Nanopatterned biosensor electrode for enhanced sensor signal and sensitivity

Patent metadata

Field	Value
Publication number	US-11022577-B2
Application number	US-201816169654-A
Country	US
Kind code	B2
Filing date	Oct 24, 2018
Priority date	Jan 30, 2017
Publication date	Jun 1, 2021
Grant date	Jun 1, 2021

Abstract

Methods for forming an electrode structure, which can be used as a biosensor, are provided in which the electrode structure has non-random topography located on one surface of an electrode base. In some embodiments, an electrode structure is obtained that contains no interface between the non-random topography of the electrode structure and the electrode base of the electrode structure. In other embodiments, electrode structures are obtained that have an interface between the non-random topography of the electrode structure and the electrode base of the electrode structure.

First claim

What is claimed is:

1. A method of forming an electrode structure, the method comprising:
providing an electrode base material on a substrate;
forming a patterned material layer on and laterally surrounding the exposed surfaces of the electrode base material, wherein the patterned material layer contains openings that physically exposed the electrode base material and wherein the patterned material layer laterally surrounding the electrode base material directly contacts a surface of the substrate;
etching the electrode base material utilizing the patterned material layer as an etch mask to provide the electrode structure comprising a remaining portion of the electrode base material and having an electrode base shape and a nanotopography shape;
removing the patterned material layer; and
attaching a biological functionalization material to the electrode structure.

2. The method of claim 1 , wherein the biological functionalization material is composed of an oligonucleotide, a nucleic acid, a peptide, a ligand, a protein, an enzyme, or any other material apt to bind with a complementary target biomolecule.

3. The method of claim 2 , wherein the biological functionalization material is composed of glucose oxidase or glucose dehydrogenase.

4. The method of claim 1 , wherein no interface is present between the electrode base shape and the nanotopography shape.

5. The method of claim 1 , wherein the patterned material layer is composed of a dielectric material.

6. The method of claim 1 , wherein the patterned material layer is composed of a photoresist material.

7. The method of claim 1 , wherein the removing of the patterned material layer comprises a reactive ion etch or a chemical wet etch.

8. The method of claim 1 , wherein the etching of the electrode base material comprises an anisotropic etch.

9. A method of forming an electrode structure, the method comprising:
providing an electrode base material on a substrate;
forming a patterned material layer on and laterally surrounding the exposed surfaces of the electrode base material, wherein the patterned material layer contains openings that physically exposed the electrode base material;
etching the electrode base material utilizing the patterned material layer as an etch mask to provide the electrode structure comprising a remaining portion of the electrode base material and having an electrode base shape and a nanotopography shape;
removing the patterned material layer;
attaching a biological functionalization material to the electrode structure; and
removing the substrate, wherein the removing of the substrate is performed between the removing of the patterned material layer and the attaching of the biological functionalization material to the electrode structure.

10. The method of claim 1 , wherein the providing of the electrode base material comprises:
depositing a conductive material on the substrate; and
patterning the conductive material.

11. The method of claim 10 , wherein the conductive material is a conductive metal-containing material selected from an elemental metal and an alloy containing one of more elemental metals.

12. The method of claim 11 , wherein the elemental metal is platinum, copper, silver, gold, tungsten, aluminum, iron, palladium, nickel, titanium or zirconium.

13. The method of claim 1 , wherein the electrode structure is of unitary construction and uniform composition.

14. The method of claim 1 , wherein the substrate is composed of a semiconductor material.

15. The method of claim 1 , wherein the substrate is composed of a ceramic material, an element alloy, or an alloy of an elemental metal.

Assignees

• IBM

Inventors

• Kinser Emily R

Classifications

• B81C1/00539

  Wet etching · CPC title

• C12Q1/006

  for glucose · CPC title

• C25D5/022

  using masking means · CPC title

• C25D5/48

  After-treatment of electroplated surfaces · CPC title

• G01N27/3276

  being a hybridisation with immobilised receptors (using a FET type sensor G01N27/4145; concerning the hybridisation C12Q1/68) · CPC title