Nanopatterned biosensor electrode for enhanced sensor signal and sensitivity

Patent metadata

Field	Value
Publication number	US-2018217080-A1
Application number	US-201715419524-A
Country	US
Kind code	A1
Filing date	Jan 30, 2017
Priority date	Jan 30, 2017
Publication date	Aug 2, 2018
Grant date	—

Abstract

Methods for forming an electrode structure, which can be used as a biosensor, are provided in which the electrode structure has non-random topography located on one surface of an electrode base. In some embodiments, an electrode structure is obtained that contains no interface between the non-random topography of the electrode structure and the electrode base of the electrode structure. In other embodiments, electrode structures are obtained that have an interface between the non-random topography of the electrode structure and the electrode base of the electrode structure.

First claim

What is claimed is:

1 . A method of forming an electrode structure, said method comprising:
providing a mold having a pattern that comprises both an electrode base shape and a nanotopography shape; forming a metallic seed layer on exposed surfaces of said mold having said electrode base shape and said nanotopography shape; electrode positing a conductive metal-containing material on said metallic seed layer and within said mold to provide an electrode structure comprising said conductive metal-containing material and having said electrode base shape and said nanotopography shape; removing said mold from said electrode structure; and attaching a biological functionalization material to said electrode structure.

2 . The method of claim 1 , wherein said providing said mold comprises:
first patterning a substrate to provide said electrode base shape in said substrate; and second patterning said substrate containing said electrode base shape to provide said nanotopography shape into said substrate.

3 . The method of claim 1 , wherein said metallic seed layer and said conductive metal-containing material comprise a same metal or metal alloy.

4 . The method of claim 1 , further comprising: removing excess conductive metal-containing material formed atop said mold.

5 . The method of claim 1 , wherein said removing said mold comprises contacting said mold with a chemical wet etchant.

6 . The method of claim 1 , wherein said biological functionalization material is composed of an oligonucleotide, a nucleic acid, a peptide, a ligand, a protein, an enzyme, or any other material apt to bind with a complementary target biomolecule.

7 . The method of claim 6 , wherein said biological functionalization material is composed of glucose oxidase or glucose dehydrogenase.

8 . The method of claim 1 , wherein no interface is present between said electrode base shape and said nanotopography shape.

9 . A method of forming an electrode structure, said method comprising:
providing an electrode base having an electrode base shape on a substrate; forming a patterned material layer surrounding said electrode base, wherein said patterned material layer contains openings which define a nanotopography shape of said electrode structure; forming a metallic seed layer on exposed surfaces of said electrode base and within said openings; electroplating a conductive metal-containing material on said metallic seed layer and within said openings to provide said electrode structure comprising said electrode base having said electrode base shape and said conductive metal-containing material having said nanotopography shape; removing said patterned material layer; and attaching a biological functionalization material to said electrode structure.

10 . The method of claim 9 , wherein said patterned material layer is a patterned dielectric layer or a patterned photoresist layer.

11 . The method of claim 9 , further comprising: removing said substrate, wherein said removing said substrate is performed between said removing said patterned material layer and said attaching said biological functionalization material to said electrode structure.

12 . The method of claim 9 , wherein said metallic seed layer and said conductive metal-containing material comprise a same metal or metal alloy.

13 . The method of claim 9 , further comprising: removing excess conductive metal-containing material formed atop said patterned material layer by performing a planarization process or a lift-off process.

14 . The method of claim 9 , wherein said biological functionalization material is composed of an oligonucleotide, a nucleic acid, a peptide, a ligand, a protein, an enzyme, or any other material apt to bind with a complementary target biomolecule.

15 . The method of claim 14 , wherein said biological functionalization material is composed of glucose oxidase or glucose dehydrogenase.

16 . The method of claim 9 , wherein an interface is present between said electrode base shape and said nanotopography shape.

17 . A method of forming an electrode structure, said method comprising:
providing an electrode base material on a substrate; forming a patterned material layer surrounding the exposed surfaces of said electrode base material, wherein said patterned material layer contains openings; etching said electrode base material utilizing said patterned material layer as an etch mask to provide said electrode structure comprising a remaining portion of said electrode base material and having an electrode base shape and a nanotopography shape; removing said patterned material layer; and attaching a biological functionalization material to said electrode structure.

18 . The method of claim 17 , wherein said biological functionalization material is composed of an oligonucleotide, a nucleic acid, a peptide, a ligand, a protein, an enzyme, or any other material apt to bind with a complementary target biomolecule.

19 . The method of claim 18 , wherein said biological functionalization material is composed of glucose oxidase or glucose dehydrogenase.

20 . The method of claim 17 , wherein no interface is present between said electrode base shape and said nanotopography shape.

Assignees

• IBM

Inventors

• Kinser Emily R

Classifications

• G01N27/3271 Primary

  Amperometric enzyme electrodes for analytes in body fluids, e.g. glucose in blood (amperometry per se G01N27/49; aspects concerning the enzyme reagent C12Q1/001) · CPC title

• G01N27/3276

  being a hybridisation with immobilised receptors (using a FET type sensor G01N27/4145; concerning the hybridisation C12Q1/68) · CPC title

• C25D1/20

  Separation of the formed objects from the electrodes {with no destruction of said electrodes} · CPC title

• C25D1/006 Primary

  Nanostructures, e.g. using aluminium anodic oxidation templates [AAO] · CPC title

• C25D5/48

  After-treatment of electroplated surfaces · CPC title