Gas transportation device

Patent metadata

Field	Value
Publication number	US-10975856-B2
Application number	US-201816058111-A
Country	US
Kind code	B2
Filing date	Aug 8, 2018
Priority date	Sep 15, 2017
Publication date	Apr 13, 2021
Grant date	Apr 13, 2021

Abstract

A gas transportation device is provided and includes a plurality of flow guiding units. Each of the flow guiding units includes an inlet plate, a substrate, a resonance plate, an actuating plate, a piezoelectric component, an outlet plate and a valve, which are sequentially stacked. A convergence chamber is formed between the resonance plate and the inlet plate. The actuating plate has a suspension part, an outer frame and a plurality of interspaces. The piezoelectric component is attached on a surface of the suspension part. Gas is inhaled into the convergence chamber via an inlet aperture of the inlet plate, is transported into a first chamber via a central aperture of the resonance plate, is further transported into a second chamber via the interspaces, and is discharged out from an outlet aperture of the outlet plate. The gas is transported by the flow guiding units disposed in a specific arrangement.

First claim

What is claimed is:

1. A gas transportation device comprising:
a plurality of flow guiding units having at least one inlet aperture, wherein each of the flow guiding units includes:
an inlet plate, wherein the at least one inlet aperture is disposed on the inlet plate;
a substrate;
a resonance plate having a central aperture, wherein a convergence chamber is formed between the resonance plate and the inlet plate;
an actuating plate having a suspension part, an outer frame and at least one interspace;
a piezoelectric component attached on a surface of the suspension part of the actuating plate;
an outlet plate having at least one outlet aperture; and
at least one valve disposed within at least one of the at least one inlet aperture and the at least one outlet aperture,
wherein the inlet plate, the substrate, the resonance plate, the actuating plate, the piezoelectric component and the outlet plate are sequentially stacked, a gap between the resonance plate and the actuating plate is formed as a first chamber, and a second chamber is formed between the actuating plate and the outlet plate, wherein while the piezoelectric component drives the actuating plate to generate a bending vibration in resonance, a pressure gradient is formed between the first chamber and the second chamber, and gas is inhaled into the convergence chamber via the at least one inlet aperture of the inlet plate, wherein the gas is subsequently transported into the first chamber via the central aperture of the resonance plate, is transported into the second chamber via the at least one interspace, and is then discharged out from the at least one outlet aperture of the outlet plate, and wherein the gas is transported by the plurality of flow guiding units, wherein the gas transportation device is produced by a micro-electro-mechanical-system (MEMS) process,
wherein the at least one valve includes a stationary component, a sealing component and a valve plate, wherein the valve plate is made of a charged material, and the stationary component is made of a bipolar conductive material, the stationary component is controlled by a control circuit to change electrical polarity, wherein an accommodation space is formed between the stationary component and the sealing component, and the valve plate is disposed within the accommodation space, wherein the stationary component has at least two first orifices, and the valve plate has at least two second orifices respectively corresponding in position to the at least two first orifices, wherein the sealing component has at least one third orifice misaligned with the at least two first orifices and the at least two second orifices, wherein while the valve plate and the stationary component are maintained in opposing polarities, the valve plate moves close to the stationary component so as to open the at least one valve, and while the valve plate and the stationary component are maintained in identical polarities, the valve plate moves close to the sealing component so as to close the at least one valve.

2. The gas transportation device according to claim 1 , wherein the plurality of the flow guiding units are arranged in a column.

3. The gas transportation device according to claim 1 , wherein the plurality of the flow guiding units are arranged in a row.

4. The gas transportation device according to claim 1 , wherein an arrangement of the flow guiding units is an annular arrangement.

5. The gas transportation device according to claim 1 , wherein an arrangement of the flow guiding units is a honeycomb arrangement.

Assignees

• Microjet Technology Co Ltd

Inventors

• Mou Hao-Jan
• Huang Chi-Feng
• Lee Wei-Ming
• Tai Hsien-Chung
• Han Yung-Lung

Classifications

• F04B39/10

  Adaptations or arrangements of distribution members · CPC title

• F04B53/10

  Valves; Arrangement of valves · CPC title

• F04B45/045

  with in- or outlet valve arranged in the plate-like pumping flexible members · CPC title

• F04B45/047 Primary

  Pumps having electric drive · CPC title

• F04B39/1066

  Valve plates · CPC title