System And Method For Reducing The Bandwidth Of A Laser And An Inspection System and Method Using A Laser
US-2015268176-A1 · Sep 24, 2015 · US
US9726897B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9726897-B2 |
| Application number | US-201514699803-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 29, 2015 |
| Priority date | May 28, 2014 |
| Publication date | Aug 8, 2017 |
| Grant date | Aug 8, 2017 |
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The cube polarizer can have modified prism dimensions to satisfy the following equation: OPL T - OPL R < 0.5 * t * n p 2 , where an optical path length is a distance of light travel through a material times an index of refraction of the material, OPL T is an optical path length of the transmitted beam, OPL R is an optical path length of the reflected beam, t is a thickness of the substrate between the first surface and the second surface of the substrate, and n p is an index of refraction of the first prism.
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A cube polarizer comprising: a. a first prism including: i. two triangular faces linked by an inner face, an outer face, and an outer side; and ii. a junction of the inner face and the outer side defining a first edge; b. a second prism including two triangular faces linked by an inner face, an outer face, and an outer side; c. a wire grid polarizer including: i. a substrate having a first surface and an opposite second surface substantially parallel to the first surface; and ii. an array of parallel, elongated, separated wires disposed over the first surface of the substrate; d. the wire grid polarizer sandwiched between the first prism and the second prism such that: i. the second surface of the substrate is attached to and faces the inner face of the second prism; ii. the wires are attached to and face the inner face of the first prism; iii. the outer face of the first prism is opposite to the outer face of the second prism; and iv. the outer side of the first prism is opposite to the outer side of the second prism; e. a plane of the outer face of the second prism is substantially aligned with the first edge of the first prism such that a distance (d 11 ) between the plane of the outer face of the second prism and the first edge of the first prism is less than 100 micrometers; f. a beam of light entering through the outer face of the first prism, is polarized at the wire grid polarizer, forming: i. a transmitted beam of light transmitting through the wire grid polarizer and exiting through the outer face of the second prism; and ii. a reflected beam of light reflecting off of the wire grid polarizer and exiting through the outer side of the first prism; and g. the cube polarizer satisfies the equation: OPL T - OPL R < 0.5 * t * n p 2 ; where iii. an optical path length is a distance of light travel through a material times an index of refraction of the material; iv. OPL T is an optical path length of the transmitted beam; v. OPL R is an optical path length of the reflected beam; vi. t is a thickness of the substrate between the first surface and the second surface of the substrate; and vii. n p is an index of refraction of the first prism. 2. The cube polarizer of claim 1 , wherein the distance (d 11 ) between the plane of the outer face of the second prism and the first edge of the first prism is less than 10 micrometers. 3. The cube polarizer of claim 1 , wherein the cube polarizer satisfies the equation: OPL T - OPL R < 0.1 * t * n p 2 . 4. The cube polarizer of claim 1 , wherein: a. the first prism further comprises: i. a junction of the outer face of the first prism and the outer side of the first prism defines a second edge of the first prism; ii. a junction of the inner face of the first prism and the outer face of the first prism defines a third edge of the first prism; iii. a distance from the first edge of the first prism to the second edge of the first prism defines an outer side length (L OS1 ) of the first prism; and iv. a distance from the second edge of the first prism to the third edge of the first prism defines an outer face length (L OF1 ) of the first prism; b. the second prism further comprises: i. a junction of the inner face of the second prism and the outer side of the second prism defines a first edge of the second prism; ii. a junction of the outer face of the second prism and the outer side of the second prism defines a second edge of the second prism; iii. a junction of the inner face of the second prism and the outer face of the second prism defines a third edge of the second prism; iv. a distance from the first edge of the second prism to the second edge of the second prism defines an outer side length (L OS2 ) of the second prism; and v. a distance from the second edge of the second prism to the third edge of the second prism defines an outer face length (L OF2 ) of the second prism; c. the outer face length (L OF1 ) of the first prism is greater than the outer face length (L OF2 ) of the second prism, and the outer side length (L OS1 ) of the first prism is greater than the outer side length (L OS2 ) of the second prism; and d. a plane of the outer side of the second prism is substantially aligned with the third edge of the first prism such that a distance (d 12 ) between the plane of the outer side of the second prism and the third edge of the first prism is less than 100 micrometers. 5. The cube polarizer of claim 4 , wherein the distance (d 12 ) between the plane of the outer side of the second prism and the third edge of the first prism is less than 10 micrometers. 6. The cube polarizer of claim 4 , wherein a difference between the outer side length (L OS1 ) of the first prism and the outer side length (L OS2 ) of the second prism is greater than 500 micrometers. 7. The cube polarizer of claim 4 , wherein a difference between the outer face length (L OF1 ) of the first prism and the outer face length (L OF2 ) of the second prism is greater than 500 micrometers. 8. The cube polarizer of claim 1 , further comprising: a. a thin film of silicon dioxide filling gaps between the wires and extending above the wires for a thickness of between 40 and 120 nanometers; and b. a thin film of titanium dioxide disposed over the thin film of silicon dioxide, the thin film of titanium dioxide having a thickness of between 50 and 150 nanometers. 9. The cube polarizer of claim 1 , wherein: a. the cube polarizer is designed to polarize light including a wavelength λ; b. the wires include a layer of metal and a layer of a material that is substantially absorptive of light having the wavelength λ; c. the cube polarizer is capable of polarizing an incoming beam of light having the wavelength λ into a first beam that is primarily reflected or absorbed by the wires and a second beam that is primarily transmitted through the wires; and d. at least 75% of the first beam is absorbed by the wires. 10. The cube polarizer of claim 1 , further comprising a second substrate, and wherein: the array of parallel, elongated, separated wires are sandwiched between the first substrate
comprising arrays of elements, e.g. microprisms · CPC title
used for beam splitting or combining · CPC title
using crossed beamsplitting surfaces, e.g. cross-dichroic cubes or X-cubes · CPC title
Coating structures, e.g. thin films multilayers · CPC title
comprising electrically conductive elements, e.g. wire grids, conductive particles · CPC title
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