Microelectronic devices having air gap structures integrated with interconnect for reduced parasitic capacitances

Patent metadata

Field	Value
Publication number	US-10998260-B2
Application number	US-201616462889-A
Country	US
Kind code	B2
Filing date	Dec 30, 2016
Priority date	Dec 30, 2016
Publication date	May 4, 2021
Grant date	May 4, 2021

Abstract

Embodiments of the invention include a microelectronic device that includes a substrate, at least one dielectric layer on the substrate and a plurality of conductive lines within the at least one dielectric layer. The microelectronic device also includes an air gap structure that is located below two or more of the plurality of conductive lines.

First claim

The invention claimed is:

1. A microelectronic device comprising:
a substrate;
at least one dielectric layer on the substrate;
a plurality of conductive lines within the at least one dielectric layer; and
an air gap structure located below two or more of the plurality of conductive lines, the air gap structure comprising a continuous air gap vertically beneath the two or more of the plurality of conductive lines.

2. The microelectronic device of claim 1 , wherein the air gap structure comprises a group III Nitride layer formed on an upper region and sidewalls of the air gap structure.

3. The microelectronic device of claim 2 , further comprising:
a metallization stack that includes first and second metal layers with the plurality of conductive lines being at the first metal layer of the metallization stack, wherein the first metal layer being closest to the substrate among the first and second metal layers of the metallization stack.

4. The microelectronic device of claim 2 , wherein the group III Nitride layer comprises an Aluminum Nitride layer, a Boron Nitride layer, a Gallium Nitride layer, an Indium Nitride layer, or any combination of these group III Nitride layers.

5. The microelectronic device of claim 2 , wherein the group III Nitride layer has a thickness of 50 to 250 nanometers.

6. The microelectronic device of claim 1 , wherein the substrate comprises a Silicon substrate.

7. The microelectronic device of claim 1 wherein the air gap structure comprises an air gap having a dielectric constant of approximately 1.0.

8. The microelectronic device of claim 1 , wherein the air gap structure has a substantially rectangular shape or a substantially trapezoidal shape.

Assignees

• Intel Corp

Inventors

• Then Han Wui
• Dasgupta Sansaptak
• Radosavljevic Marko
• Gardner Sanaz K

Classifications

• H10W20/072

  of dielectric parts comprising air gaps · CPC title

• H10W20/47

  comprising two or more dielectric layers having different properties, e.g. different dielectric constants · CPC title

• H10W20/46

  comprising air gaps · CPC title

• H10W10/021 Primary

  of air gaps · CPC title

• H10W10/20

  Air gaps · CPC title