Photomask and exposure method

Patent metadata

Field	Value
Publication number	US-10969676-B2
Application number	US-201816106181-A
Country	US
Kind code	B2
Filing date	Aug 21, 2018
Priority date	Jan 2, 2018
Publication date	Apr 6, 2021
Grant date	Apr 6, 2021

Abstract

A photomask and an exposure method are provided. The photomask includes a photomask body including a first surface and a second surface opposite to each other; and a first light-transmissive region penetrating through the first surface and the second surface, wherein a light adjustment component is in the first light-transmissive region and configured to converge a first light beam incident onto the first surface to a second light beam emergent from the second surface, and a cross-sectional area of the first light beam sectioned by the first surface is larger than that of the second light beam sectioned by the second surface.

First claim

What is claimed is:

1. A photomask, comprising:
a photomask body, comprising a first surface and a second surface opposite to each other; and
a first light-transmissive region penetrating through the first surface and the second surface;
wherein a light adjustment component is in the first light-transmissive region and configured to converge a first light beam incident from one side of the photomask body at which the first surface is located to a second light beam emergent from the other side of the photomask body at which the second surface is located, and a cross-sectional area of the first light beam sectioned by the first surface is larger than that of the second light beam sectioned by the second surface;
wherein the first light-transmissive region comprises a first light-transmissive subregion in the first surface and a second light-transmissive subregion in the second surface, and an area of the first light-transmissive subregion is larger than that of the second light-transmissive subregion;
wherein the light adjustment component comprises a first light convergence structure in the first light-transmissive subregion, and a second light convergence structure or a light divergence structure in the second light-transmissive subregion;
wherein the first light convergence structure is a convex lens and the second light divergence structure is a concave lens, the light adjustment component comprises a first convex lens in the first light-transmissive subregion and the concave lens in the second light-transmissive subregion, an optic axis of the first convex lens and an optic axis of the concave lens coincide with each other, and a third focal point of the first convex lens close to the concave lens and a fourth focal point of the concave lens away from the first convex lens coincide with each other.

2. The photomask according to claim 1 , wherein the first convex lens and the photomask body are integrated, and the optic axis of the first convex lens is perpendicular to the first surface;
the concave lens and the photomask body are integrated, and the optic axis of the concave lens is perpendicular to the second surface.

3. The photomask according to claim 2 , wherein the photomask body comprises a first body portion and a second body portion split from each other, the first surface is on the first body portion and the first convex lens is integrated with the first body portion, and the optic axis of the first convex lens is perpendicular to the first surface;
the second surface is on the second body portion, the concave lens is integrated with the second body portion, and the optic axis of the concave lens is perpendicular to the second surface.

4. The photomask according to claim 1 , wherein the photomask body is formed of light transmissible materials, and regions of the photomask body other than the first light-transmissive region are provided with a light shielding layer.

5. The photomask according to claim 4 , wherein the photomask body is formed of quartz or glass, and the light shielding layer is formed of chromium oxide.

6. The photomask according to claim 1 , wherein a first light shielding layer is on regions of the first surface of the photomask body other than the first light-transmissive subregion, and a second light shielding layer is on regions of the second surface of the photomask body other than the second light-transmissive subregion.

7. The photomask according to claim 1 , further comprising:
a second light-transmissive region penetrating through the first surface and the second surface, wherein the second light-transmissive region comprises a third light-transmissive subregion in the first surface and a fourth light-transmissive subregion in the second surface, the third light-transmissive subregion and the fourth light-transmissive subregion is opposite to each other and have a same area, so that a third collimated light beam incident from the one side of the photomask body at which the first surface is located has a same width as that of a four collimated light beam emergent from the other side of the photomask body at which the second surface is located.

8. The photomask according to claim 7 , wherein a third light shielding layer is on regions of the first surface of the photomask body other than the first light-transmissive subregion and the third light-transmissive subregion, and a fourth light shielding layer is on regions of the second surface of the photomask body other than the second light-transmissive subregion and the fourth light-transmissive subregion.

9. An exposure method, comprising:
performing exposure by using the photomask according to claim 1 .

Assignees

• Boe Technology Group Co Ltd
• Chongqing Boe Optoelectronics Tech Co Ltd

Inventors

• He Chengyong
• Wang Yang
• Yang Jun
• Wang Xin
• Li Guanzheng
• Li Jinxiang
• Wang Xingming
• Cai Peng
• Cui Xiaochen
• Zhang Junwei
• Zhang Can
• Wang Chunjie

Classifications

• H10D86/0231

  using masks, e.g. half-tone masks · CPC title

• G03F7/70283

  Mask effects on the imaging process · CPC title

• G03F1/50 Primary

  Mask blanks not covered by G03F1/20 - G03F1/34; Preparation thereof · CPC title

• G03F7/2002

  with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image · CPC title

• G03F7/70316

  Details of optical elements, e.g. of Bragg reflectors, extreme ultraviolet [EUV] multilayer or bilayer mirrors or diffractive optical elements · CPC title