Durable, high performance wire grid polarizer

Patent metadata

Field	Value
Publication number	US-11002899-B2
Application number	US-201916519651-A
Country	US
Kind code	B2
Filing date	Jul 23, 2019
Priority date	Aug 16, 2016
Publication date	May 11, 2021
Grant date	May 11, 2021

Abstract

A method for making a wire grid polarizer (WGP) can provide WGPs with high temperature resistance, robust wires, oxidation resistance, and corrosion protection. In one embodiment, the method can comprise: (a) providing an array of wires on a bottom protection layer; (b) applying a top protection layer on the wires, spanning channels between wires; then (c) applying an upper barrier-layer on the top protection layer and into the channels through permeable junctions in the top protection layer. In a variation of this embodiment, the method can further comprise applying a lower barrier-layer before applying the top protection layer. In another variation, the bottom protection layer and the top protection layer can include aluminum oxide. In another embodiment, the method can comprise applying on the WGP an amino phosphonate then a hydrophobic chemical.

First claim

What is claimed is:

1. A method of manufacturing a wire grid polarizer (WGP), comprising:
providing an array of wires on a bottom protection layer with channels between adjacent wires, the channels being air filled;
applying an amino phosphonate as a conformal coating on the wires and on the bottom protection layer in the channels; and
applying a hydrophobic chemical as a conformal coating on the wires and on the bottom protection layer in the channels.

2. The method of claim 1 , wherein:
applying the amino phosphonate includes applying the amino phosphonate by liquid immersion deposition;
applying the hydrophobic chemical includes applying the hydrophobic chemical by vapor deposition; and
the hydrophobic chemical is an outermost solid material.

3. The method of claim 1 , wherein an order of steps in the method is providing the array of wires, applying the amino phosphonate, then applying the hydrophobic chemical.

4. The method of claim 1 , wherein the amino phosphonate has chemical formula N[CH 2 PO(OH) 2 ] 3 , and the amino phosphonate is sandwiched between the hydrophobic chemical and the wires.

5. The method of claim 1 , wherein the amino phosphonate has chemical formula N[CH 2 PO(OH) 2 ] 3 , and a mass fraction of amino phosphonate/hydrophobic chemical is ≥0.5 and ≤5.

6. The method of claim 1 , wherein the hydrophobic chemical includes Si(R 1 ) i (R 3 ) j , where i is 1 or 2, j is 1, 2, or 3, i+j=4, each R 1 independently is a hydrophobic group including CF 3 (CF 2 ) 3 (CH 2 ) m , m ≥1 and m ≤10, and each R 3 independently is any chemical element or group.

7. The method of claim 6 , wherein each R 3 independently is —Cl, —OR 7 , —OCOR 7 , —N(R 7 ) 2 , or —OH; and each R 7 independently is —CH 3 or—CH 2 CH 3 .

8. The method of claim 6 , wherein m≤3.

9. The method of claim 6 , wherein m=2.

10. The method of claim 1 , wherein the hydrophobic chemical includes Si(R 1 ) i (R 3 ) j , where i is 1 or 2, j is 1, 2, or 3, i+j=4, each R 1 independently is a hydrophobic group including CF 3 (CF 2 ) 2 (CH 2 ) m , m≥1 and m≤10, and each R 3 independently is any chemical element or group.

11. The method of claim 10 , wherein m≤3.

12. The method of claim 1 , further comprising applying a top protection layer after providing the array of wires and before applying the amino phosphonate and the hydrophobic chemical, wherein:
the array of wires is sandwiched the top protection layer and the bottom protection layer, the top protection layer spanning the channels, keeping the channels air filled, the bottom protection layer and the top protection layer each have a melting temperature≥600° C. and water solubility≤0.005 g/L;
thickness of the top protection layer is ≥10 nm and ≤1 μm; and
thickness of the bottom protection layer is ≤300 μm and ≤5 mm;
the upper barrier-layer is applied to allow each channel to extend beyond a distal end of the wires, farthest from the bottom protection layer, into the top protection layer for a depth≥10 nm.

13. The method of claim 12 , wherein the bottom protection layer and the top protection layer each have a coefficient of thermal conductivity≥2 W/(m*K); and an oxygen diffusion coefficient≤10 −21 m 2 /s.

14. The method of claim 12 , wherein the bottom protection layer and the top protection layer each have refractive index 1.3≤n≤1.8 and extinction coefficient≤0.1 across the visible light spectrum.

15. A method of manufacturing a wire grid polarizer (WGP), comprising:
providing an array of wires on a bottom protection layer with channels between adjacent wires, the channels being air filled; and
applying a hydrophobic chemical as a conformal coating on top of the wires, the hydrophobic chemical including Si(R 1 ) i (R 3 ) j , where i is 1 or 2, j is 1, 2, or 3, i+j=4, each R 1 independently is a hydrophobic group including CF 3 (CF 2 ) 3 (CH 2 ) m , m≥1 and m≤10, and each R 3 independently is any chemical element or group.

16. The method of claim 15 , wherein m≤3.

17. The method of claim 15 , wherein each R 3 independently is —Cl, —OR 7 , —OCOR 7 , —N(R 7 )2, or —OH; and each R 7 independently is —CH 3 or —CH 2 CH 3 .

18. A method of manufacturing a wire grid polarizer (WGP), comprising:
providing an array of wires on a bottom protection layer with channels between adjacent wires, the channels being air filled; and
applying a hydrophobic chemical as a conformal coating on top of the wires, the hydrophobic chemical including Si(R 1 ) i (R 3 ) j , where i is 1 or 2, j is 1, 2, or 3, i+j=4, each R 1 independently is a hydrophobic group including CF 3 (CF 2 ) n (CH 2 ) m , n≥1 and n≤8, m≥1 and m≤10, and each R 3 independently is any chemical element or group.

19. The method of claim 18 , wherein n=2.

20. The method of claim 18 , wherein each R 3 independently is —OR 7 , —OCOR 7 , or —N(R 7 ) 2 ; and each R 7 independently is —CH 3 or—CH 2 CH 3 .

Assignees

• Moxtek Inc

Inventors

• Nielson R Stewart
• George Matthew C
• Ogden Shaun
• Bowers Brian

Classifications

• C23C14/081 Primary

  of aluminium, magnesium or beryllium · CPC title

• G02F1/133548

  Wire-grid polarisers · CPC title

• C03C2218/10

  Deposition methods · CPC title

• G02B1/14

  Protective coatings, e.g. hard coatings · CPC title

• G02B5/3058 Primary

  comprising electrically conductive elements, e.g. wire grids, conductive particles · CPC title