Optical manipulator, projection lens and projection exposure apparatus

Patent metadata

Field	Value
Publication number	US-10976667-B2
Application number	US-201615395460-A
Country	US
Kind code	B2
Filing date	Dec 30, 2016
Priority date	Jul 1, 2014
Publication date	Apr 13, 2021
Grant date	Apr 13, 2021

Abstract

An optical manipulator (MAN) includes an optical element (OE), in particular composed of fused silica, and an actuating device (DR) that reversibly changes the surface form (SF) of the optical element (OE). The actuating device (DR) has a plurality of actuators (AK) that mechanically act on the optical element (OE) at a plurality of contact areas. The optical element (OE) at least at action regions in vicinities of the contact areas of the actuators (AK) is prestressed to an compressive stress of more than 1 MPa, preferably of more than 100 MPa, particularly preferably of more than 500 MPa. Also disclosed are a projection lens provided with at least one such optical manipulator (MAN), a projection exposure apparatus having such a projection lens, and a method for producing such an optical manipulator (MAN).

First claim

What is claimed is:

1. An optical manipulator, comprising:
an optical element having a surface form that consists of an optically used region configured and arranged to be illuminated by light from an object field of a projection objective and a region outside the optically user region;
an actuating device reversibly changing the surface form of the optical element; and
a tensioning device enclosing the optical element in the region outside the optically used region, wherein the tensioning device generates a compressive stress with a mechanical prestress of the optical element,
wherein the actuating device comprises a plurality of actuators configured to mechanically act on the optical element at a plurality of contact areas of the optical element, wherein the plurality of actuators connect to the optical element at the plurality of contact areas that are in the region outside the optically used region, and
wherein the optical element, at action regions that partially overlap with the contact areas and are in the region outside the optically used region, is prestressed with the compressive stress of more than 1 MPa that counteracts a tensile stress introduced into the optical element by the plurality of actuators acting on the optical element.

2. The optical manipulator according to claim 1 , wherein the optical element is plate-shaped.

3. The optical manipulator according to claim 1 , wherein the compressive stress is formed at at least one surface of the optical element, in a near-surface volume region or in a non-near-surface volume region of the optical element.

4. The optical manipulator according to claim 1 , wherein the compressive stress is formed both within and outside the optically used region of the optical element.

5. The optical manipulator according to claim 1 , wherein the compressive stress is formed only outside the optically used region of the optical element.

6. The optical manipulator according to claim 1 , wherein the compressive stress is limited to the action regions.

7. The optical manipulator according to claim 1 , further comprising at least one coating which is vapour-deposited onto a surface of the optical element, which generates the compressive stress and which has a coefficient of thermal expansion that is greater than a coefficient of thermal expansion of the optical element.

8. The optical manipulator according to claim 1 , further comprising a layer which is connected to a surface of the optical element, which generates the compressive stress and which has a coefficient of thermal expansion that is greater than a coefficient of thermal expansion of the optical element.

9. The optical manipulator according to claim 1 , wherein ions or metal atoms are incorporated into the optical element, which generates the compressive stress at least in a near-surface volume region of the optical element.

10. The optical manipulator according to claim 9 , wherein the ions or the metal atoms are incorporated into the near-surface volume region by:
(a) ion exchange or by a gas-phase indiffusion, or
(b) ion-beam implantation.

11. The optical manipulator according to claim 1 , wherein the optical element is composed of fused silica.

12. The optical manipulator according to claim 1 , wherein the optical element is loaded with at least one gas, which generates the compressive stress.

13. The optical manipulator according to claim 12 , wherein the content of the gas at least in a near-surface volume region of the optical element is more than 1×10 16 molecules/cm 3 .

14. The optical manipulator according to claim 1 , wherein a material of the optical element, which generates the compressive stress in a near-surface volume region of the optical element has a density deviating from a remaining volume of the optical element and/or has a density gradient.

15. The optical manipulator according to claim 14 , wherein the material of the optical element in the near-surface volume region has a density at least 1% higher than in the remaining volume of the optical element.

16. The optical manipulator according to claim 14 , wherein the material of the optical element at least in the near-surface volume region has an OH content of more than 700 ppm and a hydrogen content of more than 5×10 17 molecules/cm 3 .

17. The optical manipulator according to claim 1 , wherein the compressive stress is generated by annealing of the optical element or by fusion of the optical element in a near-surface volume region of the optical element.

18. The optical manipulator according to claim 1 , wherein at least one contact area connecting at least one actuator to a surface of the optical element is surrounded by a circumferential groove formed at the surface of the optical element.

19. The optical manipulator according to claim 1 , wherein at least one actuator of the actuating device has an actuatable foot, at which a contact area connecting the actuator to a surface of the optical element is formed.

20. The optical manipulator according to claim 1 , wherein the action regions are prestressed with the compressive stress of more than 100 MPa prior to having the actuators mechanically act on the optical element.

21. The optical manipulator according to claim 1 , wherein the compressive stress is greater than the tensile stress introduced by the plurality of actuators.

22. The optical manipulator according to claim 1 , wherein the compressive stress and the tensile stress act perpendicularly to thickness direction of the optical element or substantially parallel to a surface of the optical element.

23. The optical manipulator according to claim 1 , wherein the optical element is prestressed with the compressive stress of more than 1 MPa that is not caused by the plurality of actuators mechanically acting on the optical element.

24. The optical manipulator according to claim 1 , wherein the tensioning device is in direct contact with the optical element.

25. The optical manipulator according to claim 1 , wherein the tensioning device continuously encompasses the optical element and clamps outer edges of the optical element.

26. The optical manipulator according to claim 1 , wherein the tensioning device is composed of glass and/or ceramic.

27. The optical manipulator according to claim 1 , wherein the tensioning device is a frame that is embodied in a segmented fashion and introduces the mechanical compressive stress along two principal axes of the optical element.

28. The optical manipulator according to claim 1 , wherein the tensioning device is composed of same material as the optical element.

29. The optical manipulator according to claim 1 , wherein the action regions are embodied in a circular or ring-shaped fashion around or below the contact areas.

30. The optical manipulator according to claim 1 , wherein the action regions are formed in an annular groove that surrounds the contact areas.

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Eva Eric

Classifications

• G03F7/70308

  Optical correction elements, filters or phase plates for manipulating imaging light, e.g. intensity, wavelength, polarisation, phase or image shift · CPC title

• G03F7/70958

  Optical materials or coatings, e.g. with particular transmittance, reflectance or anti-reflection properties · CPC title

• G02B27/0068

  having means for controlling the degree of correction, e.g. using phase modulators, movable elements (controlling the phase of light using moving or deformable elements G02B26/06) · CPC title

• G03F7/70266

  Adaptive optics, e.g. deformable optical elements for wavefront control, e.g. for aberration adjustment or correction · CPC title

• G03F7/7015 Primary

  Details of optical elements · CPC title