Dispensing nozzle design and dispensing method thereof

Patent metadata

Field	Value
Publication number	US-10948824-B2
Application number	US-201816124579-A
Country	US
Kind code	B2
Filing date	Sep 7, 2018
Priority date	Jun 28, 2018
Publication date	Mar 16, 2021
Grant date	Mar 16, 2021

Abstract

An apparatus for dispensing fluid includes a fluid source; a nozzle having an inner layer and an outer layer, the inner layer defining a bore in fluid communication with the fluid source; and a plurality of pins each moveable to be in physical contact with the outer layer, wherein the plurality of pins is operable to apply a force towards the outer layer to adjust a cross-section of the bore.

First claim

What is claimed is:

1. An apparatus for dispensing fluid, comprising:
a fluid source;
a nozzle having an inner layer and an outer layer, the inner layer defining a bore in fluid communication with the fluid source; and
a plurality of pins each moveable to be in physical contact with the outer layer, wherein the plurality of pins is operable to apply a force towards the outer layer to adjust a cross-section of the bore, and wherein the inner and outer layers are made of elastic material.

2. The apparatus of claim 1 , wherein each of the plurality of pins is moveable in a direction perpendicular to a longitudinal axis of the bore.

3. The apparatus of claim 1 , wherein each of the plurality of pins is movable by applying a gaseous pressure.

4. The apparatus of claim 1 , wherein the elastic material of the inner layer is more rigid than that of the outer layer.

5. The apparatus of claim 1 , wherein the inner and outer layers form a cavity that can be inflated by pumping in gas.

6. The apparatus of claim 1 , wherein the cross-section of the bore is adjustable to vary in shapes.

7. The apparatus of claim 6 , wherein the shapes are selected from triangle, rectangle, square, circle, oval, and polygon.

8. The apparatus of claim 1 , wherein the cross-section of the bore is adjustable to vary in cross-sectional areas along a longitudinal axis of the bore.

9. The apparatus of claim 1 , further comprising:
a gas outlet nozzle in a proximity region of an orifice of the nozzle, wherein the gas outlet nozzle is operable to increase an ambient pressure in the proximity region.

10. The apparatus of claim 1 , further comprising:
a moveable arm attached to the nozzle, the moveable arm being operable to move the nozzle horizontally and vertically.

11. The apparatus of claim 1 , further comprising:
a rotatable platform to hold and rotate a substrate to coat with the fluid dispensed from the nozzle.

12. The apparatus of claim 1 , wherein the plurality of pins is separated from the inner layer by the outer layer.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Cheng wei chang
• Liao Chi-Hung

Classifications

• H10P76/204

  of organic photoresist masks · CPC title

• H10P72/0448 Primary

  Apparatus for applying a liquid, a resin, an ink or the like · CPC title

• B05B1/326

  Gate valves; Sliding valves; Cocks · CPC title

• B05B7/0815

  with at least one gas jet intersecting a jet constituted by a liquid or a mixture containing a liquid for controlling the shape of the latter · CPC title

• G03F7/16

  Coating processes; Apparatus therefor (applying coatings to base materials in general B05; applying photosensitive compositions to base for photographic purposes G03C1/74) · CPC title