Capacitor

Patent metadata

Field	Value
Publication number	US-10991509-B2
Application number	US-201916668513-A
Country	US
Kind code	B2
Filing date	Oct 30, 2019
Priority date	Jul 25, 2017
Publication date	Apr 27, 2021
Grant date	Apr 27, 2021

Abstract

A capacitor is provided that includes a base having a first main surface and a second main surface opposing each other with a trench formed on a side of the first main surface (110A. Moreover, a dielectric film is disposed in a region that includes an inside of the trench on the side of the first main surface of the base; a conductor film is provided that includes a first conductor layer disposed on the dielectric film, which is the region including the inside of the trench and a second conductor layer disposed on the first conductor layer; and a stress relieving portion is provided in contact with at least a part of the end of the first conductor layer. Moreover, a thickness of the stress relieving portion is smaller than a thickness of the conductor film, outside the trench portion of the first main surface of the base.

First claim

The invention claimed is:

1. A capacitor comprising:
a base having first and second main surfaces that oppose each other and a trench disposed on a side of the first main surface;
a dielectric film disposed in a region that includes an inside of the trench;
a conductor film having a first conductor layer disposed on the dielectric film, which extends inside the trench, and a second conductor layer disposed on the first conductor layer; and
a stress relieving structure disposed in contact with an end portion of the first conductor layer,
wherein the stress relieving structure comprises a thickness that is smaller than a thickness of the conductor film outside the trench disposed on the side of the first main surface of the base,
wherein the stress relieving structure is disposed on an upper surface opposing the first conductor layer of the dielectric film, and
wherein the stress relieving structure is disposed in a region inside the first conductor layer in a planar view of the first main surface of the base.

2. The capacitor according to claim 1 , wherein the stress relieving structure is disposed inside of the trench disposed on the side of the first main surface of the base.

3. The capacitor according to claim 1 , wherein the stress relieving structure is disposed in a region outside the first conductor layer in a planar view of the first main surface of the base.

4. The capacitor according to claim 1 , wherein the stress relieving structure is disposed inside the dielectric film.

5. The capacitor according to claim 1 , wherein an end surface of the first conductor layer coincides with an end surface of the second conductor layer in a planar view of the first main surface of the base.

6. The capacitor according to claim 1 , wherein an end surface of the first conductor layer is disposed outside an end surface of the second conductor layer in a planar view of the first main surface of the base.

7. The capacitor according to claim 6 , wherein the stress relieving structure is disposed in contact with an upper surface and the end surface of the first conductor layer.

8. The capacitor according to claim 1 , wherein the stress relieving structure does not directly contact the second conductor layer of the conductor film.

9. The capacitor according to claim 1 , wherein the stress relieving structure is disposed between the first and second conductor layers of the conductor film.

10. The capacitor according to claim 1 , further comprising a protective film disposed so as to avoid at least a part of the second conductor layer.

11. The capacitor according to claim 1 , wherein the thickness of each of the stress relieving structure and the conductor film extends in a thickness direction of the capacitor, and the stress relieving structure is disposed outside the conductor film in a widthwise direction of the capacitor that is orthogonal to the thickness direction.

12. The capacitor according to claim 1 , wherein a direction of a residual stress of the stress relieving structure is opposite to a direction of a residual stress of the second conductor layer.

13. The capacitor according to claim 1 ,
wherein the stress relieving structure is configured to provide a residual stress that extends in a direction that is opposite a residual stress of the second conductor layer.

14. The capacitor according to claim 1 , wherein the dielectric film is disposed above the first main surface of the base.

15. The capacitor according to claim 1 , wherein the end portion of the first conductor layer is an end surface with the stress relieving structure disposed in contact with the end surface.

16. A capacitor comprising:
a base having first and second main surfaces that oppose each other and a trench disposed on a side of the first main surface;
a dielectric film disposed in a region that includes an inside of the trench;
a conductor film having a first conductor layer disposed on the dielectric film, which extends inside the trench, and a second conductor layer disposed on the first conductor layer; and
a stress relieving structure disposed in contact with an end portion of the first conductor layer,
wherein the stress relieving structure comprises a thickness that is smaller than a thickness of the conductor film outside the trench disposed on the side of the first main surface of the base,
wherein the first conductor layer comprises a silicon-based semiconductor that contains at least one of phosphorus, boron or arsenic as an impurity, and
wherein the stress relieving structure comprises silicon oxide containing the at least one of phosphorus, boron or arsenic as an impurity.

17. A capacitor comprising:
a base having first and second main surfaces that oppose each other and a trench disposed on a side of the first main surface;
a dielectric film disposed in a region that includes an inside of the trench;
a conductor film having a first conductor layer disposed on the dielectric film, which extends inside the trench, and a second conductor layer disposed on the first conductor layer; and
a stress relieving structure disposed in contact with an end portion of the first conductor layer,
wherein the stress relieving structure comprises a thickness that is smaller than a thickness of the conductor film outside the trench disposed on the side of the first main surface of the base, and
wherein the stress relieving structure comprises silicon nitride containing hydrogen as an impurity.

Assignees

• Murata Manufacturing Co

Inventors

• Nakagawa Hiroshi
• Ashimine Tomoyuki
• Murase Yasuhiro

Classifications

• H10D1/665

  Trench conductor-insulator-semiconductor capacitors, e.g. trench MOS capacitors · CPC title

• H01G4/306

  made by thin film techniques · CPC title

• H01G4/1209 Primary

  characterised by the ceramic dielectric material (H01G4/1272, H01G4/1281 take precedence) · CPC title

• H01G4/012

  Form of non-self-supporting electrodes · CPC title

• H01G4/33 Primary

  Thin- or thick-film capacitors {(thin- or thick-film circuits; capacitors without a potential-jump or surface barrier specially adapted for integrated circuits, details thereof, multistep manufacturing processes therefor)} · CPC title