Cutting blade mounting mechanism

Patent metadata

Field	Value
Publication number	US-10974364-B2
Application number	US-201816134540-A
Country	US
Kind code	B2
Filing date	Sep 18, 2018
Priority date	Sep 21, 2017
Publication date	Apr 13, 2021
Grant date	Apr 13, 2021

Abstract

A cutting blade mounting mechanism for mounting a cutting blade to a tip portion of a spindle includes: a blade mount mounted to the tip portion of the spindle; and an air supply unit supplying air to the blade mount. The blade mount includes: a columnar boss section inserted into a through-hole provided in an annular base of the cutting blade; a flange section projecting in a radial direction from a side of a base end of the boss section and having a support surface supporting the cutting blade; and an ejector type blade suction section having a first air passage connecting a supply port supplied with air from the air supply unit and a discharge port discharging air, and a second air passage connecting a suction port opening to a side of the support surface of the flange section and the first air passage.

First claim

What is claimed is:

1. A cutting blade mounting mechanism for mounting a cutting blade to a tip portion of a spindle of a cutting apparatus, the cutting apparatus including a chuck table holding a workpiece, and a cutting unit cutting the workpiece held by the chuck table by the cutting blade mounted to the tip portion of the spindle rotatably supported by a spindle housing, the cutting blade having a cutting edge at an outer periphery of an annular base, the cutting blade mounting mechanism comprising:
a blade mount mounted to the tip portion of the spindle; and
an air supply unit supplying air to the blade mount, wherein the blade mount includes:
a columnar boss section inserted into a through-hole provided in the annular base of the cutting blade;
a flange section projecting in a radial direction from a side of a base end of the boss section and having a support surface supporting the cutting blade; and
an ejector blade suction section having a first air passage connecting a supply port supplied with air from the air supply unit and a discharge port discharging the air, and a second air passage connecting a suction port opening to a side of the support surface of the flange section and the first air passage, and the ejector blade suction section sucking the cutting blade by a negative pressure applied from the suction port.

2. The cutting blade mounting mechanism according to claim 1 , wherein the air supply unit is a rotary joint fixed to the spindle housing and supplying air to the blade mount rotated together with the spindle.

3. The cutting blade mounting mechanism according to claim 1 ,
wherein an air bearing section rotatably supporting the spindle by air and discharging the air through a gap between the spindle housing and the spindle toward a side of the tip portion of the spindle is provided inside the spindle housing, and
the supply port of the blade mount is supplied with the air discharged through the gap.

Assignees

• Disco Corp

Inventors

• Sekiya Kazuma

Classifications

• H10P54/00

  Cutting or separating of wafers, substrates or parts of devices · CPC title

• H10P72/0428

  Apparatus for mechanical treatment or grinding or cutting · CPC title

• F16C32/0614

  the gas being supplied under pressure, e.g. aerostatic bearings · CPC title

• B27B5/325

  using fluid pressure means · CPC title

• B23D59/025

  the lubricating or cooling medium being applied through the mounting means of the tool, e.g. the tool spindle or hub · CPC title