Workpiece processing chamber having a rotary microwave plasma source
US-10039157-B2 · Jul 31, 2018 · US
US11007681B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11007681-B2 |
| Application number | US-201816140345-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 24, 2018 |
| Priority date | Sep 24, 2018 |
| Publication date | May 18, 2021 |
| Grant date | May 18, 2021 |
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Methods and systems for heating and compressing a material using microwaves. The system includes a flexible waveguide configured to receive a first portion of microwaves and a rigid waveguide configured to receive a second portion of microwaves. The system includes a top microwave antenna connected to the flexible waveguide, having a first plurality of slots for emitting the first portion of microwaves to be received by a top side of the material and heat the material. The system includes a bottom microwave antenna connected to the rigid waveguide, having a second plurality of slots for emitting the second portion of microwaves to be received by a bottom side of the material and heat the material. The system includes a presser configured to provide a downward force onto the top microwave antenna toward the material to compress the material as the material is being heated by the microwaves.
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What is claimed is: 1. A system for heating and compressing a material using microwaves, the system comprising: a flexible waveguide configured to receive a first portion of the microwaves; a rigid waveguide configured to receive a second portion of the microwaves; a top microwave antenna connected to the flexible waveguide, having a first plurality of slots, and configured to receive the first portion of the microwaves and emit the first portion of the microwaves through the first plurality of slots to be received by a top side of the material and heat the material; a bottom microwave antenna connected to the rigid waveguide, having a second plurality of slots, and configured to receive the second portion of the microwaves and emit the second portion of the microwaves through the second plurality of slots to be received by a bottom side of the material and heat the material; and a presser coupled to the top microwave antenna and configured to provide a downward force onto the top microwave antenna toward the material to compress the material between the top microwave antenna and the bottom microwave antenna as the material is being heated by the microwaves, the flexible waveguide connected to the top microwave antenna being bent as the presser provides the downward force onto the top microwave antenna. 2. The system of claim 1 , further comprising a waveguide splitter configured to receive the microwaves and split the received microwaves into the first portion of the microwaves and the second portion of the microwaves, the first portion of the microwaves being provided to the flexible waveguide and the second portion of the microwaves being provided to the rigid waveguide. 3. The system of claim 1 , further comprising a top barrier located between the material and the top microwave antenna and configured to facilitate even transmission of pressure onto the material; and a bottom barrier located between the material and the bottom microwave antenna and configured to facilitate even transmission of pressure onto the material. 4. The system of claim 3 , wherein the top barrier and the bottom barrier are made of quartz. 5. The system of claim 1 , further comprising: first aligning pins located proximal to a first end of the top microwave antenna and a first end of the bottom microwave antenna; and second aligning pins located proximal to a second end of the top microwave antenna and a second end of the bottom microwave antenna, the first aligning pins and the second aligning pins configured to maintain alignment of the top microwave antenna and the bottom microwave antenna relative to the material. 6. The system of claim 1 , wherein the top microwave antenna and the bottom microwave antenna remain substantially parallel to each other as the presser provides the downward force onto the top microwave antenna toward the material. 7. The system of claim 1 , wherein the flexible waveguide has a plurality of ridges to facilitate the flexing of the flexible waveguide. 8. An apparatus for heating and compressing a material using microwaves, the apparatus comprising: a flexible waveguide configured to receive microwaves; a first microwave antenna connected to the flexible waveguide, having a plurality of slots, and configured to receive the microwaves and emit the microwaves through the plurality of slots to be received by a first side of the material and heat the material; and a presser coupled to the first microwave antenna and configured to provide a force onto the first microwave antenna toward the material to compress the material as the material is being heated by the microwaves, the flexible waveguide connected to the first microwave antenna being bent as the presser provides the force onto the first microwave antenna. 9. The apparatus of claim 8 , further comprising waveguide splitter configured to receive the microwaves and split the received microwaves into a first portion of the microwaves to be provided to the flexible waveguide, and a second portion of the microwaves. 10. The apparatus of claim 9 , further comprising: a rigid waveguide connected to the waveguide splitter and configured to receive the second portion of the microwaves; and a second microwave antenna connected to the rigid waveguide, having a second plurality of slots, and configured to receive the second portion of the microwaves and emit the second portion of the microwaves through the second plurality of slots to be received by a second side of the material and heat the material. 11. The apparatus of claim 10 , wherein the first microwave antenna and the second microwave antenna remain substantially parallel to each other as the presser provides the force onto the first microwave antenna toward the material. 12. The apparatus of claim 9 , further comprising: a first barrier located between the material and the first microwave antenna and configured to facilitate even transmission of pressure onto the material; and a second barrier located between the material and the second microwave antenna and configured to facilitate even transmission of pressure onto the material. 13. The apparatus of claim 12 , wherein the first barrier and the second barrier are made of quartz. 14. The apparatus of claim 8 , further comprising: first aligning pins located proximal to a first end of the first microwave antenna; and second aligning pins located proximal to a second end of the first microwave antenna, the first aligning pins and the second aligning pins configured to maintain alignment of the first microwave antenna relative to the material. 15. The apparatus of claim 8 , wherein the flexible waveguide has a plurality of ridges to facilitate the flexing of the flexible waveguide. 16. The apparatus of claim 8 , further comprising an enclosure configured to house the flexible waveguide and the first microwave antenna, and configured to receive the presser such that at least a portion of the presser is located within the enclosure. 17. A method for heating and compressing a material using microwaves, the method comprising: placing the material between a top microwave antenna and a bottom microwave antenna; providing a flexible waveguide connected to the top microwave antenna with a first portion of the microwaves; providing a rigid waveguide connected to the bottom microwave antenna with a second portion of the microwaves; emitting by a first plurality of slots of the top microwave antenna, the first portion of the microwaves onto a top side of the material to heat the material; emitting by a second plurality of slots of the bottom microwave antenna, the second portion of the microwaves onto a bottom side of the material to heat the material; and providing a downward force by a presser coupled to the top microwave antenna onto the top microwave antenna toward the material to compress the material between the top microwave antenna and the bottom microwave antenna as the material is being heated by the microwaves, the flexible waveguide connected to the top microwave antenna being bent as the presser provides the downward force onto the top microwave antenna. 18. The method of claim 17 , wherein the material is soaked in a liquid prior to being placed between the top microwave antenna and the bottom microwave antenna. 19. The method of claim 17 , wherein the material is placed between a top barrier connected to the top microwave antenna and a bottom barrier connected to the bottom microwave antenna. 20. The method of claim 17 , further compris
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