Methods for thermally calibrating reaction chambers

Patent metadata

Field	Value
Publication number	US-10943771-B2
Application number	US-202016833279-A
Country	US
Kind code	B2
Filing date	Mar 27, 2020
Priority date	Oct 26, 2016
Publication date	Mar 9, 2021
Grant date	Mar 9, 2021

Abstract

Methods for thermally calibrating reaction chambers are provided. In some embodiments, methods may include calculating a first correction factor of a first contact type temperature sensor within a first reaction chamber utilizing a first temperature sensor and applying the first correction factor to a first temperature controller to provide a first calibrated contact type temperature sensor. Embodiments may also include calculating a first calibration factor of a first non-contact type temperature sensor within the first reaction chamber utilizing the first calibrated contact type temperature sensor and applying the first calibration factor to the first non-contact type temperature sensor to provide a first calibrated non-contact type temperature sensor.

First claim

What is claimed is:

1. A reactor system comprising;
a first reaction chamber comprising:
a first calibrated contact type temperature sensor associated with a first temperature controller; and
a second reaction chamber comprising:
a second calibrated contact type temperature sensor associated with a second temperature controller; and
a first calibrated non-contact type temperature sensor, wherein the first calibrated non-contact type temperature sensor is able to be transferred between the first reaction chamber and the second reaction chamber,
wherein a calibration factor of the first calibrated non-contact type temperature sensor is calculated based on temperature measured using the first calibrated contact type temperature sensor; and
wherein a correction factor of the second contact type temperature sensor is calculated by comparing a temperature measurement sensed by the second contact type temperature sensor to a temperature sensed by the first calibrated non-contact type temperature sensor and calculating the correction factor for the second contact type temperature sensor based on the comparison.

2. The reactor system of claim 1 , wherein the first reaction chamber and the second reaction chamber comprise a quartz material.

3. The reactor system of claim 1 , wherein the first calibrated contact type temperature sensor comprises a first calibrated thermocouple.

4. The reactor system of claim 1 , wherein the second calibrated contact type temperature sensor comprises a second calibrated thermocouple.

5. The reactor system of claim 1 , wherein the first calibrated non-contact type temperature sensor comprises a first calibrated optical pyrometer.

6. The reactor system of claim 1 , wherein the first reaction chamber is substantially the same as the second reaction chamber.

7. The reactor system of claim 1 , wherein the temperature offset between the first reaction chamber and the second reaction chamber is less than 2° C.

8. The reactor system of claim 1 , wherein the first reaction chamber and the second reaction chamber further comprise at least one radiant heating lamp configured for heating at least one substrate disposed within the first reaction chamber or the second reaction chamber.

9. The reactor system of claim 1 , wherein the first calibrated non-contact type temperature sensor measures a temperature within the first reaction chamber.

10. The reactor system of claim 9 , wherein the first calibrated non-contact type temperature sensor measures a temperature within the second reaction chamber.

11. The reactor system of claim 1 , further comprising a susceptor, wherein the first calibrated contact type temperature sensor is located beneath the susceptor.

12. The reactor system of claim 11 , wherein a spider supports the susceptor and the spider is mounted to a shaft, and wherein the first calibrated contact type temperature sensor is at least partially within the shaft.

13. The reactor system of claim 1 , wherein the calibration factor of the first calibrated non-contact type temperature sensor is a calibration function calculated based on a range of temperatures measured using the first calibrated contact type temperature sensor.

14. The reactor system of claim 13 , wherein the correction factor of the second contact type temperature sensor is calculated for multiple temperatures.

15. The reactor system of claim 1 , wherein the first temperature controller is a PID controller.

16. The reactor system of claim 1 , wherein the second temperature controller is a PID controller.

Assignees

• Asm Ip Holding Bv

Inventors

• Kim Hyeongeu
• Jacobs Loren
• Westrom Peter

Classifications

• G01J5/80

  Calibration (using comparison with reference sources G01J5/52) · CPC title

• G01J5/0044

  Furnaces, ovens, kilns (G01J5/0007, G01J5/004 take precedence) · CPC title

• H01J37/32954 Primary

  Electron temperature measurement · CPC title

• C23C16/52

  Controlling or regulating the coating process {(C23C16/45557, C23C16/279 take precedence)} · CPC title

• G01K15/005

  Calibration · CPC title