Lithium tantalate single crystal substrate, bonded substrate, manufacturing method of the bonded substrate, and surface acoustic wave device using the bonded substrate

Patent metadata

Field	Value
Publication number	US-11021810-B2
Application number	US-201615566247-A
Country	US
Kind code	B2
Filing date	Apr 6, 2016
Priority date	Apr 16, 2015
Publication date	Jun 1, 2021
Grant date	Jun 1, 2021

Abstract

The lithium tantalate single crystal substrate of the present invention is a rotated Y-cut LiTaO3 single crystal substrate having a crystal orientation of 36° Y-49° Y cut characterized in that: the substrate is diffused with Li from its surface into its depth such that it has a Li concentration profile showing a difference in the Li concentration between the substrate surface and the depth of the substrate; and the substrate is treated with single polarization treatment so that the Li concentration is substantially uniform from the substrate surface to a depth which is equivalent to 5-15 times the wavelength of either a surface acoustic wave or a leaky surface acoustic wave propagating in the LiTaO3 substrate surface.

First claim

The invention claimed is:

1. A method of manufacturing a bonded substrate, comprising:
bonding a base substrate to a LiTaO 3 single crystal substrate which has a concentration profile wherein Li concentration is different between a substrate surface and an inner part of the substrate and wherein Li concentration is substantially uniform in a region ranging from at least one of the substrate's surfaces to a depth; and
removing a LiTaO 3 surface layer opposite the bonding face in a manner such that at least part of said region where the Li concentration is substantially uniform is left,
wherein the LiTaO 3 single crystal substrate is doped with Fe at a concentration of 25 ppm to 150 ppm.

2. The method of claim 1 , wherein that region in which the Li concentration is substantially uniform is of a pseudo-stoichiometric composition.

3. The method of claim 1 , wherein the LiTaO 3 single crystal substrate is diffused with Li from the LiTaO 3 single crystal substrate having a crystal orientation of 36° Y-49° Y cut into depth thereof such that the substrate has a Li concentration profile showing the difference in the Li concentration between the substrate surface and the depth of the substrate; the substrate is treated with single polarization treatment so that the Li concentration is substantially uniform from the substrate surface to a depth which is equivalent to 5-15 times the wavelength of either a surface acoustic wave or leaky surface acoustic wave propagating in the LiTaO 3 substrate surface; and the wavelength is 2.5 μm.

4. The method of claim 1 , wherein the LiTaO 3 single crystal substrate has a region which exhibits a concentration profile such that the Li concentration is higher in areas closer to the substrate surface, and the Li concentration decreases with depth of the substrate in the thickness direction.

5. The method of claim 1 , wherein the base substrate is made of Si, SiC, or spinel.

6. The method of claim 1 , wherein the base substrate comprises Si.

7. The method of claim 1 , wherein the base substrate comprises SiC.

8. The method of claim 1 , wherein the base substrate comprises spinel.

9. A method of manufacturing a bonded substrate, comprising:
bonding a base substrate to a LiTaO 3 single crystal substrate which has a concentration profile wherein Li concentration is different between a substrate surface and an inner part of the substrate and wherein Li concentration is substantially uniform in a region ranging from at least one of the substrate's surfaces to a depth; and
removing a LiTaO 3 surface layer opposite the bonding face in a manner such that only said region where the Li concentration is substantially uniform is left,
wherein the LiTaO 3 single crystal substrate is doped with Fe at a concentration of 25 ppm to 150 ppm.

10. The method of claim 9 , wherein that region in which the Li concentration is substantially uniform is of a pseudo-stoichiometric composition.

11. The method of claim 9 , wherein the base substrate comprises Si, SiC, or spinel.

12. The method of claim 9 , wherein the base substrate comprises Si.

13. The method of claim 9 , wherein the base substrate comprises SiC.

14. The method of claim 9 , wherein the base substrate comprises spinel.

Assignees

• Shinetsu Chemical Co

Inventors

• Tanno Masayuki
• Abe Jun
• Kato Koji
• Kuwabara Yoshinori

Classifications

• C30B31/02

  by contacting with diffusion materials in the solid state · CPC title

• B32B18/00

  Layered products essentially comprising ceramics, e.g. refractory products · CPC title

• H03H9/6483

  Ladder SAW filters · CPC title

• C30B29/605

  Products containing multiple oriented crystallites, e.g. columnar crystallites · CPC title

• C30B31/06

  by contacting with diffusion material in the gaseous state · CPC title