Nanopatterned biosensor electrode for enhanced sensor signal and sensitivity

Patent metadata

Field	Value
Publication number	US-11013437-B2
Application number	US-201916245942-A
Country	US
Kind code	B2
Filing date	Jan 11, 2019
Priority date	Jan 25, 2016
Publication date	May 25, 2021
Grant date	May 25, 2021

Abstract

An electrode structure, which can be used as a biosensor, is provided that has non-random topography located on one surface of an electrode base substrate. The non-random topography of the electrode structure and the electrode base substrate of the electrode structure are of unitary construction and unitary composition and thus there is no interface is located between these elements of the electrode structure.

First claim

What is claimed is:

1. A method of forming an electrode structure, the method comprising:
providing a mold having a pattern that comprises both at least one first opening defining an electrode base shape and a second opening defining a nanotopography shape including a plurality of non-random individual articulated features, the first opening and second opening present entirely in the mold, wherein the second opening is directly connected to the first opening and the second opening has a critical dimension that is less than a critical dimension of the first opening;
introducing a metallic glass into the mold utilizing a thermoplastic forming process to provide an electrode structure comprising the metallic glass and having the electrode base substrate shape and the nanotopography shape of the mold;
removing the mold from the electrode structure; and
attaching a biological functionalization material to the electrode structure, wherein the biological functionalization material is a bioreceptor that binds with a complementary biomolecule to create a binding event that generates an electrical current that can be conducted by the electrode structure.

2. The method of claim 1 , wherein the removing of the mold comprises:
contacting the mold with a chemical wet etchant.

3. The method of claim 1 , wherein the bioreceptor is composed of an oligonucleotide, a nucleic acid, a peptide, a protein, or an enzyme.

4. The method of claim 1 , wherein the providing the mold comprises:
first patterning a substrate to provide the electrode base shape in the substrate; and
second patterning the substrate containing the electrode base shape to provide the nanotopography shape into the substrate.

5. The method of claim 4 , wherein the substrate is composed of a semiconductor material.

6. The method of claim 4 , wherein the substrate is composed of a dielectric material.

7. The method of claim 4 , wherein the substrate is composed of a ceramic material, an elemental metal or an alloy containing an elemental metal.

8. The method of claim 1 , wherein the metallic glass is a solid metallic material or metal alloy with a disordered amorphous atomic structure.

9. The method of claim 1 , wherein each non-random individual articulated feature has a shape of a rod, cone, ellipse or an annular structure.

10. The method of claim 1 , wherein each non-random individual articulated feature has a pitch ratio from 2:1 to 100:1 and an aspect ratio from 1:1 to 500:1.

11. The method of claim 1 , wherein the thermoplastic forming process comprises:
heating the metallic glass above a glass transition point of the metallic glass; and
applying an external compressive force to flow melted metallic glass into the mold.

12. The method of claim 11 , wherein the thermoplastic forming process is performed in an inert ambient.

13. The method of claim 11 , wherein the thermoplastic forming process is performed in air.

14. The method of claim 11 , further comprising cooling the mold containing the melted metallic glass to room temperature.

15. The method of claim 1 , further comprising removing, after performing the thermoplastic forming process, excess metallic glass that is located above the mold.

16. The method of claim 15 , wherein the removing of the excess metallic glass comprises a planarization process, a chemical etch back process, or reactive ion etching.

17. The method of claim 1 , wherein the metallic glass is composed of a PtCuNiP alloy.

18. A method of forming an electrode structure, the method comprising:
providing a mold having a pattern that comprises both an electrode base shape and a nanotopography shape;
introducing a metallic glass into the mold utilizing a thermoplastic forming process to provide an electrode structure comprising the metallic glass and having the electrode base substrate shape and the nanotopography shape of the mold;
removing the mold from the electrode structure; and
attaching glucose oxidase to the electrode structure.

19. A method of forming an electrode structure, the method comprising:
providing a mold having a pattern that comprises both an electrode base shape and a nanotopography shape;
introducing a metallic glass into the mold utilizing a thermoplastic forming process to provide an electrode structure comprising the metallic glass and having the electrode base substrate shape and the nanotopography shape of the mold;
removing the mold from the electrode structure; and
attaching glucose dehydrogenase to the electrode structure.

Assignees

• IBM
• Univ Yale

Inventors

• Kinser Emily R
• Kyriakides Themistoclis
• Padmanabhan Jagannath

Classifications

• B82Y40/00

  Manufacture or treatment of nanostructures · CPC title

• A61B5/14532

  for measuring glucose, e.g. by tissue impedance measurement · CPC title

• G01N27/3271

  Amperometric enzyme electrodes for analytes in body fluids, e.g. glucose in blood (amperometry per se G01N27/49; aspects concerning the enzyme reagent C12Q1/001) · CPC title

• A61B2562/125

  characterised by the manufacture of electrodes · CPC title

• A61B5/1486 Primary

  using enzyme electrodes, e.g. with immobilised oxidase · CPC title