Electro-fluidic flow probe

Patent metadata

Field	Value
Publication number	US-10967373-B2
Application number	US-201514744099-A
Country	US
Kind code	B2
Filing date	Jun 19, 2015
Priority date	Apr 16, 2014
Publication date	Apr 6, 2021
Grant date	Apr 6, 2021

Abstract

An apparatus for an electro-fluidic flow probe includes a body portion including an electro-fluidic bias tee for receiving (i) a fluid electrolyte and (ii) an electrical connection for providing an electrical potential to the fluid electrolyte; a first inlet including a tube extending from the first inlet to an outlet through the electro-fluidic bias tee; and a second inlet including the electrical connection having a wire that extends from the second inlet to the outlet through the electro-fluidic bias tee to transfer the electrical potential to a device under test.

First claim

What is claimed is:

1. A method for testing a nanochannel in a wafer, the method comprising:
connecting a first electro-fluidic flow probe to a first north fluidic port of a north microchannel, the first electro-fluidic flow probe comprising a body portion for receiving a fluid electrolyte from a first fluid source, a first inlet including a tube for receiving the fluid electrolyte extending from the first inlet to an outlet through an electro-fluidic bias tee, and a second inlet, the first inlet of the electro-fluidic bias tee being connected to a switch and in communication with the first fluid source through the switch, the first inlet configured to alternate between receiving the fluid electrolyte from the first fluid source through the switch and receiving air pressure from an air pressure source through the switch, the tube being both in direct contact with the electro-fluidic bias tee and distinct from the electro-fluidic bias tee;
connecting a second electro-fluidic flow probe to a first south fluidic port of a south microchannel, wherein the north microchannel is coupled to the south microchannel through the nanochannel;
filling the north microchannel with an electrical potential, wherein the electrical potential is delivered from the first electro-fluidic flow probe to the first north fluidic port and into the north microchannel;
filling the south microchannel with an electrical potential, wherein the electrical potential is delivered from the second electro-fluidic flow probe to the first south fluidic port and into the south microchannel;
measuring a current via the fluid electrolyte between the first electro-fluidic flow probe and the second electro-fluidic flow probe via the nanochannel to determine that the nanochannel is functional.

2. The method according to claim 1 , wherein the first fluid source is connected to a first pressure source, wherein the first pressure source passes the fluid electrolyte from the first fluid source through the first electro-fluidic flow probe.

3. The method according to claim 1 , wherein the second electro-fluidic flow probe is connected to a second fluid source that is connected to a second pressure source, and wherein the second pressure source passes a fluid electrolyte from the second fluid source through the second electro-fluidic flow probe.

4. The method according to claim 1 , further comprising:
connecting a third electro-fluidic flow probe to a second north fluidic port of the north microchannel; and
connecting a fourth electro-fluidic flow probe to a second south fluidic port of the south microchannel.

5. The method according to claim 4 , further comprising:
emptying the electrical potential from the north microchannel via the third electro-fluidic flow probe, wherein the electrical potential passes through the second north fluidic port and through the third electro-fluidic flow probe; and
emptying the electrical potential from the south microchannel via the fourth electro-fluidic flow probe, wherein the electrical potential passes through the second south fluidic port and through the fourth electro-fluidic flow probe.

6. The method according to claim 4 , wherein:
the third electro-fluidic flow probe is connected to a first drain for draining the electrical potential; and
the fourth electro-fluidic flow probe is connected to a second drain for draining the electrical potential.

7. The method according to claim 5 , further comprising:
connecting the first electro-fluidic flow probe to a first air pressure source, wherein the first air pressure source applies air pressure into the north microchannel and passes the electrical potential through the second north fluidic port and into the third electro-fluidic flow probe.

8. The method according to claim 5 , further comprising:
connecting the second electro-fluidic flow probe to a second air pressure source, wherein the second air pressure source applies air pressure into the south microchannel and passes the electrical potential through the second south fluidic port and into the fourth electro-fluidic flow probe.

9. The method according to claim 1 , wherein the wafer comprises a plurality of nanochannels, the method further comprising:
generating an ionic current map for each nanochannel in the wafer.

10. The method according to claim 1 , further comprising:
measuring the current between the first electro-fluidic flow probe and the third electro-fluidic probe to verify the filling of the north microchannel; and
measuring the current between the second electro-fluidic flow probe and the fourth electro-fluidic probe to verify the filling of the south microchannel.

11. The method according to claim 1 , wherein the wafer comprises a plurality of nanochannels, the method further comprising:
positioning the nanochannel relative to the north microchannel and the south microchannel; and
testing another nanochannel in the wafer after completing measurement of the current between the first electro-fluidic flow probe and the second electro-fluidic flow probe, the testing another nanochannel in the wafer including positioning the another nanochannel relative to the north microchannel and the south microchannel.

12. The method according to claim 1 , wherein the electro-fluidic bias tee is remote from the fluid source and is not in the fluid source.

13. The method according to claim 1 , wherein inner surfaces of the tube contain the wire while outer surfaces of the tube are not in contact with the wire; and
wherein the first inlet is coupled to the fluid source through the switch.

Assignees

• IBM

Inventors

• Astier Yann Andre Nicolas
• Bai Jingwei
• Kwark Young Hoon
• Polonsky Stanislav
• Smith Joshua T

Classifications

• H10P74/203

  Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects · CPC title

• H10P74/00

  Testing or measuring during manufacture or treatment of wafers, substrates or devices · CPC title

• H10P74/207

  Electrical properties, e.g. testing or measuring of resistance, deep levels or capacitance-voltage characteristics · CPC title

• G01N27/403

  Cells and electrode assemblies · CPC title

• G01N33/48721

  Investigating individual macromolecules, e.g. by translocation through nanopores (Coulter counters in general G01N15/12; fabrication methods for nanoscale apertures B81B1/00; sequencing of nucleic acids C12Q1/68) · CPC title