High flow multi-way piston valve for deposition systems

Patent metadata

Field	Value
Publication number	US-10969036-B2
Application number	US-201815993422-A
Country	US
Kind code	B2
Filing date	May 30, 2018
Priority date	May 30, 2018
Publication date	Apr 6, 2021
Grant date	Apr 6, 2021

Abstract

A valve assembly used with a process chamber for depositing a film on a wafer. A valve body surrounds a bore and includes an inlet, a first outlet and a second outlet, at least one of them exiting into the process chamber. A piston includes a first section having a first flow path, and a second section having a second flow path. A linear motion actuator is adapted to couple with the piston and controls linear movement of the piston through the bore between a first position and a second position. In the first position, the first section of the piston is aligned with the inlet such that fluid flows to the first outlet via the first flow path. In the second position, the second section of the piston is aligned with the inlet such that fluid flows to the second outlet via the second flow path.

First claim

What is claimed is:

1. A valve assembly suitable for use with a process chamber, comprising:
a valve body configured to surround a bore aligned with a central axis, wherein the valve body includes an inlet, a first outlet, and a second outlet, wherein at least one of the first outlet and the second outlet exiting into the process chamber;
the valve body configured to surround a travel space adjacent to the bore and aligned with the central axis, wherein a diameter of the travel space is larger than a diameter of the bore;
a piston having a first section and a second section, wherein the first section is configured to have a first flow path, and wherein the second section is configured to have a second flow path;
a piston adapter coupled to the piston and configured for movement within the travel space, wherein linear movement of the piston adapter is translated to linear movement of the piston;
a linear motion actuator adapted to couple with the piston adapter and configured to control the linear movement of the piston adapter through the travel space and the linear movement of the piston through the bore between a first position and a second position, the piston configured to be fully positioned within the bore when pushed through to an end of the bore,
wherein in the first position the first section of the piston is aligned with the inlet such that fluid flows from the inlet to the first outlet via the first flow path,
wherein in the second position the second section of the piston is aligned with the inlet such that fluid flows from the inlet to the second outlet via the second flow path.

2. The valve assembly of claim 1 , further comprising: a seal located between the piston and a surface of the travel space, wherein the seal is configured to prevent fluid from passing from the bore and completely through the travel space a first end of the bore in the valve body, the linear motion actuator coupled to the piston adapter through an end of the travel space.

3. The valve assembly of claim 2 , wherein the seal comprises a rolling diaphragm seated between the piston adapter and the piston, wherein an outer edge of the rolling diaphragm is attached to the surface of the travel space.

4. The valve assembly of claim 2 , wherein the seal comprises an O-ring.

5. The valve assembly of claim 1 , further comprising:
wherein the linear motion actuator comprises a pneumatic cylinder;
the piston adaptor configured to attach to a base of the piston, the base being adjacent to the first section,
wherein the piston adaptor is configured to attach to a shaft of the pneumatic cylinder, the linear movement of the shaft being translated to the piston through the piston adaptor.

6. The valve assembly of claim 1 , wherein the linear motion actuator comprises a servo motor.

7. The valve assembly of claim 1 , wherein fluid entering the valve assembly through the inlet is at a higher pressure than within the bore to induce fluid flow from the inlet to one of the first outlet and the second outlet.

8. The valve assembly of claim 1 , further comprising:
a spring mounted within a second end of the bore in the valve body, the spring adapted to push the piston towards a first end of the bore when the linear motion actuator is retracted.

9. The valve assembly of claim 1 , further comprising:
a two-factor sensor system for detecting whether the piston is in the first position or the second position, the two-factor sensor system comprising:
a first magnet at a first location in the piston;
a second magnet at a second location in the piston;
a first magnetic sensor at a first location in the valve body; and
a second magnetic sensor at a second location in the valve body,

wherein when the piston is in the first position, the first magnet and the first magnetic sensor are aligned and the second magnet and the second magnetic sensor are not aligned,
wherein when the piston is in the second position, the first magnet and the first magnetic sensor are not aligned and the second magnet and the second magnetic sensor are aligned.

10. The valve assembly of claim 1 , wherein the linear motion actuator is configured to control movement of the piston to a third position, such that fluid flows from the inlet to a portion of the first outlet via the first flow path and to a portion of the second outlet via the second flow path.

Assignees

• Lam Res Corp

Inventors

• Fortner James Isaac
• Rash Robert
• Berke Aaron
• Feng Jingbin

Classifications

• F16K11/0716 Primary

  with fluid passages through the valve member (F16K11/0704, F16K11/0708, F16K11/0712 take precedence) · CPC title

• C25D21/12 Primary

  Process control or regulation (controlling or regulating in general G05) · CPC title

• C25D7/12

  Semiconductors · CPC title

• F16K27/041

  cylindrical slide valves · CPC title

• F16K31/1221

  one side of the piston being spring-loaded · CPC title