Method of manufacturing inductors in BEOL with particulate magnetic cores

Patent metadata

Field	Value
Publication number	US-10984948-B2
Application number	US-201715801926-A
Country	US
Kind code	B2
Filing date	Nov 2, 2017
Priority date	Jan 30, 2017
Publication date	Apr 20, 2021
Grant date	Apr 20, 2021

Abstract

A method for forming an inductor device. The method comprises forming a trench within a central core region of a conductive coil formed within a dielectric material. The method further comprises forming a composite region within the trench. The composite region including a polymer matrix having a plurality of particles with magnetic properties dispersed therein with the central core region to reduce eddy current loss and increase energy storage.

First claim

What is claimed is:

1. A method for forming an inductor device, comprising:
forming a conductive coil within a dielectric material;
forming a trench within a central core region of the conductive coil; and
forming a composite region within the trench, the composite region including a polymer matrix having a plurality of particles with magnetic properties dispersed in the polymer matrix to reduce eddy current loss and increase energy storage, each of the plurality of particles having an electrically charged coating, the plurality of particles including different sizes with electrical charges corresponding to particle size, wherein the central core region has a plurality of particle densities of the particles with magnetic properties.

2. The method as recited in claim 1 , wherein forming the composite region includes screen printing the composite region.

3. The method as recited in claim 1 , further comprising an average particle density of particles with the magnetic properties of at least 80% by volume in the central core region.

4. The method as recited in claim 1 , further comprising forming a solid core within the plurality of particles dispersed within the central core region.

5. The method as recited in claim 1 , wherein the plurality of particles are coated with a polyelectrolyte.

6. The method as recited in claim 1 , wherein the central core region has a plurality of layers, each of the layers having a different particle density of particles with the magnetic properties.

7. A method for forming an inductor device, comprising:
forming a trench within a central core region of a conductive coil; and
forming a composite region within the trench, the composite region including a polymer matrix having a plurality of particles with magnetic properties dispersed in the polymer matrix to reduce eddy current loss and increase energy storage, each of the plurality of particles having an electrically charged coating, the plurality of particles including different sizes with electrical charges corresponding to particle size.

8. The method as recited in claim 7 , wherein forming the composite region includes screen printing the composite region.

9. The method as recited in claim 7 , wherein the plurality of particles with magnetic properties have a plurality of particle densities.

10. The method as recited in claim 9 , wherein the particle density of the plurality particles with magnetic properties have an average particle density of at least 80% by volume in the central core region.

11. The method as recited in claim 7 , further comprising forming a solid core within the plurality of particles dispersed within the central core region.

12. The method as recited in claim 7 , wherein the plurality of particles with magnetic properties are coated with a polyelectrolyte.

13. The method as recited in claim 7 , wherein the central core region has a plurality of layers, each of the layers having a different particle density of the plurality of particles with magnetic properties.

14. The method as recited in claim 7 , wherein the conductive coil is formed within a dielectric material.

15. A method for forming an inductor device, comprising:
forming a conductive coil within a dielectric material;
forming a trench within a central core region of the conductive coil;
dispersing, in a polymer matrix, a plurality of particles with magnetic properties to reduce eddy current loss and increase energy storage, each of the plurality of particles having an electrically charged coating, the plurality of particles including different sizes with electrical charges corresponding to particle size; and
forming a composite region by depositing the polymer matrix within the trench.

16. The method as recited in claim 15 , wherein forming the composite region includes screen printing the composite region.

17. The method as recited in claim 15 , wherein the plurality of particles with magnetic properties have a plurality of particle densities.

18. The method as recited in claim 17 , wherein the particle density of the plurality particles with magnetic properties have an average particle density of at least 80% by volume in the central core region.

19. The method as recited in claim 15 , wherein the plurality of particles with magnetic properties are coated with a polyelectrolyte.

20. The method as recited in claim 15 , wherein the central core region has a plurality of layers, each of the layers having a different particle density of the plurality of particles with magnetic properties.

Assignees

• IBM

Inventors

• Kothandaraman Chandrasekharan
• O'Sullivan Eugene J
• Wang Naigang

Classifications

• H01F5/00

  Coils (superconducting coils H01F6/06; fixed inductances of the signal type H01F17/00) · CPC title

• H01F27/34

  Special means for preventing or reducing unwanted electric or magnetic effects, e.g. no-load losses, reactive currents, harmonics, oscillations, leakage fields · CPC title

• Y10T29/49075

  including permanent magnet or core · CPC title

• H01F1/0054

  Coated nanoparticles, e.g. nanoparticles coated with organic surfactant · CPC title

• H01F27/327

  Encapsulating or impregnating (encapsulating coil and core H01F27/022) · CPC title