Electrically functional polymer microneedle array

Patent metadata

Field	Value
Publication number	US-10980448-B2
Application number	US-201815980917-A
Country	US
Kind code	B2
Filing date	May 16, 2018
Priority date	May 16, 2018
Publication date	Apr 20, 2021
Grant date	Apr 20, 2021

Abstract

A sensor device, such as a biosensor, may comprise a polymer substrate, which is structured so as to form sets of microneedles and respective vias. The microneedles extend, each, from a base surface of the substrate. Each of the vias extends through a thickness of the substrate, thereby forming a corresponding set of apertures on the base surface. Each of the apertures is adjacent to a respective one of the microneedles. The device further may comprise two or more electrodes, these including a sensing electrode and a reference electrode. Each electrode may comprise an electrically conductive material layer that coats a region of the substrate, so as to coat at least some of the microneedles and neighboring portions of said base surface. Related devices, apparatuses, and methods of fabrication and use of such devices may be provided.

First claim

What is claimed is:

1. A sensor device, comprising:
a polymer substrate structured so as to form:
a set of microneedles that extend, each, from a base surface of the substrate; and
a set of vias extending, each, through a thickness of the substrate, thereby forming a corresponding set of apertures on said base surface, wherein each of the apertures is adjacent to a respective one of the microneedles; and

at least two electrodes, including a sensing electrode and a reference electrode, each comprising an electrically conductive material layer that coats a region of the substrate that is not in direct electrical contact with each other, so as to coat at least some of the microneedles and neighboring portions of said base surface to form an electrode pattern,
wherein the reference electrode comprises the electrically conductive material layer coated on a number of the microneedles in a crossed-shape pattern so as to form a central crossed-shape electrode such that the electrode pattern on the substrate is symmetric with respect to the central crossed-shape electrode.

2. The sensor device according to claim 1 , wherein
the electrically conductive material layers coat portions of the substrate around the apertures so as not to obstruct the vias.

3. The sensor device according to claim 1 , wherein
each of the microneedles has one facet that is essentially perpendicular to the base surface of the substrate.

4. The sensor device according to claim 3 , wherein
the apertures of the vias are, each, adjacent to and at a basis of the perpendicular facet of a respective one of the microneedles.

5. The sensor device according to claim 4 , wherein
the microneedles have, each, only one facet that is essentially perpendicular to said base surface.

6. The sensor device according to claim 5 , wherein
a standard deviation of angles between perpendicular facets of the microneedles and the base surface is less than 4°.

7. The sensor device according to claim 1 , wherein
an average height of the microneedles is less than or equal to 400 μm, this height measured perpendicular to and from said base surface.

8. The sensor device according to claim 7 , wherein
said average height is larger than or equal to 30 μm.

9. The sensor device according to claim 8 , wherein
said average height is larger than or equal to 100 μm.

10. The sensor device according to claim 1 , wherein
said microneedles form an array of microneedles, whereby the microneedles are distributed on said base surface according to a 2D lattice.

11. The sensor device according to claim 1 , wherein
an average, first-neighbor distance between apices of the microneedles in the array is less than or equal to 3 mm, each first-neighbor distance measured parallel to said base surface.

12. The sensor device according to claim 1 , wherein
said average, first-neighbor distance is larger than or equal to three times an average height of the microneedles, wherein said average height is larger than or equal to 30 μm and less than or equal to 400 μm.

13. The sensor device according to claim 1 , wherein
each of the electrically conductive material layers of the electrodes coats respective, non-overlapping portions of the base surface of the substrate.

14. The sensor device according to claim 13 , wherein
the sensor device further includes one or more additional electrodes, each comprising an electrically conductive material layer that partly coats a respective portion of the base surface of the substrate, wherein said respective portion does not overlap with any of the portions of the base surface coated by the material layers of the other electrodes of the device.

15. The sensor device according to claim 13 , wherein
the electrically conductive material layers are further structured so as to coat complementary portions of the base surface.

16. The sensor device according to claim 15 , wherein
said complementary portions are arranged in distinct sectors of the base surface of the substrate.

17. The sensor device according to claim 13 , wherein
one or each of the electrodes is further structured so as to electrically connect opposite sides of the substrate, said base surface being on one of said opposite sides.

18. The sensor device according to claim 1 , wherein
the polymer substrate comprises a photosensitive polymer.

19. The sensor device according to claim 1 , wherein
the sensor device further comprises a readout electronic unit comprising:
a housing; and
electronics encapsulated in the housing,

wherein
the electronics and the housing are configured such that the electronics can be set in electric communication with the electrodes, the electronics being otherwise configured to read signals obtained from the electrodes, in operation of the sensor device.

20. A method of fabrication of a sensor device, the method comprising:
patterning and structuring a polymer substrate to form:
a set of microneedles that extend, each, from a base surface of the substrate; and
a set of vias extending, each, through a thickness of the substrate, thereby forming a corresponding set of apertures on said base surface, wherein each of the apertures is adjacent to a respective one of the microneedles; and

at least two electrodes, including a sensing electrode and a reference electrode, each comprising an electrically conductive material layer that coats a region of the substrate that is not in direct electrical contact with each other, so as to coat at least some of the microneedles and neighboring portions of said base surface to form an electrode pattern,
wherein the reference electrode comprises the electrically conductive material layer coated on a number of the microneedles in a crossed-shape pattern so as to form a central crossed-shape electrode such that the electrode pattern on the substrate is symmetric with respect to the central crossed-shape electrode.

21. A method of analysis of a fluid, the method comprising:
providing a sensor device comprising:
a polymer substrate structured so as to form:
a set of microneedles that extend, each, from a base surface of the substrate; and
a set of vias extending, each, through a thickness of the substrate, thereby forming a corresponding set of apertures on said base surface, wherein each of the apertures is adjacent to a respective one of the microneedles; and

at least two electrodes, including a sensing electrode and a reference electrode, each comprising an electrically conductive material layer that coats a region of the substrate that is not in direct electrical contact with each other, so as to coat at least some of the microneedles and neighboring portions of said base surface, to form an electrode pattern,
wherein the reference electrode comprises the electrically conductive material layer coated on a number of the microneedles in a crossed-shape pattern so as to form a central crossed-shape electrode such that the electrode pattern on the substrate is symmetric with respect to the central crossed-shape electrode;

applying the polymer substrate on a body so as for the microneedles to penetrate into the body and so as to allow a fluid from the body to contact an exposed surface of the electrodes, and
reading signals obtained from the electrodes.

Assignees

• IBM

Inventors

• Ebejer Neil
• Drechsler Ute
• Ruch Patrick

Classifications

• B81C2201/056

  Releasing structures at the end of the manufacturing process · CPC title

• B81C2201/0147

  Film patterning · CPC title

• B81C2201/0108

  Sacrificial polymer, ashing of organics · CPC title

• B81C2201/0101

  Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning · CPC title

• H05K3/0014

  Shaping of the substrate, e.g. by moulding · CPC title