Pressure sensor

Patent metadata

Field	Value
Publication number	US-10983022-B2
Application number	US-201916273740-A
Country	US
Kind code	B2
Filing date	Feb 12, 2019
Priority date	Sep 6, 2016
Publication date	Apr 20, 2021
Grant date	Apr 20, 2021

Abstract

A pressure sensor detects a pressure of a pressure transmitting medium. The pressure sensor includes a sensor substrate and a protection film. The sensor substrate includes a recess recessed relative to a periphery thereof and a thin portion thinner than the periphery due to the recess. The protection film is provided on a bottom surface of the recess that is one side of the thin portion and a part of a lateral surface of the recess, and the protection film suppresses an adhesion of a contamination contained in the pressure transmitting medium. The pressure sensor includes an adhesion suppressing portion that includes an uneven section formed in at least a part of the lateral surface, and a liquid repellent film repellent to liquid in the pressure transmitting medium and provided as the protection film on the uneven section to exhibit a lotus effect.

First claim

What is claimed is:

1. A pressure sensor that detects a pressure of a pressure transmitting medium, the pressure sensor comprising:
a sensor substrate including
a recess recessed relative to a periphery thereof, and
a thin portion thinner than the periphery due to the recess;

a protection film provided on a bottom surface of the recess that is one side of the thin portion and at least a part of a lateral surface of the recess, the protection film suppressing an adhesion of a contamination contained in the pressure transmitting medium, wherein
the recess and the thin portion are to be placed in the pressure transmitting medium,
the thin portion is configured to detect the pressure of the pressure transmitting medium,
the bottom surface has no unevenness,
the pressure sensor further comprises:
an adhesion suppressing portion including
an uneven section formed in at least a part of the lateral surface, and
a liquid repellent film repellent to liquid in the pressure transmitting medium and provided as the protection film on the uneven section to exhibit a lotus effect.

2. A pressure sensor that detects a pressure of a pressure transmitting medium, the pressure sensor comprising:
a sensor substrate including
a recess recessed relative to a periphery thereof, and
a thin portion thinner than the periphery due to the recess;

a protection film provided on a bottom surface of the recess that is one side of the thin portion and at least a part of a lateral surface of the recess, the protection film suppressing an adhesion of a contamination contained in the pressure transmitting medium, wherein
the recess and the thin portion are to be placed in the pressure transmitting medium,
the thin portion is configured to detect the pressure of the pressure transmitting medium,
the pressure sensor further comprises:
an adhesion suppressing portion including
an uneven section formed in at least a part of the lateral surface, and
a lyophilic film having a lyophilic property to liquid in the pressure transmitting medium and provided as the protection film on the uneven section to increase the lyophilic property.

3. The pressure sensor according to claim 1 , wherein
a height from a bottom of a valley portion of the uneven section to a vertex of a peak portion of the uneven section is equal to or larger than a thickness of a part of the protection film provided on the uneven section.

4. The pressure sensor according to claim 1 , wherein
the uneven section of the adhesion suppressing portion is formed in a part of the lateral surface within a predetermined area from a boundary between the lateral surface and the bottom surface, and
the protection film is provided on the uneven section.

5. The pressure sensor according to claim 4 , wherein
a thickness of a part of the protection film provided on the uneven section is equal to or larger than a thickness of a part of the protection film provided on the bottom surface.

6. The pressure sensor according to claim 1 , wherein
the adhesion suppressing portion is not provided on the bottom surface.

7. The pressure sensor according to claim 1 , wherein
an opening area of the recess on an open end of the recess is larger than an area of the bottom surface.

8. The pressure sensor according to claim 1 , wherein
an opening area of the recess on an open end of the recess is smaller than an area of the bottom surface.

Assignees

• Denso Corp

Inventors

• Kawano Shinji
• Mawatari Kazuaki

Classifications

• H10D48/50

  Devices controlled by mechanical forces, e.g. pressure · CPC title

• G01L19/0627 Primary

  Protection against aggressive medium in general · CPC title

• G01L19/06

  Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa · CPC title

• G01L19/148

  Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation · CPC title

• G01L9/0041 Primary

  Transmitting or indicating the displacement of flexible diaphragms · CPC title