Preclean and dielectric deposition methodology for superconductor interconnect fabrication

Patent metadata

Field	Value
Publication number	US-10985059-B2
Application number	US-201816178306-A
Country	US
Kind code	B2
Filing date	Nov 1, 2018
Priority date	Nov 1, 2018
Publication date	Apr 20, 2021
Grant date	Apr 20, 2021

Abstract

A method is provided of forming a superconductor device interconnect structure. The method comprises forming a first dielectric layer overlying a substrate and forming a superconducting interconnect element in the first dielectric layer. The superconducting interconnect element includes a top surface aligned with a top surface of the first dielectric layer to form a first interconnect layer. The superconductor device interconnect structure is moved into a dielectric deposition chamber. The method further comprises performing a cleaning process on a top surface of the first interconnect layer in the dielectric deposition chamber to remove oxidization from a top surface of the first interconnect layer, and depositing a second dielectric layer over the first interconnect layer in the dielectric deposition chamber.

First claim

What is claimed is:

1. A method of forming a superconductor device interconnect structure, the method comprising:
forming a first dielectric layer overlying a substrate;
forming a superconducting interconnect element in the first dielectric layer, the superconducting interconnect element having a top surface aligned with a top surface of the first dielectric layer to form a first interconnect layer;
moving the superconductor device interconnect structure into a dielectric deposition chamber;
performing a nitrogen trifluoride (NF 3 ) based plasma clean etch process on a top surface of the first interconnect layer by providing an NF 3 plasma, argon (Ar) gas, and nitrogen (N 2 ) gas in the dielectric deposition chamber to remove oxidization from the top surface of the first interconnect layer;
pumping the NF 3 plasma and the argon (Ar) gas from the dielectric deposition chamber while maintaining flow of the N 2 gas; and
depositing a second dielectric layer over the first interconnect layer in the dielectric deposition chamber.

2. The method of claim 1 , wherein the superconducting interconnect element is formed from niobium.

3. The method of claim 1 , wherein the first and second dielectric layers are formed from a non-oxide based dielectric material.

4. The method of claim 3 , wherein the non-oxide based dielectric material is one of silicon nitride, amorphous silicon, and amorphous silicon carbide (SiC).

5. The method of claim 1 , wherein the forming the superconducting interconnect element that has the top surface aligned with the top surface of the first dielectric layer to form the first interconnect layer comprises forming openings in the first dielectric layer, performing a contact material fill to fill the formed openings, and performing a chemical mechanical polish (CMP) to align the top surface of the superconducting interconnect element with the top surface of the first dielectric layer, wherein the cleaning process removes oxidization on a top surface of the superconducting interconnect element caused by the CMP.

6. The method of claim 1 , wherein the superconducting interconnect element is a first conductive line and further comprising forming a second conductive line and a first contact in the second dielectric layer and a third conductive line and a second contact in the second dielectric layer, the first and second contacts being coupled to different portions of the first conductive line.

7. The method of claim 1 , wherein the cleaning process comprises:
setting a dielectric deposition chamber pressure to about 1.5T (Torr), and concurrently introducing nitrogen trifluoride (NF 3 ) gas at a flow rate of about 25 standard cubic centimeters per minute (sccm) to about 45 sccm, and the argon (Ar) gas at a flow rate of about 1050 sccm to about 1250 sccm;
setting a temperature of the dielectric deposition chamber to about 400° C.;
turning radio frequency (RF) power in the dielectric deposition chamber to about 700 Watts (W);
etching the top surface of the first interconnect layer at an etch rate of about 300 to about 850 angstroms per minute for about 10 seconds; and
evacuating the NF 3 gas and the Ar gas from the dielectric deposition chamber prior to the depositing a second dielectric layer over the first interconnect layer.

8. The method of claim 7 , further comprising introducing the nitrogen (N 2 ) gas at about 0 sccm to about 200 sccm with the NF 3 gas and the Ar gas.

9. The method of claim 7 , wherein the dielectric deposition chamber is a parallel plate plasma enhanced chemical vapor deposition (PECVD) chamber.

10. A method of forming a superconductor device interconnect structure, the method comprising:
disposing a superconducting interconnect layer in a dielectric deposition chamber, the superconducting interconnect layer having a superconducting contact or conductive line having a top surface aligned with a top surface of a first dielectric layer, wherein a top surface of the superconducting contact or conductive line has an oxidized layer, and a top surface of the first dielectric layer has an oxidized layer;
introducing nitrogen trifluoride (NF 3 ) gas into the dielectric deposition chamber;
introducing argon (Ar) gas and nitrogen (N 2 ) gas into the dielectric deposition chamber;
setting etch conditions to induce a plasma clean etch with the NF 3 gas and the Ar gas for a predetermined time period to remove the oxidized layer from the superconducting contact or conductive line and the oxidized layer from the first dielectric layer;
evacuating the NF 3 gas and the Ar gas from dielectric deposition chamber while maintaining flow of the N 2 gas prior to depositing the second dielectric layer over the first interconnect layer; and
depositing a second dielectric over the superconducting interconnect layer.

11. The method of claim 10 , wherein the superconducting material employed to form the superconducting contact or conductive line is niobium (Nb), the oxidized layer being niobium oxide and the plasma clean etch removes the oxidized layer from a surface of the niobium to form a clean niobium top surface, and removes the oxidized layer from the first dielectric layer.

12. The method of claim 10 , wherein the setting etch conditions comprises:
setting a dielectric deposition chamber pressure to about 1.5T (Torr), while concurrently introducing the NF 3 gas at a flow rate of about 25 standard cubic centimeters per minute (sccm) to about 45 sccm, along with the argon (Ar) gas at a flow rate of about 1050 sccm to about 1250 sccm;
setting a temperature of the dielectric deposition chamber to about 400° C.; and
turning radio frequency (RF) power in the dielectric deposition chamber to about 700 Watts (W); and
etching a surface of the superconducting interconnect layer at an etch rate of about 300 to about 850 angstroms per minute for about 10 seconds.

13. The method of claim 12 , further comprising introducing the nitrogen (N 2 ) gas at about 0 sccm to about 200 sccm with the NF 3 gas and the Ar gas.

14. The method of claim 10 , wherein the first and second dielectric layers are formed from a non-oxide based dielectric material.

15. The method of claim 14 , wherein the non-oxide based dielectric material is one of silicon nitride, amorphous silicon, and amorphous silicon carbide (SiC).

16. The method of claim 10 , wherein the superconducting interconnect layer is formed by forming openings in the first dielectric layer, performing a superconducting material fill to fill the formed openings, and performing a chemical mechanical polish (CMP) to align a top surface of the superconducting material fill with the top surface of the first dielectric layer, wherein the plasma clean etch process removes oxidization on the top surface of the superconducting material fill caused by the CMP.

17. The method of claim 10 , wherein the superconducting interconnect element is a first conductive line and further comprising forming a second conductive line and a first contact in the second dielectric layer and a third conductive line and a second contact in the second dielectric layer, the first and second contacts being coupled to different portions of the first conductive line.

18. The method of claim 10 , wherein the dielectric deposition chamber is a parallel plate plasma enhanced chemical vapor deposition (PECVD) chamber.

Assignees

• Wagner Brian Paul
• Kirby Christopher F
• Rennie Michael
• Kelliher James T
• Lim Khyhouth
• Northrop Grumman Systems Corp

Inventors

• Wagner Brian Paul
• Kirby Christopher F
• Rennie Michael
• Kelliher James T
• Lim Khyhouth

Classifications

• H10P14/40

  of conductive or resistive materials · CPC title

• H10P70/234

  the processing being the formation of vias or contact holes · CPC title

• H10P70/27

  during, before or after processing of conductive materials, e.g. polysilicon or amorphous silicon layers · CPC title

• H10W20/4484

  Superconducting materials · CPC title

• H10W20/096

  by contacting with gases, liquids or plasmas · CPC title