Wet etching of samarium selenium for piezoelectric processing

Patent metadata

Field	Value
Publication number	US-11011387-B2
Application number	US-201916366651-A
Country	US
Kind code	B2
Filing date	Mar 27, 2019
Priority date	Jan 13, 2017
Publication date	May 18, 2021
Grant date	May 18, 2021

Abstract

A subtractive forming method that includes providing a material stack including a samarium and selenium containing layer and an aluminum containing layer in direct contact with the samarium and selenium containing layer. The samarium component of the samarium and selenium containing layer of the exposed portion of the material stack is etched with an etch chemistry comprising citric acid and hydrogen peroxide that is selective to the aluminum containing layer. The hydrogen peroxide reacts with the aluminum containing layer to provide an oxide etch protectant surface on the aluminum containing layer, and the citric acid etches samarium selectively to the oxide etch protectant surface. Thereafter, a remaining selenium component of is removed by elevating a temperature of the selenium component.

First claim

What is claimed is:

1. A subtractive forming method comprising:
for a material stack including a samarium and selenium containing layer and an aluminum containing layer in direct contact with the samarium and selenium containing layer:
etching the samarium component of the samarium and selenium containing layer of the exposed portion of the material stack with an etch chemistry comprising citric acid and hydrogen peroxide that is selective to the aluminum containing layer; and
removing a remaining selenium component of the samarium and selenium containing layer in the exposed portion of the material stack by elevating a temperature of the selenium component above a heat of vaporization for the selenium component.

2. The method of claim 1 , wherein the samarium and selenium containing layer comprises 10 at. % to 90 at. % samarium (Sm), and 90 at. % to 10 at. % selenium (Se).

3. The method of claim 1 , wherein the aluminum containing layer comprises greater than 95 at. % aluminum (Al).

4. The method of claim 1 , further comprising masking the material stack to expose a portion of the material stack to be etched, masking including forming a photoresist mask.

5. The method of claim 1 , wherein the etch chemistry comprises hydrogen peroxide in an aqueous solution in an amount ranging from 1 wt/wt % to 20 wt/wt %, with citric acid present in the aqueous solution in an amount ranging from 1 wt/wt % to 20 wt/wt %.

6. The method of claim 1 , wherein etching the samarium component of the samarium and selenium containing layer of the exposed portion of the material stack with the etch chemistry comprising citric acid and hydrogen peroxide comprises applying the etch chemistry to the material stack at room temperature.

7. The method of claim 1 , wherein said etching the samarium component of the samarium and selenium containing layer of the exposed portion of the material stack with an etch chemistry comprising citric acid and hydrogen peroxide comprises a time period ranging from 15 seconds to 5 minutes.

8. The method of claim 1 , wherein said removing the remaining selenium component of the samarium and selenium containing layer in the exposed portion of the material stack by elevating the temperature of the selenium component comprises heating the material stack following said etching in a furnace at a temperature greater than 100° C. for a time period greater than 5 minutes.

9. The method of claim 8 , wherein said heating the material stack comprises a nitrogen containing atmosphere.

10. A subtractive forming method comprising:
etching a samarium component of a samarium and selenium containing layer of a material stack with an etch chemistry that is selective to an aluminum containing layer in direct contact with the samarium and selenium containing layer; and
removing a remaining selenium component of the samarium and selenium containing layer of the material stack by elevating a temperature of the selenium component above a heat of vaporization for the selenium component.

11. The method of claim 10 , wherein the samarium and selenium containing layer comprises 10 at. % to 90 at. % samarium (Sm), and 90 at. % to 10 at. % selenium (Se).

12. The method of claim 10 , wherein the aluminum containing layer comprises greater than 95 at. % aluminum (Al).

13. The method of claim 10 , further comprising masking the material stack to expose a portion of the material stack to be etched, masking including forming a photoresist mask.

14. The method of claim 10 , wherein the etch chemistry comprises hydrogen peroxide in an aqueous solution in an amount ranging from 1 wt/wt % to 20 wt/wt %, with citric acid present in the aqueous solution in an amount ranging from 1 wt/wt % to 20 wt/wt %.

15. The method of claim 10 , wherein the etch chemistry includes citric acid and hydrogen peroxide; and
wherein etching the samarium component of the samarium and selenium containing layer of the material stack comprises applying the etch chemistry to the material stack at room temperature.

16. The method of claim 10 , wherein the etch chemistry includes citric acid and hydrogen peroxide; and
wherein etching the samarium component of the samarium and selenium containing layer of the material stack comprises applying the etch chemistry for a time period ranging from 15 seconds to 5 minutes.

17. The method of claim 10 , wherein said removing the remaining selenium component of the samarium and selenium containing layer of the material stack by elevating the temperature of the selenium component comprises heating the material stack following said etching in a furnace at a temperature greater than 100° C. for a time period greater than 5 minutes.

18. The method of claim 17 , wherein said heating the material stack comprises a nitrogen containing atmosphere.

Assignees

• IBM

Inventors

• Armstrong Christine
• Copel Matthew W
• Luo Yu
• Solomon Paul M

Classifications

• H10P14/3431

  Selenides · CPC title

• H10P14/24

  using chemical vapour deposition [CVD] · CPC title

• H10P50/667 Primary

  by liquid etching only · CPC title

• H01L41/332

  Electricity · mapped topic

• H01L41/39

  Electricity · mapped topic