Three-terminal copper-driven neuromorphic device

Patent metadata

Field	Value
Publication number	US-10957937-B2
Application number	US-201916295986-A
Country	US
Kind code	B2
Filing date	Mar 7, 2019
Priority date	Mar 7, 2019
Publication date	Mar 23, 2021
Grant date	Mar 23, 2021

Abstract

Three-terminal solid state Cu-ion actuated analog switching devices are provided. In one aspect, a method of forming a switching device includes: depositing a channel layer on a substrate; forming a source contact and a drain contact on opposite ends of the channel layer; forming a solid electrolyte on the channel layer over the source contact and the drain contact; and depositing a gate onto the solid electrolyte, wherein the source contact, the drain contact, and the gate are three terminals of the switching device. A switching device and a method of operating a switching device are also provided.

First claim

What is claimed is:

1. A method of forming a switching device, the method comprising:
depositing a channel layer on a substrate;
forming a source contact and a drain contact on opposite ends of the channel layer;
forming a solid electrolyte on the channel layer over the source contact and the drain contact; and
depositing a gate onto the solid electrolyte, wherein the source contact, the drain contact, and the gate comprise three terminals of the switching device, and wherein the gate comprises Cu.

2. The method of claim 1 , wherein the solid electrolyte comprises a copper (Cu)-based ionic conductor having a formula Cu x A y B z , wherein A is selected from the group consisting of: rubidium (Rb), caesium (Cs), potassium (K), sodium (Na), lithium (Li) and combinations thereof, wherein B is selected from the group consisting of: fluorine (F), chlorine (Cl), bromine (Br), iodine (I) and combinations thereof, and wherein 0<x<20, 0<y<10, and 0<z<30.

3. The method of claim 2 , wherein the solid electrolyte comprises a rubidium copper iodide chloride material.

4. The method of claim 3 , wherein the rubidium copper iodide chloride material has a formula Rb 4 Cu 16 I 7 Cl 13 .

5. The method of claim 2 , wherein the solid electrolyte has an ionic conductivity of from about 0.34 Siemens per centimeter (S/cm) to about 1 S/cm and ranges therebetween.

6. The method of claim 1 , wherein the channel layer comprises a material selected from the group consisting of: tantalum nitride (TaN), titanium nitride (TiN), and combinations thereof.

7. The method of claim 1 , wherein the source contact and the drain contact comprise a metal selected from the group consisting of: gold (Au), silver (Ag), platinum (Pt), palladium (Pd), nickel (Ni), copper (Cu), and combinations thereof.

8. The method of claim 1 , further comprising:
depositing a metal seed layer onto the channel layer between the source contact and the drain contact.

9. The method of claim 8 , wherein the metal seed layer comprises Cu and at least one of gold (Au) and palladium (Pd).

10. A switching device, comprising:
a channel layer disposed on a substrate;
a source contact and a drain contact disposed on opposite ends of the channel layer;
a solid electrolyte disposed on the channel layer over the source contact and the drain contact, wherein the solid electrolyte comprises a Cu-based ionic conductor having a formula Cu x A y B z , wherein A is selected from the group consisting of: Rb, Cs, K, Na, Li and combinations thereof, wherein B is selected from the group consisting of: F, Cl, Br, I and combinations thereof, and wherein 0<x<20, 0<y<10, and 0<z<30; and
a gate disposed on the solid electrolyte, wherein the gate comprises Cu, and wherein the source contact, the drain contact, and the gate comprise three terminals of the switching device.

11. The switching device of claim 10 , wherein the solid electrolyte comprises a rubidium copper iodide chloride material having a formula Rb 4 Cu 16 I 7 Cl 13 .

12. The switching device of claim 10 , wherein the solid electrolyte has an ionic conductivity of from about 0.34 S/cm to about 1 S/cm and ranges therebetween.

13. The switching device of claim 10 , wherein the channel layer comprises a material selected from the group consisting of: TaN, TiN and combinations thereof.

14. The switching device of claim 10 , further comprising:
a metal seed layer disposed on the channel layer between the source contact and the drain contact.

15. The switching device of claim 14 , wherein the metal seed layer comprises Cu and at least one of Au and Pd.

16. A method of operating a switching device, the method comprising:
applying a voltage pulse to the switching device, wherein the switching device comprises:
a channel layer disposed on a substrate;
a source contact and a drain contact disposed on opposite ends of the channel layer;
a solid electrolyte disposed on the channel layer over the source contact and the drain contact;
a gate disposed on the solid electrolyte, wherein the first voltage pulse causes ion transport from the gate through the solid electrolyte to the channel layer, wherein the gate comprises Cu, and wherein the ions comprise Cu ions (Cu+); and

reading a resistance state of the switching device.

17. The method of claim 16 , wherein the solid electrolyte comprises a Cu-based ionic conductor having a formula Cu x A y B z , wherein A is selected from the group consisting of: Rb, Cs, K, Na, Li and combinations thereof, wherein B is selected from the group consisting of: F, Cl, Br, I and combinations thereof, and wherein 0<x<20, 0<y<10, and 0<z<30.

18. The method of claim 16 , further comprising:
applying a reverse voltage pulse to return the ions to the gate.

Assignees

• IBM

Inventors

• Todorov Teodor K
• Ando Takashi
• Narayanan Vijay
• Rozen John

Classifications

• Y02E60/10

  Energy storage using batteries · CPC title

• H01M10/0525

  Rocking-chair batteries, i.e. batteries with lithium insertion or intercalation in both electrodes; Lithium-ion batteries · CPC title

• H01G11/56

  Solid electrolytes, e.g. gels; Additives therein · CPC title

• H01M10/0562 Primary

  Solid materials · CPC title

• H01M4/581

  Chalcogenides or intercalation compounds thereof · CPC title