Substrate processing apparatus and substrate processing method

Patent metadata

Field	Value
Publication number	US-10964557-B2
Application number	US-201816051059-A
Country	US
Kind code	B2
Filing date	Jul 31, 2018
Priority date	Aug 4, 2017
Publication date	Mar 30, 2021
Grant date	Mar 30, 2021

Abstract

The present disclosure relates to a substrate processing apparatus and a substrate processing method. The substrate processing apparatus according to the exemplary embodiment of the present disclosure may include: a processing liquid supply tube; a nozzle unit which is supplied with a processing liquid from the processing liquid supply tube and discharges the processing liquid to the substrate; and a light source unit which is provided to irradiate the processing liquid discharged from the nozzle unit with ultraviolet rays. According to the present disclosure, the processing liquid, which is electrified while passing the processing liquid supply tube, is irradiated with ultraviolet rays, such that electricity is eliminated from the electrified processing liquid, and as a result, it is possible to minimize a problem that the substrate is contaminated by peripheral particles or arcing occurs on the substrate.

First claim

What is claimed is:

1. A substrate processing apparatus comprising:
a nozzle arm;
a processing liquid supply tube inserted in the nozzle arm;
a nozzle unit which is connected, in a vertical direction with respect to an upper surface of a substrate, to the nozzle arm and is supplied with a processing liquid from the processing liquid supply tube, and which discharges the processing liquid in the vertical direction to the upper surface of the substrate; and
a light source unit which is provided to emit ultraviolet rays to irradiate on the processing liquid discharged in the vertical direction and only a portion of the substrate, thereby irradiating the processing liquid discharged in the vertical direction from the nozzle unit and the processing liquid disposed on the portion of the substrate,
wherein the light source unit includes a housing, and an ultraviolet lamp which is installed in the housing and emits the ultraviolet rays, a reflective surface which is installed in the housing and reflects the ultraviolet rays, and a range in which the ultraviolet rays are emitted from the light source unit is determined by the reflective surface,
wherein the ultraviolet lamp and the reflective surface are positioned below the nozzle unit and are configured such that a portion of the ultraviolet rays emitted from the ultraviolet lamp irradiates in a parallel direction relative to the upper surface of the substrate and irradiates the processing liquid while the processing liquid is discharged in the vertical direction to the upper surface of the substrate from the nozzle unit, and
wherein the reflective surface is configured to be vertically non-overlapped with the nozzle unit.

2. The substrate processing apparatus of claim 1 ,
wherein the light source unit has an ultraviolet ray emission range in which the ultraviolet rays are emitted to the processing liquid supplied onto an upper surface of the substrate.

3. The substrate processing apparatus of claim 1 ,
wherein the light source unit has an ultraviolet ray emission range in which the ultraviolet rays are emitted to the processing liquid before the processing liquid discharged from the nozzle unit reaches the substrate.

4. The substrate processing apparatus of claim 1 ,
wherein the light source unit has an ultraviolet ray emission range in which the ultraviolet rays are emitted to both of the processing liquid before the processing liquid discharged from the nozzle unit reaches the substrate and the processing liquid supplied onto an upper surface of substrate.

5. The substrate processing apparatus of claim 1 ,
wherein the reflective surface includes multiple reflective surfaces having different angles, and
wherein the multiple reflective surfaces are configured to have emission angles of light that vary depending on directions.

6. The substrate processing apparatus of claim 1 , further comprising:
a drive unit which moves the nozzle unit from a standby position to a process position,
wherein the light source unit is moved by the drive unit.

7. The substrate processing apparatus of claim 1 , further comprising:
a drive unit which moves the nozzle unit from a standby position to a process position,
wherein the light source unit is moved by a drive unit provided separately from the drive unit.

8. The substrate processing apparatus of claim 1 ,
wherein the light source unit further includes:
a light guide unit which is connected to the ultraviolet lamp and transmits the ultraviolet rays; and
a light irradiation unit which irradiates the processing liquid with the ultraviolet rays transmitted through the light guide unit.

9. The substrate processing apparatus of claim 8 ,
wherein the light guide unit includes multiple light guide units, and the multiple light guide units are connected to the ultraviolet lamp.

10. The substrate processing apparatus of claim 1 , further comprising:
an emission range adjusting unit which adjusts an emission range of the ultraviolet rays emitted from the light source unit.

11. The substrate processing apparatus of claim 10 ,
wherein the emission range adjusting unit is a rotating shaft.

12. The substrate processing apparatus of claim 1 ,
wherein the ultraviolet rays have a wavelength range of ultraviolet ray C.

13. The substrate processing apparatus of claim 1 ,
wherein the processing liquid supply tube is made of an insulating material, and the processing liquid is positively electrified while passing through the processing liquid supply tube.

14. A substrate processing apparatus which performs a liquid processing process by supplying a processing liquid onto a substrate, the substrate processing apparatus comprising:
a nozzle arm;
a processing liquid storage unit inserted in the nozzle arm;
a nozzle unit which is connected, in a vertical direction with respect to an upper surface of the substrate, to the nozzle arm and discharges the processing liquid in the vertical direction to the upper surface of the substrate;
a processing liquid supply tube which delivers the processing liquid from the processing liquid storage unit to the nozzle unit;
a processing liquid supply valve which is installed in the processing liquid supply tube and operates to open or close;
a light source unit which includes an ultraviolet lamp that emits ultraviolet rays and a reflective surface that reflects the ultraviolet rays emitted from the ultraviolet lamp,
wherein the reflective surface is configured to be vertically non-overlapped with the nozzle unit and to irradiate the ultraviolet rays on only a portion of the substrate, thereby irradiating the processing liquid discharged from the nozzle unit and disposed on the portion of the substrate,
wherein the ultraviolet lamp and reflective surface are positioned below the nozzle unit and are configured such that a portion of the ultraviolet rays emitted from the ultraviolet lamp irradiates in a parallel direction relative to the upper surface of the substrate and irradiates the processing liquid while the processing liquid is discharged in the vertical direction to the upper surface of the substrate from the nozzle unit;
a switch which turns on or off the ultraviolet lamp; and
a control unit which controls an operation of opening and closing the processing liquid supply valve and an operation of turning on and off the ultraviolet lamp,
wherein the control unit controls the operation of opening and closing the processing liquid supply valve in conjunction with the operation of turning on and off the ultraviolet lamp.

15. The substrate processing apparatus of claim 14 ,
wherein the control unit operates the switch so that the ultraviolet lamp is turned on when a predetermined delay time has elapsed after opening the processing liquid supply valve.

16. The substrate processing apparatus of claim 1 , further comprising:
a substrate holder configured to hold the substrate;
a rotating shaft configured to rotate the substrate holder so that the entire surface of the substrate is irradiated by the ultraviolet rays emitted by the light source unit.

Assignees

• Semes Co Ltd

Inventors

• Kim Do Yeon
• Kim Jin Kyu
• Ju yoon jong
• Han Min Sung
• Won Joon Ho
• Hyun Yong Tak

Classifications

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• H10P72/7612

  characterised by lifting arrangements, e.g. lift pins · CPC title

• H10P72/0448

  Apparatus for applying a liquid, a resin, an ink or the like · CPC title

• H10P72/0436

  mainly by radiation · CPC title

• H10P72/0424

  using mainly spraying means, e.g. nozzles · CPC title