Apparatus and method for bonding mask

Patent metadata

Field	Value
Publication number	US-10967456-B2
Application number	US-201816049485-A
Country	US
Kind code	B2
Filing date	Jul 30, 2018
Priority date	Nov 6, 2017
Publication date	Apr 6, 2021
Grant date	Apr 6, 2021

Abstract

An apparatus for bonding a mask includes a body and a pressing unit on the body. The pressing unit has a gas outlet for spraying pressing gas toward the bonding area of the mask.

First claim

What is claimed is:

1. An apparatus for bonding a mask, the mask comprising a metal mask and a mask frame, the metal mask and the mask frame being welded to a bonding area of the mask, the apparatus being disposed on a side of the metal mask far away from the mask frame, the apparatus comprising:
a body;
a pressing unit disposed on the body, the pressing unit having a gas outlet for spraying pressing gas toward the bonding area of the mask,
wherein the pressing unit comprises a fixed outlet cylinder and a movable outlet cylinder, the movable outlet cylinder is disposed in the fixed outlet cylinder and configured to expand and contract along an axis of the fixed outlet cylinder, and the movable outlet cylinder comprises a first sub-outlet on an end of the movable outlet cylinder;
a driving portion, a driving end of the driving portion being connected to the movable outlet cylinder; and
a detecting portion connected the driving portion, and configured to detect flatness of the bonding area between the metal mask and the mask frame, and control, according to information concerning the flatness, the driving portion to adjust a distance between the first sub-outlet and the bonding area.

2. The apparatus for bonding a mask according to claim 1 , wherein the pressing unit is one of a plurality of pressing units disposed on a side of the body, and a respective gas outlet on each of the plurality of pressing units is configured to spray the pressing gas toward a respective one of a plurality of positions on the bonding area of the mask.

3. The apparatus for bonding a mask according to claim 2 , wherein the plurality of pressing units are connected to the body moveably, and the respective gas outlet of each of the plurality of pressing units is configured to move close to or away from the bonding area of the mask.

4. The apparatus for bonding a mask according to claim 3 ,
wherein the first sub-outlet on the end of the movable outlet cylinder is movable to be close to or away from the bonding area of the mask, the end of the fixed outlet cylinder has a second annular sub-outlet, and a gas spraying direction of the second annular sub-outlet is same as that of the first sub-outlet.

5. The apparatus for bonding a mask according to claim 2 , wherein gas spraying directions of the respective gas outlet of each of the plurality of pressing units are parallel to each other.

6. A method for bonding a mask, comprising:
bonding a first bonding area of a metal mask and a second bonding area of a mask frame to each other;
disposing an apparatus for bonding the mask on a side of the metal mask that is away from the mask frame, wherein the apparatus comprises:
a body having a pressing unit disposed on the body, the pressing unit comprising a gas outlet, a fixed outlet cylinder, and a movable outlet cylinder, wherein the movable outlet cylinder is disposed in the fixed outlet cylinder and configured to expand and contract along an axis of the fixed outlet cylinder, the movable outlet cylinder comprising a first sub-outlet on an end of the movable outlet cylinder;
a driving portion, a driving end of the driving portion being connected to the movable outlet cylinder; and
a detecting portion connected the driving portion;

detecting flatness of the first bonding area and the second bonding area using the detecting portion;
adjusting a distance between the first sub-outlet on the apparatus for bonding a mask and the metal mask according to the flatness of the first bonding area and the second bonding area; and
spraying gas toward the first bonding area of the metal mask through the gas outlet.

7. The method for bonding the mask according to claim 6 , wherein a gas spraying direction of the gas outlet is perpendicular to the metal mask.

8. The method for bonding the mask according to claim 7 , wherein a pre-set angle is between the gas spraying direction of the gas outlet and the metal mask, and the pre-set angle ranges from 45 degrees to 60 degrees.

9. The method for bonding the mask according to claim 8 , wherein the gas outlet is configured to spray inert gas.

10. The method for bonding the mask according to claim 6 , the gas outlet of the apparatus for bonding a mask is disposed on the pressing unit.

11. The method for bonding the mask according to claim 10 , wherein the pressing unit is one of a plurality of pressing units disposed on a side of the body.

12. The method for bonding the mask according to claim 11 , wherein the plurality of pressing units are connected with the body movably, the gas outlet of the pressing unit being configured to be close to or away from the first bonding area of the mask.

13. The method for bonding the mask according to claim 12 ,
wherein the first sub-outlet on the end of the movable outlet cylinder is movable to be close to or away from the bonding area of the mask, the end of the fixed outlet cylinder has a second annular sub-outlet, and a gas spraying direction of the second annular sub-outlet is same as that of the first sub-outlet.

14. A system, comprising:
a mask comprising a metal mask and a mask frame, the metal mask and the mask frame being welded to a bonding area of the mask; and
an apparatus for bonding the mask that is disposed on a side of the metal mask far away from the mask frame, wherein the apparatus comprises:
a body;
a pressing unit disposed on the body, the pressing unit having a gas outlet configured to spray pressing gas toward the bonding area of the mask, wherein the pressing unit comprises a fixed outlet cylinder fixed to the body and a movable outlet cylinder disposed in the fixed outlet cylinder and movably connected with the fixed outlet cylinder, and the movable outlet cylinder comprises a first sub-outlet on an end of the movable outlet cylinder;
wherein the movable outlet cylinder expands and contracts along an axis of the fixed outlet cylinder such that the first sub-outlet on the end of the movable outlet cylinder moves close to or away from the bonding area of the mask;
wherein the end of the fixed outlet cylinder has a second annular sub-outlet, and a gas spraying direction of the second annular sub-outlet is same as that of the first sub-outlet;
a driving portion, a driving end of the driving portion being connected to the movable outlet cylinder; and

a detecting portion connected the driving portion, and configured to detect flatness of the bonding area between the metal mask and the mask frame, and control, according to information concerning the flatness, the driving portion to adjust a distance between the first sub-outlet and the bonding area.

15. The system according to claim 14 , wherein the pressing unit is one of a plurality of pressing units disposed on a side of the body.

16. The system according to claim 15 , wherein a respective gas outlet on each of the plurality of pressing units is used for spraying the pressing gas toward a respective one of a plurality of positions on the bonding area of the mask.

17. The system according to claim 15 , wherein the plurality of pressing units are connected to the body moveably, and a respective gas outlet of each of the plurality of pressing units is configured to move close to or away from the bonding area of the mask.

18. The system according to claim 15 , wherein gas spraying directions of the respective gas outlet of each of the plurality of pressing units are parallel to each other.

Assignees

• Boe Technology Group Co Ltd
• Ordos Yuansheng Optoelectronics Co Ltd

Inventors

• Qi Haiping

Classifications

• B23K20/02 Primary

  by means of a press {; Diffusion bonding} · CPC title

• B23K20/002

  specially adapted for particular articles or work (B23K20/129 takes precedence) · CPC title

• H01L51/0011

  Electricity · mapped topic

• H10K71/166 Primary

  using selective deposition, e.g. using a mask · CPC title

• Y02P70/50

  Manufacturing or production processes characterised by the final manufactured product · CPC title