Handy pump
US-2015367295-A1 · Dec 24, 2015 · US
System and method for miniaturization of synthetic jets
US9216899B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9216899-B2 |
| Application number | US-201313862616-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 15, 2013 |
| Priority date | Aug 26, 2008 |
| Publication date | Dec 22, 2015 |
| Grant date | Dec 22, 2015 |
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- Title
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Abstract
Official abstract text for this publication.
A micro-electromechanical (MEM) synthetic jet actuator includes a semiconductor substrate having a cavity extending therethrough, such that a first opening is formed in a first surface of the semiconductor substrate and such that a second opening is formed in a second surface of the semiconductor substrate. A first flexible membrane is formed on at least a portion of the front surface of the semiconductor substrate and extends over the first opening. The first flexible membrane also includes an orifice formed therein aligned with the first opening. The MEM synthetic jet actuator also includes a second flexible membrane that is formed on at least a portion of the second surface of the semiconductor substrate and that extends over the second opening, and a pair of actuator elements coupled to the flexible membranes and aligned with the cavity to selectively cause displacement of the first and second flexible membranes.
First claim
Opening claim text (preview).
What is claimed is: 1. A cooling system-integrated circuit (IC) chip arrangement comprising: an IC chip comprising a back surface having a plurality of depressions formed therein, the IC chip including a plurality of hot spots thereon that are at an elevated temperature as compared to a surrounding region during operation of the IC chip, wherein the plurality of depressions in the back surface of the IC chip are formed at locations corresponding to the hot spots; a cooling syste…
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Classifications
Electricity · mapped topic
- F04B45/047Primary
Mechanical Engineering · mapped topic
Operations & Transport · mapped topic
Electricity · mapped topic
Operations & Transport · mapped topic
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Frequently asked questions
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- What does patent US9216899B2 cover?
- A micro-electromechanical (MEM) synthetic jet actuator includes a semiconductor substrate having a cavity extending therethrough, such that a first opening is formed in a first surface of the semiconductor substrate and such that a second opening is formed in a second surface of the semiconductor substrate. A first flexible membrane is formed on at least a portion of the front surface of the se…
- Who is the assignee on this patent?
- Gen Electric
- What technology area does this patent fall under?
- Primary CPC classification F04B45/047. Mapped technology areas include Mechanical Engineering.
- When was this patent published?
- Publication date Tue Dec 22 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).