Phase-change material (PCM) radio frequency (RF) switch using a chemically protective and thermally conductive layer

Patent metadata

Field	Value
Publication number	US-10944052-B2
Application number	US-201816163881-A
Country	US
Kind code	B2
Filing date	Oct 18, 2018
Priority date	Aug 14, 2018
Publication date	Mar 9, 2021
Grant date	Mar 9, 2021

Abstract

A radio frequency (RF) switch includes a heating element, an aluminum nitride layer situated over the heating element, and a phase-change material (PCM) situated over the aluminum nitride layer. An inside segment of the heating element underlies an active segment of the PCM, and an intermediate segment of the heating element is situated between a terminal segment of the heating element and the inside segment of the heating element. The aluminum nitride layer situated over the inside segment of the heating element provides thermal conductivity and electrical insulation between the heating element and the active segment of the PCM. The aluminum nitride layer extends into the intermediate segment of the heating element and provides chemical protection to the intermediate segment of the heating element, such that the intermediate segment of the heating element remains substantially unetched and with substantially same thickness as the inside segment.

First claim

The invention claimed is:

1. A radio frequency (RF) switch comprising:
a heating element;
an aluminum nitride layer situated over said heating element;
a phase-change material (PCM) situated over said aluminum nitride layer;
said heating element extending transverse to said PCM;
said PCM defining an inside segment of said heating element underlying said PCM, and an intermediate segment of said heating element not underlying said PCM, said intermediate segment of said heating element being situated between a terminal segment of said heating element and said inside segment of said heating element;
said aluminum nitride layer situated over said inside segment of said heating element for providing thermal conductivity and electrical insulation between said heating element and said PCM;
said aluminum nitride layer at least partially extending over said intermediate segment of said heating element for providing chemical protection to said intermediate segment of said heating element;
a heating element contact situated over said terminal segment of said heating element, said heating element contact extending through said aluminum nitride layer.

2. The RF switch of claim 1 , further comprising a contact uniformity support layer situated over said PCM.

3. The RF switch of claim 1 , wherein said aluminum nitride layer further partially extends over said terminal segment of said heating element for providing chemical protection to said terminal segment of said heating element.

4. The RF switch of claim 1 , wherein a PCM contact is situated over a passive segment of said PCM.

5. The RF switch of claim 1 , wherein said aluminum nitride layer prevents stringers at an edge of said PCM from coupling to said heating element.

6. The RF switch of claim 1 , wherein said aluminum nitride layer is planar.

7. The RF switch of claim 1 , wherein said aluminum nitride layer is further situated over a lower dielectric, has a first thermal conductivity over said lower dielectric, and has a second thermal conductivity over said inside segment of said heating element;
said second thermal conductivity being higher than said first thermal conductivity, such that said aluminum nitride layer increases heat flow from said heating element in a direction toward an active segment of said PCM.

8. The RF switch of claim 1 , wherein said heating element comprises material selected from the group consisting of tungsten (W), molybdenum (Mo), titanium (Ti), titanium nitride (TiN), titanium tungsten (TiW), tantalum (Ta), nickel chromium (NiCr), and nickel chromium silicon (NiCrSi).

9. The RF switch of claim 1 , wherein said phase-change material is selected from the group consisting of germanium telluride (Ge X Te Y ), germanium antimony telluride (Ge X Sb Y Te Z ), germanium selenide (Ge X Se Y ), and any other chalcogenide.

10. The RF switch of claim 1 , wherein said aluminum nitride layer has a thickness greater than or approximately equal to five hundred angstroms and less than or approximately equal to five thousand angstroms (500 Å-5,000 Å).

11. A radio frequency (RF) switch comprising:
a heating element;
a chemically protective and thermally conductive layer situated over said heating element;
a phase-change material (PCM) situated over said chemically protective and thermally conductive layer;
said PCM defining an inside segment of said heating element underlying said PCM, and an intermediate segment of said heating element not underlying said PCM, said intermediate segment of said heating element being situated between a terminal segment of said heating element and said inside segment of said heating element;
wherein said chemically protective and thermally conductive layer at least partially extends over said intermediate segment;
a heating element contact situated over said terminal segment of said heating element, said heating element contact extending through said chemically protective and thermally conductive layer.

12. The RF switch of claim 11 , wherein said chemically protective and thermally conductive layer provides chemical protection to said intermediate segment of said heating element.

13. The RF switch of claim 11 , wherein said chemically protective and thermally conductive layer comprises a material selected from the group consisting of aluminum nitride, aluminum oxide, beryllium oxide, silicon carbide, diamond, and diamond-like carbon.

14. The RF switch of claim 11 , further comprising a contact uniformity support layer situated over said PCM.

15. The RF switch of claim 11 , wherein said chemically protective and thermally conductive layer performs as an etch stop.

16. The RF switch of claim 11 , further comprising a PCM contact situated over a passive segment of said PCM.

17. The RF switch of claim 11 , wherein said chemically protective and thermally conductive layer is situated over a lower dielectric, has a first thermal conductivity over said lower dielectric, and has a second thermal conductivity over said inside segment of said heating element, wherein said second thermal conductivity is higher than said first thermal conductivity.

18. The RF switch of claim 11 , wherein said heating element comprises material selected from the group consisting of tungsten (W), molybdenum (Mo), titanium (Ti), titanium nitride (TiN), titanium tungsten (TiW), tantalum (Ta), nickel chromium (NiCr), and nickel chromium silicon (NiCrSi).

19. The RF switch of claim 11 , wherein said phase-change material is selected from the group consisting of germanium telluride (Ge X Te Y ), germanium antimony telluride (Ge X Sb Y Te Z ), germanium selenide (Ge X Se Y ), and any other chalcogenide.

20. The RF switch of claim 11 , wherein said chemically protective and thermally conductive layer prevents stringers at an edge of said PCM from coupling to said heating element.

Assignees

• Newport Fab Llc

Inventors

• Slovin Gregory P
• El-Hinnawy Nabil
• Howard David J
• Rose Jefferson E

Classifications

• H01L45/1286

  Electricity · mapped topic

• H01L45/141

  Electricity · mapped topic

• H01L45/1608

  Electricity · mapped topic

• H01L45/1293

  Electricity · mapped topic

• H01L45/06 Primary

  Electricity · mapped topic