Wafer drying system

Patent metadata

Field	Value
Publication number	US-10962285-B2
Application number	US-201816034526-A
Country	US
Kind code	B2
Filing date	Jul 13, 2018
Priority date	Jul 13, 2018
Publication date	Mar 30, 2021
Grant date	Mar 30, 2021

Abstract

A wafer drying method to detect airborne molecular contaminants in a drying gas as a feedback parameter for a single wafer or multi-wafer drying process is provided. For example, the method includes dispensing in a wafer drying station a drying gas over one or more wafers; collecting the drying gas from an exhaust of the wafer drying station; determining the concentration of contaminants in the drying gas; re-dispensing the drying gas over the one or more wafers if the concentration of contaminants is higher than a baseline value; and transferring the one or more wafers out of the wafer drying station if the concentration is equal to or less than the baseline value.

First claim

What is claimed is:

1. A wafer drying system, comprising:
a wafer drying station configured to dispense a drying gas over one or more wafers to dry the one or more wafers, wherein the wafer drying station comprises an outlet;
an exhaust line configured to exhaust a first portion of the drying gas;
a detector configured to receive and determine a gas chemistry of a second portion of the drying gas;
a valve between the outlet and the exhaust line and between the outlet and the detector, wherein the valve is configured to divert the first and second portions of the drying gas to the exhaust line and detector, respectively; and
an analyzer configured to measure a concentration of a contaminant in the second portion of the drying gas; and
a computing unit configured to:
compare the concentration of the contaminant to a baseline value;
in response to the concentration of the contaminant being equal to or less than the baseline value, command the wafer drying station to remove the one or more wafers; and

in response to the concentration of the contaminant being greater than the baseline value, command the wafer drying station to continue drying the one or more wafers.

2. The wafer drying system of claim 1 , wherein the computing unit is further configured to, in response to the concentration of the contaminant being greater than the baseline value, command the wafer drying station to rinse the one or more wafers with deionized water.

3. The wafer drying system of claim 1 , wherein the contaminant is any one selected from the group of volatile organic compounds, amines, inorganic acids, acetone, sulfur dioxide, isopropyl alcohol, water vapors, and any combination thereof.

4. The wafer drying system of claim 1 ; wherein the drying gas comprises an inert gas.

5. The wafer drying system of claim 4 , wherein the inert gas comprises argon.

6. The wafer drying system of claim 1 , wherein the analyzer is any one selected from the group of a time of flight mass spectrometer, an ion mobility spectrometer, and a humidity detector.

7. The wafer drying system of claim 1 , further comprising a cluster tool that houses the wafer drying station and the computing unit.

8. A method of drying wafers, comprising:
dispensing, in a wafer drying station, a drying gas over one or more wafers;
diverting a first portion of the drying gas to an exhaust line and a second portion of the drying gas to a detector;
exhausting, via the exhaust line, the first portion of the drying gas from the wafer drying station;
collecting, in the detector, the second portion of the drying gas to determine a gas chemistry, of the second portion of the drying gas;
measuring, with an analyzer, a concentration of a contaminant in the second portion of the drying gas;
in response to the concentration of the contaminants being higher than a baseline value,
re-dispensing the drying gas over the one or more wafers; and
in response to the concentration of the contaminant being equal to or less than the baseline value, transferring the one or more wafers out of the wafer drying station.

9. The method of claim 8 , wherein the contaminant comprises one or more airborne molecular contaminants in the second portion of the drying gas.

10. The method of claim 8 , further comprising, in response to the concentration of the contaminant being higher than the baseline value, rinsing the one or more wafers with deionized water.

11. The method of claim 8 , further comprising:
spinning the one or more waters while dispensing and re-dispensing the drying gas over the one or more wafers.

12. The method of claim 8 , wherein the contaminant is any one selected from the group of volatile organic compounds, amines, inorganic acids,
acetone, sulfur dioxide, isopropyl alcohol, water vapors, and any combination thereof.

13. The method of claim 8 , wherein the drying gas comprises clean dry, air.

14. The method of claim 8 , further comprising:
after re-dispensing the drying gas over the one or more wafers, exhausting a first portion of the re-dispensed drying gas;
collecting; in the detector; a second portion of the re-dispended drying gas from the wafer drying station;
measuring, with the analyzer, another concentration of the contaminant in the second portion of the re-dispensed drying gas;
in response to the other concentration of the contaminant being higher than the baseline value, performing another dispensing of the drying gas over the one or more wafers; and
in response to the other concentration of the contaminant being equal to or less than the baseline value, transferring the one or more wafers out of the wafer drying station.

15. A wafer drying system, comprising:
a wafer drying station configured to dispense a drying gas over one or more wafers;
a detector configured to receive, from a valve coupled to an exhaust line of the wafer drying station, a portion of the drying gas dispensed over the one or more wafers, wherein the detector is further configured to determine a gas chemistry of the portion of the drying gas;
one or more analyzers configured to determine a concentration of an airborne molecular contaminant in the portion of the drying gas; and
a computer unit configured to:
receive the concentration of the airborne molecular contaminant from the one or more analyzers;
compare the concentration of the airborne molecular contaminant to one or more baseline values;
in response to the concentration of the airborne molecular contaminant being equal to or less than the baseline value, command the wafer drying station to remove the one or more wafers from the wafer drying station; and
in response to the concentration of the airborne molecular contaminant being greater than the baseline value, command the wafer drying station to continue dispensing the drying gas over the one or more wafers.

16. The wafer drying system of claim 15 , wherein the computer unit is further configured to, in response to the concentration of the airborne molecular contaminant being greater than the baseline value, command the wafer drying station to rinse the one or more wafers with deionized water.

17. The wafer drying system of claim 16 , wherein the wafer drying station is further configured to dispense deionized water over the one or more wafers in response to receiving a command from the computer unit.

18. The wafer drying system of claim 15 , wherein each of the one or more analyzers is configured to Moil determine a concentration of one or more airborne molecular contaminants.

19. The wafer drying system of claim 15 , wherein the airborne molecular contaminant is any one selected from the group of volatile organic compounds, amities, inorganic acids, acetone, sulfur dioxide, isopropyl alcohol, water vapors, and any combination thereof.

20. The wafer drying system of claim 15 , wherein the drying gas comprises nitrogen.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Hsu Wei-Chun
• Wu Sheng-Wei
• Wang Shu-Yen

Classifications

• H10P72/0604

  Process monitoring, e.g. flow or thickness monitoring · CPC title

• H10P72/0408 Primary

  for drying · CPC title

• F26B21/40 Primary

  using gases other than air · CPC title

• H10P72/06

  Apparatus for monitoring, sorting, marking, testing or measuring · CPC title

• H10P95/00

  Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass · CPC title