handling apparatus and transportable to the scanning probe microscope,
wherein, in particular the handling apparatus comprises a movable ramp and a movable guide component, which are movable towards the transport module for engaging the transport module and are movable away from the transport module, thereby releasing the transport module,
wherein, further in particular, the handling apparatus comprises at least one of the following features:
(A) the receiving area is arranged between the ramp and the guide component upon engaging the transport module;
(B) the target area is arranged between the transport module and the guide component upon engaging the transport module.

8. The handling apparatus according to claim 1 , further comprising:
a fixing device for selectively fixing the measuring probe to the target area.

9. The handling apparatus according to claim 8 , wherein the fixing device comprises:
a first fixing component in the region of the target area; and
a second fixing component, which is formed to be selectively movable away from the target area or movable towards the target area for switching between a state where the measuring probe is fixed to the target area and a state where the measuring probe is detached from the target area;
wherein the fixing device is configured so that by moving closer the second fixing component, the state where the measuring probe is detached from the target area is turned on.

10. The handling apparatus according to claim 9 , wherein the fixing device is configured so that by moving away the second fixing component the state where the measuring probe is fixed to the target area is turned on.

11. The handling apparatus according to claim 8 , wherein the fixing device comprises:
a master three device for selectively exerting a master force on a fixing mechanism;
the fixing mechanism, that is operable by the master force device for detaching and/or fixing the measuring probe that has been transported to the target area;
wherein, in particular, the handling apparatus comprises at least one of the following features:
(A) the master force device is selected from a group consisting of
a master force device for exerting a magnetic master force, in particular exertable by a movable master force permanent magnet or by an electrically activatable master force electromagnet,
a hydraulic master force,
a pneumatic master force,
an electric master force,
a thermal master force, and
a mechanical master force;

(B) the fixing mechanism comprises at least two magnet elements, whose magnetic interaction force is formed to fix the measuring probe which was transported to the target area, in particular in a clamping manner.

12. The handling apparatus according to claim 8 , wherein the fixing device comprises a holding force amplification element with a curved, in particular spherically curved, adhesive force transfer area, which, in a state where the measuring probe has been transported by the adhesive force transfer area to the target area, in particular in a punctiform manner, acts directly on the measuring device.

13. The handling apparatus according to claim 8 , wherein the transport device and the fixing device are configured for cooperating in such a way that the measuring probe is first transported to the target area and is fixed not until being fixed to the target area, in particular is not pressed against the target area by forming a physical contact until being fixed.

14. The handling apparatus according to claim 1 , wherein the handling apparatus comprises at least one of the following features:
(A) an insertion pocket, which is limited in

Assignees

• Anton Paar Gmbh

Inventors

• Pinno-Rath Norbert
• Leuprecht Gernot
• Koller Daniel

Classifications

• G01Q70/02 Primary

  Probe holders · CPC title

• G01Q60/38

  Probes, their manufacture, or their related instrumentation, e.g. holders · CPC title

• G01Q60/16

  Probes, their manufacture, or their related instrumentation, e.g. holders · CPC title

• Y10S977/873

  Tip holder · CPC title

• G02B21/002 Primary

  Scanning microscopes (scanning near field optical microscopes G01Q60/18) · CPC title