Heating device and heating chamber

Patent metadata

Field	Value
Publication number	US-10937672-B2
Application number	US-201515543472-A
Country	US
Kind code	B2
Filing date	Dec 30, 2015
Priority date	Oct 9, 2015
Publication date	Mar 2, 2021
Grant date	Mar 2, 2021

Abstract

A heating device and a heating chamber are provided, comprising a base plate (21), at least three supporting columns (22) and a heating assembly, where the at least three supporting columns are arranged vertically on the base plate and are distributed at intervals along a circumferential direction of the base plate Top ends of the at least three supporting columns form a bearing surface for supporting a to-be-heated member (23). The heating assembly includes a heating light tube (24) and a thermal radiation shielding assembly, where the heating light tube is disposed above the base plate and below the bearing surface. A projection of an effective heating area formed by uniform distribution of the heating light tube on the base plate covers a projection of the bearing surface on the base plate. The thermal radiation shielding assembly shields heat radiated by the heating light tube towards surroundings and bottom.

First claim

What is claimed is:

1. A heating device, comprising a base plate, at least three supporting columns, a heating assembly, and a heating control system, wherein:
the at least three supporting columns are arranged vertically on the base plate and are distributed at intervals along a circumferential direction of the base plate, and top ends of the at least three supporting columns form a bearing surface for supporting a to-be-heated member;
the heating assembly comprises a plurality of heating light tubes and a thermal radiation shielding housing,
wherein:
the heating light tubes are divided into a plurality of heating groups based on different areas of the bearing surface, heating light tubes in a same heating group are electrically connected with each other, and heating light tubes in different heating groups are shielded from each other,
the heating light tubes are disposed above the base plate and below the bearing surface and are configured to radiate heat towards the bearing surface, and a projection of an effective heating area formed by uniform distribution of the heating light tubes on the base plate covers a projection of the bearing surface on the base plate, and
the thermal radiation shielding housing is arranged at surroundings and a bottom of the heating light tubes to shield heat radiated by the heating light tubes; and

the heating control system comprises a temperature detector, a temperature controller, an adjustment controller, and a plurality of power controllers,
wherein:
the temperature detector is configured to detect a real-time temperature at any position of the to-be-heated member in an execution stage of a heating process and send the real-time temperature to the temperature controller,
the temperature controller is configured to generate a control signal based on the real-time temperature sent from the temperature detector and a preset target temperature and send the control signal to the adjustment controller,
the adjustment controller is configured to respectively obtain a plurality of control sub-signals corresponding to the heating groups based on the control signal and a heating weighting function and send the plurality of control sub-signals to the plurality of power controllers in a one-to-one correspondence, and
a number of the power controllers corresponds to a number of the heating groups, and each power controller is configured to adjust heating power of the heating light tubes in a corresponding heating group based on the plurality of control sub-signals.

2. The heating device according to claim 1 , wherein each of the heating light tubes comprises a heating section and two non-heating sections located at two ends of the heating section, wherein:
a heating wire for generating heat is disposed in the heating section that corresponds to the effective heating area; and
wires respectively connected to two ends of the heating wire are disposed in each non-heating section and configured as an anode and a cathode of the heating light tube.

3. The heating device according to claim 2 , wherein, with respect to each of the heating light tubes, a shape and a size of a respective effective heating area are obtained by configuring a shape of the heating light tube and a length of the heating wire.

4. The heating device according to claim 2 , wherein;
the heating light tubes are straight tubes, and are arranged in parallel to each other at equal intervals; or
each of the heating light tubes comprises an arc-shaped portion and straight-line portions connected to two ends of the arc-shaped portion, wherein the arc-shaped portions of the heating light tubes are concentric, have different radii, and are arranged at equal intervals; and the straight-line portions of the heating light tubes are arranged in parallel to each other at equal intervals.

5. The heating device according to claim 2 , wherein the thermal radiation shielding housing comprises:
at least one first shielding member comprising a first horizontal part and a first vertical part, wherein the first horizontal part is located below the heating light tubes and covers the effective heating area; the first vertical part is connected to the first horizontal part and surrounds the heating section of the heating light tubes, and a top end of the first vertical part is higher than the heating light tubes; and
at least one second shielding member comprising a second horizontal part and a second vertical part, wherein the second vertical part surrounds the bearing surface and a top end of the second vertical part is higher than the bearing surface, the second horizontal part surrounds an outer side of the second vertical part, and a plane where the second horizontal part is located is higher than the first vertical part and the heating light tubes.

6. The heating device according to claim 5 , wherein a number of the a least one first shielding members is plural, and the first vertical parts of the plurality of first shielding members are arranged at intervals along a direction parallel to the bearing surface; and the first horizontal parts of the plurality of first shielding members are arranged at intervals along a direction perpendicular to the bearing surface.

7. The heating device according to claim 5 , wherein surfaces of the first horizontal part, the first vertical part, the second horizontal part and the second vertical part that faces towards the heating light tubes are respectively polished or plated to improve light reflectivity.

8. The heating device according to claim 1 , wherein a shape of the effective heating area corresponds to a shape of the bearing surface.

9. The heating device according to claim 1 , wherein the heating weighting function is established in a preset stage by a method of trial and error based on a temperature distribution condition of the to-be-heated member.

10. The heating device according to claim 9 , wherein in the preset stage, in a process of establishing the heating weighting function, temperature detection points are configured in areas of the bearing surface where the heating groups are located in a one-to-one correspondence; and
in a detection process, the real-time temperatures of the temperature detection points are detected; when a real-time temperature detected at any one of the temperature detection points is close to the preset target temperature, the temperature distribution condition of the to-be-heated member is obtained based on the real-time temperatures of the temperature detection points detected at a current moment, and the heating weighting function is established based on the temperature distribution condition, thereby allowing a temperature difference between different areas of the to-be-heated member to satisfy a requirement of a process on temperature uniformity.

11. The heating device according to claim 1 , wherein the heating weighting function is:
when T meas< Tp−T,Un=U;
when T meas≥ Tp−T,Un=fn ( U )= knU+b;

wherein n is an integer greater than 0 and less than or equal to N, and N is the number of the heating groups;
Tmeas is the real-time temperature detected by the temperature detector;
Un represents a control sub-signal corresponding to an n th heating group;
U represents the control signal;
fn (U) represents a preset correspondence rule corresponding to the n th heating group;
Tp is the preset target temperature;
T is a preset threshold temperature;
kn is a weighting coefficient corresponding to the n th heating group; and
b is a constant.

12. The heating device according to claim 1 , wherein one of the at least three supporting columns is configured as a thermocouple of the temperature

Assignees

• Beijing Naura Microelectronics Equipment Co Ltd

Inventors

• Zhang Jun
• Wu Xuewei
• Dong Boyu
• Xu Baogang
• Zhang Henan
• Guo Bingliang
• Zhang Wen
• Liu Shaohui

Classifications

• H10P72/7626

  characterised by the construction of the shaft · CPC title

• H10P72/0432

  mainly by conduction · CPC title

• H10P72/0602

  Temperature monitoring · CPC title

• H10P72/0436 Primary

  mainly by radiation · CPC title

• C23C14/35

  by application of a magnetic field, e.g. magnetron sputtering {(C23C14/3457 takes precedence)} · CPC title